Pfeiffer Vacuum TPR 271, Operating Instructions Manual

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13 Technical data and dimensions
13.1 General
mbar bar Pa hPa kPa Torr | mm Hg
mbar 1 1 · 10 -3 100 1 0.1 0.75
bar 1000 1
1 · 10 5
1000 100 750
Pa 0.01
1 · 10 -5
1 0.01
1 · 10 -3 7.5 · 10 -3
hPa 1
1 · 10 -3
100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr | mm Hg 1.33
1.33 · 10 -3
133.32 1.33 0.133 1
1 Pa = 1 N/m 2
Tbl. 11: Conversion table: Pressure units
mbar l/s
Pa m 3 /s
sccm Torr l/s
atm cm 3 /s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m 3 /s
10 1 592 7.5 9.87
sccm
1.69 · 10 -2 1.69 · 10 -3
1
1.27 · 10 -2 1.67 · 10 -2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm 3 /s 1.01 0.101 59.8 0.76 1
Tbl. 12: Conversion table: Units for gas throughput
13.2 Technical data
13.2.1 Technical data, TPR 270
Part number PT R26 770 PT R26 780 PT R26 781
Type designation TPR 270 TPR 270 TPR 270
Nominal diameter DN 16 ISO-KF DN 16 CF-F 1/8" NPT
Mounting orientation Arbitrary Arbitrary Arbitrary
Measuring method Pulse-Pirani Pulse-Pirani Pulse-Pirani
Filament Tungsten Tungsten Tungsten
Measuring range 1E-4 – 1E3 hPa 1E-4 – 1E3 hPa 1E-4 – 1E3 hPa
Precision
<2 · 10
-3
hPa: <Fac-
tor 2
<2 · 10
-3
hPa: <Fac-
tor 2
<2 · 10
-3
hPa: <Fac-
tor 2
Precision: 2 · 10 -3 – 20 hPa
± 10 % ± 10 % ± 10 %
Precision: 20 – 1000 hPa ± 30 % ± 30 % ± 30 %
Repeatability: 2 · 10 -3 – 20 hPa ± 2 % ± 2 % ± 2 %
Operating altitude, max. 2000 m 2000 m 2000 m
Pressure max. 4000 hPa 4000 hPa 4000 hPa
Operating site Indoor, weather-
proof
Indoor, weather-
proof
Indoor, weather-
proof
Ambient temperature 5 – 60 °C 5 – 60 °C 5 – 60 °C
Temperature: Storage -40 – 70 °C -40 – 70 °C -40 – 70 °C
Bakeout temperature at the
flange
80 °C 80 °C 80 °C
Measurement cable length 200 m 200 m 200 m
Input voltage(s) 15 – 30 V DC 15 – 30 V DC 15 – 30 V DC
Output signal: Measuring range 1.5 – 8.5 V 1.5 – 8.5 V 1.5 – 8.5 V
Technical data and dimensions
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