7 Disassembly
DANGER
Risk to life due to electric shock
An improperly earthed product is potentially fatal in the event of a fault.
► Connect the product galvanically with the earthed vacuum chamber.
► Ensure that the connection complies with the requirements of a protective bonding according to
EN 61010. (CF and VCR connections comply with this requirement.)
► Use electrically conductive centering rings and circlips for KF connections.
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
► Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
► Decontaminate affected parts before carrying out maintenance work.
► Wear protective equipment.
WARNING
Risk of injury resulting from overpressure in the vacuum system
Opening tensioning pieces with an overpressure
> 1000 hPa
in the vacuum system can lead to inju-
ries as a result of flying parts, and escaping process medium could prove harmful to health.
Elastomer seals in KF connections (e.g. O-rings) are not resistant to pressures
> 2500 hPa
. This
could prove harmful to health due to escaping process medium.
► Do not open any tensioning pieces when overpressure is prevalent in the vacuum system.
► Use suitable tensioning pieces for overpressure.
► Use tensioning pieces which can only be opened and closed using a tool (e.g. tightening strap-
circlip).
► Use sealing rings with an outer centering ring.
NOTICE
Impairment from contamination and damage
Touching the devices or components with bare hands increases the desorption rate and leads to in-
correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function.
► When working on high or ultra high vacuum systems, always wear clean, lint-free and powder-
free laboratory gloves.
► Only use clean tools.
► Make sure that the connection flanges are free of grease.
► Remove protective caps and protective covers from flanges and connections only when necessa-
ry.
► Carry out all work in a well lit area.
Prerequisites
● Vacuum system vented to atmospheric pressure
● Supply voltage switched off
Required tool
● Crosshead screwdriver
Disassembly
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