Pfeiffer Vacuum HIQUAD QMG 700 Operating Instructions Manual Download Page 11

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

 DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

► Instructions to avoid the danger situation

 WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

► Instructions to avoid the danger situation

 CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

► Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

► Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-
ment.

2.2 Safety instructions

Safety instructions according to product life stages

All safety instructions in this document are based on the results of a risk assessment. 
Pfeiffer Vacuum has taken into account all the relevant life stages of the product.

Risks during installation

 DANGER

Danger to life caused by electric voltage on the analyzer

During operation, dangerous voltage is present on the electrode system of the QMA analyzer. Com-
ponents in the vacuum system are dangerous to touch under certain conditions. There is danger to 
life due to electric voltage.

► Protect installed parts, connected units and lines against galvanic connections, flashover or 

charge carrier flow.

► Make sure that the QMA, vacuum chamber, and entire apparatus always have a proper connec-

tion to protective ground.

► Provide additional protection if the user can touch the analyzer when the vacuum system is open.
► Ensure mechanical protection against contact of the analyzer and the parts installed.
► Ensure compulsory separation of the current supply when opening the system (using a door con-

tact, for example).

Safety

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Summary of Contents for HIQUAD QMG 700

Page 1: ...OPERATING INSTRUCTIONS EN Translation of the Original QMG 700 HIQUAD Quadrupole mass spectrometer system...

Page 2: ...act info pfeiffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all mod...

Page 3: ...2 1 System chassis SC 700 19 3 2 2 Quadrupole controller board QC 700 19 3 2 3 Ion source supply IS 716 19 3 2 4 High voltage supply HV 701 20 3 2 5 High voltage supply HV 702 20 3 2 6 Input output mo...

Page 4: ...ng analyzer QMA 4x0 47 5 9 Connecting IO 700 47 5 10 Connecting IO 720 47 6 Commissioning 48 7 Operation 49 8 Decommissioning 50 9 Maintenance 51 9 1 Cleaning the control unit and system chassis 51 9...

Page 5: ...15 3 Analyzer QMA 4x0 67 15 4 Electrometer pre amplifier EP 422 67 15 5 Ion counter pre amplifier CP 400 68 EC Declaration of Conformity 69 Table of contents 5 70...

Page 6: ...mponents 60 Tbl 19 Limits of use QMS 700 61 Tbl 20 Technical data SC 700 61 Tbl 21 Technical data QC 700 62 Tbl 22 Operating modes and parameters QC 700 62 Tbl 23 Mass flow rate operating modes QC 700...

Page 7: ...n potentials at max neg IONREF 150 V negative polarity 30 Fig 30 Connections on HV 701 31 Fig 31 Connections on HV 702 31 Fig 32 Connections on IO 700 32 Fig 33 Block diagram of IO 700 33 Fig 34 View...

Page 8: ...BG 5401 QUADERA software documentation Part of the software Declaration of conformity A component of these in structions Tbl 1 Applicable documents You can find these documents in the Pfeiffer Vacuum...

Page 9: ...he document indicate useful information Note Tip 1 3 3 Stickers on the product This section describes all the stickers on the product along with their meanings SC 700 D 35614 Asslar Mod P N S N Input...

Page 10: ...r QMA Quadrupole mass spectrometer analyzer QMH Quadrupole mass spectrometer high frequency generator QMS Quadrupole mass spectrometer control unit SC System chassis SEM Secondary electron multiplier...

Page 11: ...afety instructions Safety instructions according to product life stages All safety instructions in this document are based on the results of a risk assessment Pfeiffer Vacuum has taken into account al...

Page 12: ...s entered it Instead contact Pfeiffer Vacuum Service Always disconnect the power supply before cleaning the unit Risks during maintenance DANGER Danger to life due to electric voltage High voltages ar...

Page 13: ...s before carrying out maintenance work Wear protective equipment 2 3 Safety precautions The product is designed according to the latest technology and recognized safety engineering rules Nevertheless...

Page 14: ...Pfeiffer Vacuum shall assume no responsibilities and warranty if the operating company or a third party disregards this document does not use the product for its intended purpose carries out any modi...

