2
Index
Page
Page
1.
Safety Instructions................................ 3
1.1. For Your Orientation......................................................... 3
1.2. Pictogram Definitions...................................................... 3
2.
Understanding The Pumps
TMH 071 P/TMU 071 P ........................... 4
2.1. Main Features................................................................... 4
Proper Use ........................................................................ 4
Improper Use .................................................................... 4
2.2. Differences Between The Pump Types........................ 4
3.
Installation ............................................. 5
3.1. Preparations For Installation.......................................... 5
3.2.
Installing The Pump,
Connecting The High Vacuum Side .............................. 5
Fitting The Splinter Shield............................................... 6
3.3. Connecting The Fore-Vacuum Side .............................. 6
3.4. Connecting The Cooling Unit.......................................... 7
3.5. Connecting The Venting Valve....................................... 7
3.6. Connecting The Casing Heating Unit............................ 7
3.7. Connecting The Sealing Gas Valve............................... 7
3.8. Connecting The Electronic Drive Unit TC 600.............. 8
3.9. Installing The Power Unit ............................................... 8
3.10. Connecting The Remote Control Unit ........................... 9
3.11. Connecting The Serial Interface RS 485 ...................... 10
Connection ........................................................................ 10
Connecting The RS 485 ................................................... 10
3.12. Connections Diagram...................................................... 11
4.
Operations.............................................. 12
4.1. Before Switching ON....................................................... 12
4.2. Switching ON.................................................................... 12
4.3. Switching OFF And Venting............................................ 13
4.4. Operations With The DCU 001/DCU 100 ....................... 13
4.5. Gas Type Dependent Operations ...................................13
4.6. Shutting Down For Longer Periods ............................... 14
4.7. Operations With The Remote Control Unit................... 14
Venting Release (Optional)............................................. 14
Motor, Turbopump ........................................................... 14
Pumping Station ............................................................... 15
Heating/Reset ................................................................... 15
Standby.............................................................................. 15
Rotation Speed Setting Mode Via
Input PWM ........................................................................ 15
Switching Outputs............................................................ 15
5.
Monitoring Operations.......................... 16
5.1.
Operations Display Via LED............................................ 16
5.2.
Turbopump Temperature Management....................... 16
6.
What To Do In Case Of
Breakdowns ? ....................................... 17
7.
Maintenance.......................................... 18
7.1.
Replacing The Lubricant Reservoir............................... 18
8.
Service.................................................... 19
9.
Technical Data ....................................... 20
9.1.
Dimensions Diagram ....................................................... 21
10. Spare Parts............................................. 22
11. Accessories ........................................... 23
Declaration of Contamination ..................... 24
Manufacturer’s Declaration (last page)
P
Plle
ea
asse
e n
no
otte
e:: Current operating instructions are available via
www.pfeiffer-vacuum.de under ”Infoservice”.
