5 Operation
CAUTION
Danger of burns on hot surfaces
When baking out the turbopump or vacuum chamber, there is a danger of burns caused by touching,
even after the housing heater has been switched off.
► Implement thermal insulation measures on the heating sleeve, pump housing, and vacuum
chamber.
► Wear personal protective equipment if necessary.
► Allow the turbopump to cool down.
NOTICE
Damage to the turbopump due to excess temperature
High process temperatures will cause damage to the pump.
► Always use water cooling when using the vacuum pump with a housing heating or during opera-
tion with heated vacuum chambers.
► Avoid additional energy input in the vacuum pump when using a housing heater.
► Observe the limit values specified in the ambient conditions.
Important settings and function-related variables programmed ex factory as parameters in the vacuum
pump electronic drive unit. Each parameter has a three-digit number and a description. Parameter-driv-
en operation and control is supported via Pfeiffer Vacuum displays and control units, or externally via
RS-485 using Pfeiffer Vacuum protocol.
Parameter
Name
Designation
Setting
[P:001]
Heating
Heating
1 = On
[P:035]
CfgAccA1
Accessory connection A1
2 = heating
Tbl. 4:
Parameter settings in the electronic drive unit of the turbopump
Information regarding commissioning of the turbopump with heating sleeve
1. Observe the cooling water flow and flow rate.
Information regarding operation
The heating duration depends on the degree of contamination in the process, as well as the final pres-
sure to be reached.
► Determine the optimum bake-out time by running a pump-out to reach the prescribed final pres-
sure.
Operation
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