Pfeiffer Vacuum HILOBE 1002 Operating Instructions Manual Download Page 67

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Summary of Contents for HILOBE 1002

Page 1: ...OPERATING INSTRUCTIONS EN Translation of the Original HILOBE 1002 1302 Roots pump ...

Page 2: ...feiffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and variants of your product Note that your product may not be equipped with all features described in this document Pfeiffer Vacuum constantly adapts its products to the latest state of the art without pri...

Page 3: ...0 3 2 Identifying the product 20 3 3 Product features 20 3 4 Scope of delivery 20 4 Transportation and Storage 21 4 1 Transporting the vacuum pump 21 4 2 Store the vacuum pump 22 5 Installation 23 5 1 Set up the vacuum pump 23 5 2 Mounting orientations 23 5 3 Filling with lubricant 24 5 4 Connecting the vacuum side 25 5 5 Connecting the fore vacuum side 26 5 6 Connect the switch box 27 5 7 Connect...

Page 4: ...ance information 45 9 2 Checklist for inspection and maintenance 45 9 3 Cleaning the air filter 47 9 4 Changing the lubricant 47 9 4 1 Drain the lubricant 48 9 4 2 Filling with lubricant 48 10 Decommissioning 50 10 1 Shutting down for longer periods 50 10 2 Recommissioning 50 11 Recycling and disposal 51 11 1 General disposal information 51 11 2 Dispose of HiLobe roots pumps 51 12 Malfunctions 52 ...

Page 5: ...figuration with parameters P 019 and P 024 41 Tbl 14 Configuration with parameters P 060 and P 061 41 Tbl 15 Meaning of the LEDs 43 Tbl 16 Maintenance intervals 46 Tbl 17 Troubleshooting 53 Tbl 18 Error messages of the electronic drive unit 54 Tbl 19 Warning messages of the electronic drive unit 54 Tbl 20 Warning and error messages when using a DCU 54 Tbl 21 HiLobe spare parts packages 57 Tbl 22 A...

Page 6: ...9 Mounting orientation Vertical direction of flow 24 Fig 10 Mounting orientation Horizontal direction of flow 24 Fig 11 Filling with lubricant 25 Fig 12 Connect the switch box 28 Fig 13 Connecting temperature sensors 29 Fig 14 Mains connection pin assignment 30 Fig 15 Pin assignment of the D Sub socket 15 pin 32 Fig 16 Cross link via connection RS 485 using connection cables and accessories 34 Fig...

Page 7: ...e 1002 HiLobe 1302 HiLobe 1002 H HiLobe 1302 H 1 2 Target group These operating instructions are aimed at all persons performing the following activities on the product Transportation Setup Installation Usage and operation Decommissioning Maintenance and cleaning Storage or disposal The work described in this document is only permitted to be performed by persons with the appropriate technical qual...

Page 8: ...ÜV Rheinland Rating plate of the electronic drive unit The rating plate is located on the switch box of the electronic drive unit Supply connection use only the original supply plug 3 PE Mains connection This sticker on the underside of control cabinet indicates that you must use the original power supply connector Operating instructions note This sticker indicates that this operating instructions...

Page 9: ...with vertical direction of flow 1 Warranty seal 4 Note Read the operating instructions 2 Rating plate of the electronic drive unit 5 Warning notice hot surface 3 Note Filling ports for lubricant 6 Rating plate of the vacuum pump About this manual 9 68 ...

Page 10: ...e unit control parameters Printed in bold as a three digit number in square brackets Frequently displayed in conjunction with a short description Example P xxx Software version PE Protective earth earthed conductor n c not connected RS 485 Standard for a physical interface for asynchronous serial data transmission Recom mended Standard remote 15 pin D Sub connecting socket on the control panel of ...

Page 11: ...operty Notes tips or examples indicate important information about the product or about this docu ment 2 2 Safety instructions All safety instructions in this document are based on the results of the risk assessment carried out in accordance with Machinery Directive 2006 42 EC Annex I and EN ISO 12100 Section 5 Where applica ble all life cycle phases of the product were taken into account Risks du...

Page 12: ...ection device mains switch Install a suitable motor protection switch WARNING Risk of fatal injury due to electric shock on account of incorrect installation The device s power supply uses life threatening voltages Unsafe or improper installation can lead to life threatening situations from electric shocks obtained from working with or on the unit Ensure safe integration into an emergency off safe...

