2
Index
Page
Page
1.
Safety Instructions .................................. 3
1.1. For Your Orientation........................................................... 3
1.2. Pictogram Definitions........................................................ 3
2.
Understanding The Pumps
TMH 262/TMU 262.................................... 4
2.1. Main Features..................................................................... 4
2.2. Differences Between The Pump Types.......................... 4
3.
Installation............................................... 5
3.1. Preparations For Installation............................................ 5
3.2. Installing The Pump,
Connecting The High Vacuum Side ................................ 5
Fitting The Splinter Shield................................................. 6
3.3. Connecting The Fore-Vacuum Side ................................ 6
3.4. Connecting The Cooling Unit............................................ 7
3.5. Connecting The Venting Valve......................................... 7
3.6. Connecting The Casing Heating Unit.............................. 7
3.7. Connecting The Electronic Drive Unit TC 100................ 8
3.8. Installing The Power Unit ................................................. 8
3.9. Installing The Operating And Display
Control UniT DCU 001/DCU 150 ........................................ 8
3.10. Connecting The Sealing Gas Valve................................. 8
3.11. Remote Control Unit........................................................... 9
3.12. Connecting The Serial Interface RS 485 ...................... 10
Connection ........................................................................ 10
Connecting The RS 485 ................................................... 10
3.13. Connections Diagram...................................................... 11
4.
Operations .............................................. 12
4.1. Before Switching ON....................................................... 12
4.2. Switching ON.................................................................... 12
4.3. Operations Via The Remote Control Unit ..................... 12
Local/Remote.................................................................... 12
Accessory Inputs ............................................................. 12
Pumping Station ............................................................... 12
Standby/Reset .................................................................. 12
Switch Outputs ................................................................. 13
Accessory Outputs .......................................................... 13
Analog Outputs................................................................. 13
4.4. Gas Type Dependent Operations .................................. 13
4.5. Switching OFF And Venting............................................ 13
4.6. Shutting Down For Longer Periods ............................... 14
4.7. Operations With The DCU 001/DCU 150 ....................... 14
5.
Monitoring Operations ......................... 14
5.1. Operations Display Via LED............................................ 14
5.2. Turbopump Temperature Management....................... 14
6.
What To Do In Case Of
Breakdowns ? ........................................ 15
7.
Maintenance .......................................... 16
7.1. Replacing The Lubricant Reservoir............................... 16
8.
Service ................................................... 17
9.
Technical Data....................................... 18
9.1. Dimensions Diagram ....................................................... 19
10. Spare Parts............................................. 20
11. Accessories ........................................... 21
Declaration of Contamination.................... 22
Manufacturer’s Declaration ........... (last page)
Please note:
Current operating instructions are available via
www.pfeiffer-vacuum.de under ”Infoservice”.
