Pfeiffer Vacuum TMH 1601 P C, Operating Instructions Manual

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Feature Unit TMH 1601 P TMH 1601 P TMH 1601 P C H (T) TMH 1601 P C H (T)
TMU 1601 P TMU 1601 P TMU 1601 P C H (T) TMU 1601 P C H (T)
CCoonnnneeccttiioonn nnoom miinnaall ddiiaam meetteerr::
IInnlleett DDN N 220000 IISSOO--KK DDN N 225500 IISSOO--KK DDN N 220000 IISSOO--KK DDN N 225500 IISSOO--KKFF
DDN N 220000 CCFF--FF DDN N 225500 CCFF--FF DDN N 220000 CCFF--FF DDN N 225500 CCFF--FF
OOuuttlleett DDN N 4400 IISSOO--KKFF DDN N 4400 IISSOO--KKFF
VVeennttiinngg ccoonnnneeccttiioonn GG 11//88”” GG 11//88””
Nominal rotation speed Hz (1/min) 600 (36 000) 600 (36 000)
Standby rotation speed Hz (1/min) 400 (24 000) 400 (24 000)
Start-up time
(up to 90% of the nominal
rotation speed fore-vacuum
pressure
≤ 0,1 mbar) min 6 6
Noise level dB (A) 47 47
Final pressure, backing pump mbar ≤ 5 ≤ 2.5
Maximum permissible rotor temperature °C 120 120
Permissible heat radiation power W 35 35
Volume flow rate for:
Nitrogen N2 l/s 1000 1400 1000 1400
Helium He l/s 1100 1200 1100 1210
Hydrogen H2 l/s 750 900 750 900
Compression ratio for:
N2 1011 > 109
He 2 · 107 1 · 105
H2 2 · 105 5 · 103
Maximum fore-vacuum pressure
N2 mbar 14 5
He mbar 12 4,5
H2 mbar 6 2
Maximum gas throughput1) 2) 3)
with HV pressure of 0.1 mbar
N2 mbarl/s 22 24
Ar mbarl/s ––– 27
with nominal rotation speed (water cooling)
N2 mbarl/s 12 18
Ar mbarl/s 7 12
with voltage range 90 - 132 VAC
N2 mbarl/s 9 15
Vertex power characteristics lines4)
A W / Hz 520 / 600 520 / 600
B W / Hz 560 / 450 560 / 450
C W / Hz 480 / 600 480 / 600
D W / Hz 520 / 348 520 / 348
Final pressure5)
with diaphragm vacuum pump
mbar < 5 · 10-10 < 1 · 10-8
with rotary vane vacuum pump mbar < 5 · 10-10 < 1 · 10-8
with UniDryTM mbar < 5 · 10-10 < 1 · 10-8
Lubricant
Type6) F3 F3
Filling volume cm3 65 65
Cooling water consumption
with water at 15 Þ C 7) l/h 100 100
Cooling water temperature Þ C 5 - 25 5 - 25
Permissible ambient temperature
with air cooling Þ C 0 - 35 –––
Power consumption:
Casing heating unit W 170 170
TMS heating W ––– 1000
Weight kg 49/51 51/53 49/51 51/53
Permissible magnetic field mT 3 3
Connection voltage VDC 140 ± 5% 140 ± 5%
Current consumption A 4.3 4.3
Power W 600 600
Protection class8) IP 30 IP 30
Relative humidity of air % 5 - 85 non condensing 5 - 85 non condensing
9. Technical Data
Please refer to the next page for explanations.