Page 13: ...uitable touch protection in system solutions Risks during operation WARNING Danger of poisoning due to toxic process media escaping from the exhaust pipe During operation with no exhaust line the vacuum pump allows exhaust gases and vapors to escape freely into the air There is a risk of injury and fatality due to poisoning in processes with toxic process media Observe the pertinent regulations fo...

Page 14: ...on of devices or parts of them During maintenance work there is a risk to health from contact with these poisonous substances Illegal disposal of toxic sub stances causes environmental damage Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media Decontaminate affected parts before carrying out maintenance work Wear protective equipment CAUTIO...

Page 15: ...ove sea level1 Installation surface flatness horizontal max permissible angle of inclina tion 3 Ambient temperature 5 to 40 Relative humidity of air max 85 Permanent intake pressure in circulation mode 1100 hPa abs Max pressure differential in circulation mode 80 hPa Max speed in circulation mode 4200 rpm Permanent intake pressure in vacuum mode depending on max pressure differential Max gas tempe...

Page 16: ...r parameters in the electronic drive unit Using lubricants not specified by Pfeiffer Vacuum Using pipes to lift the vacuum pump Use of accessories or spare parts that are not listed in these instructions Using the vacuum pump as a climbing aid Use of mineral based lubricants such as P3 with an oxygen concentration 21 Mineral based lubricants are combustible and ignite at high temperatures and when...

Page 17: ...ds guidelines and laws referred to in this documentation The above individuals must have expressly granted operational authorization to commission program configure mark and earth devices systems and circuits in accordance with safety technology standards Trained individuals Only adequately trained individuals may carry out all works in other transport storage operation and disposal fields Such tr...

Page 18: ... A pair of gears positioned on the extended shaft ends causes the opposing synchronous running of the roots pistons Lubrication is limited to the two bearing and gear chambers which are arranged separately from the suction chambers Scan the QR code or click here and see how Pfeiffer Vacuum roots pumps work 4 8 5 6 7 1 3 2 9 10 Fig 5 Design HiLobe for vertical direction of flow 1 Vacuum flange 6 Dr...

Page 19: ...ch box 5 Fan and temperature sensor connections 2 Operator panel 6 Motor connection 3 Ventilation grille inlet 7 Mains connection 4 Underside of switch box 8 Ventilation grille outlet 3 1 1 Drive The drive of the vacuum pump is carried out coupling free in Cantilever design Due to the motor de sign the vacuum pump is compact hermetically sealed and also has a high efficiency The frequency converte...

Page 20: ... is shown on the rating plate Pump model Model number Type and quantity of the lubricant Max allowable pump rotation speed Date of manufacture Input voltage range 3 3 Product features Pump type Nominal pumping speed Inlet direction of flow HiLobe 1002 260 1050 m3 h top vertical HiLobe 1302 260 1300 m3 h top vertical HiLobe 1002 H 260 1050 m3 h lateral horizontal HiLobe 1302 H 260 1300 m3 h lateral...

Page 21: ...y remove the flange covers for the connection flange once the pipes have been mounted Fill the gear and bearing chambers with lubricant only once the final installation posi tion is reached Packing Pfeiffer Vacuum recommends storing the transport packaging General notes 1 Observe weight specified on the rating plate 2 Where possible always transport or ship the roots pump in its original packaging...

Page 22: ...p in the roots pump interior are provided with corrosion protection Storage Pfeiffer Vacuum recommends storing the products in their original transport packaging Procedure Close both connection flanges Store the roots pump only in dry dust free rooms within the specified ambient conditions In rooms with humid or aggressive atmospheres seal the roots pump airtight in a plastic bag to gether with a ...

Page 23: ...e installation location 2 Ensure the prescribed mounting orientation of the vacuum pump before the vacuum pump is filled with lubricant for the first time 3 Place the vacuum pump on a flat horizontal and fixed surface to safeguard the lubricant supply Reference surface is the vacuum flange 4 Bolt the vacuum pump to the standing surface 4 M8 making sure that no stress is applied to the vacuum pump ...

Page 24: ...ded Use approved lubricant only Use alternative application specific lubricants only following consultation with Pfeiffer Vacuum The lubricant type is specified on the rating plate Please refer to rating plate of the vacuum pump for type and quantity of intended lubricant Only the lubricant used during initial installation is permissible Contact Pfeiffer Vacuum if you want to use another type of l...

Page 25: ... collection re ceptacle for the lubricant 2 Unscrew the filler screws 3 Hold the fill level limiter with the ring spanner and unscrew the drain screw at the same time 4 Place a collection receptacle under each drain 5 Fill the lubricant on both sides up to the maximum fill level Once full lubricant overfills the fill level limiter and drips out of the drain hole 6 Screw the filler and drain screws...