Page 15: ...ngineering field in accordance with nationally applicable regulations Knowledge of this documentation In addition these individuals must be familiar with applicable safety regulations and laws as well...

Page 16: ...product only in accordance with these operating instructions 3 Carry out all work only on the basis of the complete operating instructions and applicable docu ments 4 Comply with the limits of use 5...

Page 17: ...er pre amplifier CP 400 dependent on configura tions Performing ion count For ion counting use the CP 400 ion counter pre amplifier instead of the EP 422 electrometer pre amplifier The following block...

Page 18: ...SEV 16 Power supply pack 7 Electrometer pre amplifier EP 422 2 17 Mains connection AC 8 Electrometer pre amplifier EP 422 1 18 Analog and digital inputs and outputs 9 Ion counter pre amplifier CP 400...

Page 19: ...Quadrupole controller board QC 700 Quadrupole controller board QC 700 contains QMG 700 system controller and LAN USB interfaces to the PC Control of the HF stage Measurement signal processing Interfa...

Page 20: ...ired high voltage for detecting positive and negative ions raised SEM 218 of analyzer QMA 4x0 with the required high voltage for detecting positive ions Fig 8 High voltage supply HV 702 3 2 6 Input ou...

Page 21: ...r types Faraday collector SEM 217 SEM 218 both 90 off axis with integrated Faraday collector Fig 12 Analyzer QMA 4x0 3 5 Electrometer pre amplifier EP 422 The electrometer pre amplifier EP 422 amplifi...

Page 22: ...ecovery in the case of overmodulation Fig 13 Electrometer pre amplifier EP 422 3 6 Ion counter pre amplifier CP 400 The ion counter pre amplifier CP 400 contains pulse decoupling an amplifier and a pu...

Page 23: ...ion diagram 1 8 9 15 Fig 16 ANALOG I O pin assignment 1 Analog input channel 1 9 Analog input channel 1 2 Analog input channel 2 10 Analog input channel 2 3 Analog input channel 3 11 Analog input chan...

Page 24: ...nnel 3 Channel 5 Channel 6 Channel 7 Channel 8 Channel 9 Channel 10 Channel 11 Channel 12 Channel 13 Channel 14 Channel 15 Channel 16 Channel 1 20 9 22 10 DO_V Optocoupler isolated Optocoupler isolate...

Page 25: ...igital inputs 0 V 11 Digital input channel 1 3 4 24 24 V for digital input 12 Digital input channel 2 25 Digital input channel 4 13 Digital input channel 3 3 7 3 TP GAUGE connection Transmitter change...

Page 26: ...ssigned 5 V supply 1 10 19 9 18 26 Fig 23 CTRL pin assignment Pin Signal word Signal type Description 1 GND GND above 100 to GND 10 GND GND 26 GND GND 2 RUN IN TTL input Input for external measuring c...

Page 27: ...ove 200 20 AO MON 0 GND Reference signal for AO MON 0 above 200 to GND 8 AO MON 1 Analog output Freely applicable output 6 10 V 12 bit max 0 1mA above 200 21 AO MON 1 GND Reference signal for AO MON 1...

Page 28: ...assignment Pin Signal word Signal type Description 1 EXT PROT 24 V digital input Filament protection input Keep the pin with activated external protection by means of potential free contact at GND int...

Page 29: ...tching on QMS 700 only with QMA cable Only switch on QMS 700 with the QMA cable properly connected External voltage source You must limit the external voltage source for V0 reliably to 2 mA V1 related...

Page 30: ...7 V V3 FOCUS 3 mA 20 mV 120 mV 1 6 0 V V4 F AXIS 3 mA 20 mV 120 mV 1 6 0 V V5 EXTRACT 100 A 58 82 mV 240 mV 1 6 0 V V6 DEF I 11 100 A 58 82 mV 240 mV 1 6 0 V V7 DEF O 12 100 A 58 82 mV 240 mV 1 6 0 V...

Page 31: ...connection HV 3 7 7 Connections on HV 702 The function and configuration of HV 702 are dependent on the operating mode 3 1 2 Fig 31 Connections on HV 702 1 Conversion dynode connection CD 3 High volt...