Page 26: ...sk of crushing from rotating parts Fingers and hands may be caught by rotating pistons within the connection flange This results in se vere injuries Keep limbs out of the reach of the roots pump CAUTION Danger of injury from bursting as a result of high pressure in the exhaust line Faulty or inadequate exhaust pipes lead to dangerous situations e g increased exhaust pressure There is a danger of b...

Page 27: ...ge to the vacuum pump and electronic drive unit due to improper connection and disconnection of components With existing power supply connection to the switch box there is a risk of electric shock when making contact with the motor connecting plug Even after the power supply has been switched off the vac uum pump continues to deliver electrical energy during its run down period If the units are di...

Page 28: ...tand by button 5 Status LED yellow 11 Mains connection 6 Status LED red 12 Fan outlet Connect the motor connecting cable Connect the motor connecting cable to the motor 5 7 Connecting temperature sensors The roots pump has an M 6 connecting thread on each of its two oil chambers for installation of tem perature sensors for temperature monitoring Required tool Allen key WAF 8 Installation 28 68 ...

Page 29: ...bles included in the scope of delivery 3 Connect the connecting cables to the associated connections on the switch box 5 8 Implement electrical safety measures WARNING Risk of danger to life through missing mains disconnection device The vacuum pump and electronic drive unit are not equipped with a mains disconnection device mains switch Install a suitable motor protection switch Installing the ma...

Page 30: ...ergency off safety circuit Do not carry out your own conversions or modifications on the unit Electromagnetic compatibility The electronic drive unit of the vacuum pump complies with the conditions of standard IEC 61000 3 12 stipulating that the permissible short circuit capacity is observed at the supply terminal of the customer s system with the public network Do not install the vacuum pump in l...

Page 31: ...mm2 600 V flame retardant RC 5500 2 5 mm2 RC 7500 6 0 mm2 RC 15000 10 0 mm2 Tbl 5 Required properties of the power supply cable Connect to mains power supply Ensure the correct supply voltage Assemble your own power supply cable using the original power supply connector from the scope of delivery Installation 31 68 ...

Page 32: ...15 pin Pin Function Description factory setting 1 n c 2 DI access request V Control via DIs GND open Control unlocked 3 DI1 V Rotation speed setting mode GND open no rotation speed setting mode 4 n c 5 DI pumping station V Vacuum pump on GND open Vacuum pump off 6 DI stand by V Stand by GND open no stand by 7 24 V DC output V Reference voltage for all digital inputs 5 W max 8 DO1 GND Error V no er...

Page 33: ...Pfeiffer Vacuum parameter set via the RS 485 interface description relates to factory set tings DO1 Pin 8 V No errors After applying the voltage supply the digital output DO1 permanently outputs V meaning which means no error GND Error Active low signifies Error common error message DO2 Pin 9 V Vacuum pump on Active high means Vacuum pump on and rotates at set rotation speed Example use the signal...

Page 34: ...485 converter PC D Sub 1 2 3 4 Fig 16 Cross link via connection RS 485 using connection cables and accessories 1 Connection cable with RS 485 3 M12 to M12 extension cable 2 Y connector for RS 485 4 USB RS 485 converter Networking as RS 485 bus The group address of the electronic drive unit is 902 1 Install the devices according to the specification for RS 485 interfaces 2 Make sure that all device...

Page 35: ... 1 0 n2 n1 n0 0 6 N O _ D E F c2 c1 c0 cR _ R A N G E _ L O G I C NO_DEF Parameter number n2 n0 no longer exists _RANGE Data dn d0 outside the permissible range _LOGIC Logical access error 6 3 3 Telegram example 1 Data query Current rotation speed parameter P 309 device address slave 123 1 2 3 0 0 3 0 9 0 2 1 1 2 cR ASCII 49 50 51 48 48 51 48 57 48 50 61 63 49 49 50 13 Data response 633 Hz Current...

Page 36: ...2 10 2 005E8 is equivalent to 5 108 4 string Any character string with 6 charac ters ASCII codes between 32 and 127 06 TC_110 TM_700 6 boolean_new Logical value false true 01 0 is equivalent to false 1 is equivalent to true 7 u_short_int Positive whole number 03 000 to 999 10 u_expo_new Positive exponential number The last of both digits are the exponent with a deduction of 20 06 100023 is equival...