Page 32: ...USEM UCD 2 SEM positively raised Detection of negative ions HV SEM HV HV SEM HV positive high lev el voltage CD not used _ HV HV _ CP HV HV 702 CP HV_ _ USEM UBIAS 3 SEM negative ly raised Detection o...

Page 33: ...yp 2 8 mA ISOLATION ISOLATION ISOLATION ISOLATION EXT 0V EXT 24 V R_LOAD 5 K V IN R_IN 100 K CAN GND CAN_L SHIELD CAN_H 24 V EXTERNAL 24 V POWER SUPPLY 0 V 24 V max 10 A blue 0 5 mm red 0 5 mm 5a 6c 5...

Page 34: ...7 10 Connections on EP 422 1 2 Fig 35 Connections on EP 422 1 Connection for analyzer QMA 2 Connection cable to HF generator QMH permanently mounted 3 7 11 Connections on CP 400 You can find informat...

Page 35: ...tion Cable Length m Order number 1 Connection IS 716 QMA 4x0 3 10 BG548082 T BG548083 T 2 Connection QC 700 QMH 4xx Extension cable 3 7 mounted on QMH 4xx BG448175 T 3 Connection EP 422 1 QMH 4xx 0 85...

Page 36: ...90 SEM operating mode with HV 701 Position Cable jump plug Length m Order number 7 Connection EP 422 2 QMH 4xx 0 85 mounted on EP 422 8 HV connection HV 701 QMA 4x0 HV 3 10 BG541978 T BG541979 T 11 H...

Page 37: ...38 Wiring for CP operating mode ion counter with HV 701 Position Cable jump plug Length m Order number 8 HV connection HV 701 CP 400 3 10 BG541978 T BG541979 T 10 Connection QC 700 CP 400 3 10 BG4481...

Page 38: ...wiring applies to applications with HV 702 and operating mode 0 Position Cable jump plug Length m Order number 7 Connection EP 422 2 QMH 4xx 0 85 mounted on EP 422 8 HV connection HV 702 QMA 4x0 HV 3...

Page 39: ...applications with HV 702 and operating mode 1 Position Cable jump plug Length m Order number 7 Connection EP 422 2 QMH 4xx 0 85 mounted on EP 422 8 HV connection HV 702 QMA 4x0 HV 3 10 BG541978 T BG54...

Page 40: ...V 702 operating modes 2 and 3 3 9 Identifying the product You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum To ensure clear identi...

Page 41: ...otections prior to each transport 4 2 Storing the product NOTICE Damage caused by improper storage Improper storage will lead to damage to the product Static charging moisture etc will lead to defects...

Page 42: ...e installation check that the connection leads are voltage free Conduct the electrical connection in accordance with locally applicable regulations Make sure that the local mains voltage and frequency...

Page 43: ...ill lead to damage to the electronics and unreliable measuring results Meet appropriate protective measures against external voltages for example better arrange ment shielding earthing etc Do not moun...

Page 44: ...ng pins in the plastic feet all the way in using a screwdriver handle part 4 Turn over the unit again 5 3 Installing or replacing plug in modules in system chassis NOTICE Damage to unit from electrost...

Page 45: ...le is not fitted Install 3 8HP dummy plates if the IO 700 module is not fitted Optionally Install an IO 720 instead of IO 700 Install a 4HP dummy plate to the right of the IS 716 module Exception No d...

Page 46: ...the red cable supplied for a direct Ethernet LAN connection Use the gray cable supplied for the connection via a switch or network 5 5 Installing electrometer pre amplifier EP 422 on analyzer Signal s...

Page 47: ...lding to the extent that there is a proper electrical connection to the chassis potential of the back panel when closing and tightening the EMC cable gland Establish the wiring directly to the spring...

Page 48: ...es complete systems optimally at the factory Therefore do not change anything without good reason Data transmission If the yellow LED of the Ethernet connection remains dark a problem has occurred dur...

Page 49: ...information on the Quadera software in the software documentation as part of the software Operating QMG 700 with Quadera software Use the Quadera software to Set unit parameters Optimize unit paramete...

Page 50: ...dera turns red Switching off system 1 Switch off the SEM and if necessary the filament 2 Terminate the connection between QMG 700 HiQuad and the PC in QUADERA 3 Click on the check mark in front of Con...

Page 51: ...the unit if fluid has entered it Instead contact Pfeiffer Vacuum Service Always disconnect the power supply before cleaning the unit WARNING Health hazards due to cleaning agent The cleaning agent be...

Page 52: ...can be seen and before the air circulation drops below the required level 2 Use a vacuum cleaner to remove the dust from the filter mat through the ventilation slots 3 Replace the filter mat in the ca...

Page 53: ...the current supply against unauthorized or unintentional reactivation Do not insert any objects into the vent openings Never open an external power supply pack Never operate an open or defective devic...

Page 54: ...ible cause Remedy The DC LED on the front panel of the unit remains dark when the mains voltage is applied and the mains switch is switched on Mains fuse defec tive Replace the mains fuse Tbl 15 Malfu...

Page 55: ...arge Pfeiffer Vacuum decontaminates products not clearly declared Free of contamination at your expense Ship product safely Do not ship microbiological explosive or radioactively contaminated products...

Page 56: ...ance with the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 12 1 General disposal information...

Page 57: ...ity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum represen...

Page 58: ...duct in suitable stable transport containers only e Maintain applicable transport conditions ERKL RUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send...

Page 59: ...Description Order number Ion sources Axial ion source with tungsten filament BN845055 T Axial ion source with iridium filament Y2O3 coated PT 160 040 T Cross beam ion source with tungsten filament BN...

Page 60: ...Order number EP 422 PT 444 570 T CP 400 PT 442 210 T QMH 400 1 1 128 u QMA 410 PT M23 067 QMH 400 5 1 300 512 u QMA 430 QMA 400 PT M23 066 QMS 700 with SC 700 and QC 700 PT M27 580 Tbl 18 System comp...

Page 61: ...ection degree IP30 Overvoltage category II Degree of pollution 2 Tbl 19 Limits of use QMS 700 15 1 1 System chassis SC 700 Parameter Value Mains voltage 100 240 V AC 50 60 Hz Power consumption 500 W M...

Page 62: ...ith FIR filter for the measured value STAIR Scan bargraph SAMPLE Single ground and MID PEAK L Peak search with level criterion PEAK F Peak search with FIR filter ADJUST C Rough search ADJUST F Fine se...

Page 63: ...1 DWELL STAIR 2 SPEED SCAN u SPEED Tbl 27 Measuring ranges and resolution QC 700 Parameter Value Filter type Low pass two stage effective for pre amplifier and external inputs Filter time constants c...

Page 64: ...ssis SC 700 Required plug in positions 1 Quantity per system max 4 Plug in position see chapter Installing or replacing plug in modules in system chas sis page 44 Weight 0 3 kg Tbl 33 Technical data H...

Page 65: ...in positions 6 Quantity per system max 3 Plug in position see chapter Installing or replacing plug in modules in system chas sis page 44 Weight 1 4 kg Tbl 37 Technical data IO 700 Parameter Value Volt...

Page 66: ...ence point The ground connections of 4 channels each are connected internally Tbl 41 Analog outputs IO 700 Parameter Value Module used WAGO 750 459 Number of channels 8 Resolution 12 bit Input resista...

Page 67: ...QMA Connection input TNC coaxial plug type Connection output D Sub 9 pin pins Input voltage 16 V 0 2 V 10 mV ripple by QMS 700 Input current 10 mA by QMS 700 Quantity per system max 2 Storage temperat...

Page 68: ...50 s 0 5 mV 10 7 A 10 8 A V 1 90 s 0 5 mV 10 9 A 10 10 A V 2 1 9 ms 2 mV 10 11 A 10 12 A V 2 2 6 ms 50 150 mV Tbl 46 Offset EP 422 15 5 Ion counter pre amplifier CP 400 You can find the technical dat...

Page 69: ...irectives Basse tension 2014 35 CE Electromagnetic compatibility 2014 30 EU Restriction of the use of certain hazardous substances 2011 65 EU Article 2 Number 4 d e and j Harmonized standards and appl...

Page 70: ...BG5400 ed B Date 2210 P N BG5400BEN...

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