Page 37: ...tting of the parameter for the use with the Pfeiffer Vacuum protocol Access type R read Read access W write Write access Unit Physical unit of the described variable min max Permissible limit values for the entry of a value default Factory default pre setting partially pump specific The parameter can be saved persistently in the electronic drive unit Tbl 8 Explanation and meaning of the parameters...

Page 38: ...ting hours 1 R h 312 Fw version Software version interface cir cuit board 4 R 313 DrvVoltage Supply voltage Voltage in V 2 R V 315 Nominal Spd Nominal rotation speed Hz 1 R Hz 316 DrvPower Drive power Output in W 1 R W 317 MotCurrent Motor current 2 R A 324 TempPwrstg Temperature power electron ics 1 R C 342 TempOilL Current oil temperature float ing bearing side Tempera ture in C 1 R C 343 TempEx...

Page 39: ... 5 Additional parameter for the DCU Additional parameter in the control panel The basic parameter set is set in the electronic drive unit ex factory For controlling con nected external components e g vacuum measuring instruments additional parameters extended parameter set are available in the corresponding Pfeiffer Vacuum display and control panels Refer to the corresponding operating instruction...

Page 40: ...he vacuum pump from sucking in contaminants using suitable measures e g dust filter 3 Check the vacuum pump for visible damage and put the vacuum pump into operation only in a correct state 4 Make sure that the shut off units on the pressure side open before starting the pump 8 2 Switching on the vacuum pump The Pumping station parameter P 010 comprises operation of the vacuum pump with control of...

Page 41: ...ia an external control unit Operation via RS 485 and Pfeiffer Vacuum display and control unit or PC Automatic start After bypassing the contacts at pins 2 7 and 5 on the remote connecting plug or when using a connecting cable with respective bridges and applying the supply voltage the vac uum pump starts up immediately Pfeiffer Vacuum therefore recommends switching on the voltage supply immediatel...

Page 42: ...of the vacuum pump in the range of 25 to 100 of the nominal speed The factory configuration for stand by is 30 Stand by operation has priority over rotation speed setting mode Set the stand by rotation speed 1 Set the parameter P 717 to the required value in 2 Set the parameter P 002 to 1 3 Query the actual speed via parameter P 398 8 4 3 Rotation speed setting mode Permissible rotation speed rang...

Page 43: ...he level is in the area at the center of the sight glass 3 Check operating fluid fill level daily during continuous operation and every time vacuum pump is switched on 8 6 Switching off and venting WARNING Risk of crushing on rotating parts when reaching into the open flange The pistons continue to run in the vacuum after switching off the motor and can trap fingers and hands within their reach Wa...

Page 44: ...y e g the sealing gas supply Alternative Switch off via the Pfeiffer Vacuum parameter Set the parameter P 010 to the value 0 Procedure with contaminated medium 1 Close the shut off valve in the vacuum line and disconnect the vacuum pump from the process 2 At the end of the process continue to operate the vacuum pump with flushing gas supply at the vacuum flange for another approx 20 to 40 minutes ...

Page 45: ... of our service training offering When ordering spare parts specify the information on the nameplate Cleaning and maintenance work Cleaning changing the air filter Cleaning the suction chamber and roots piston Change the lubricant Any more extensive tasks are part of maintenance level 3 Maintenance instructions 1 Switch off the vacuum pump 2 Allow the vacuum pump to cool if needed 3 Vent the vacuu...

Page 46: ...d acoustic pump test Checking the lubricant level and color of the lubricant Checking the vacuum pump for leaks Checking the vacuum pump for noises quiet running Maintenance level 1 lubricant replacement Changing the lubricant Lubricant Maintenance kit 1 Replacing the air filter 2x on the electronic drive unit Maintenance level 3 revision Disassembling and cleaning the vacuum pump Replacing the se...

Page 47: ...anging the lubricant there is a health hazard due to contact with poisonous substances Illegal disposal of toxic substances causes environmental damage Wear suitable personal protective equipment when handling these media Dispose of the lubricant according to locally applicable regulations CAUTION Scalding from hot lubricant Danger of scalding when draining lubricant if it comes into contact with ...

Page 48: ...icant in addition to the drain screw also unscrew the fill level limiter on the pump bottom side 1 Make sure that there is sufficient space underneath the pump to be able to place a collection re ceptacle for the lubricant 2 Unscrew the filler screws 3 Place the collection receptacle underneath 4 Hold the fill level limiter with the ring spanner and unscrew the drain screw at the same time 5 Unscr...

Page 49: ...bricant 1 Screw the fill level limiter back in 2 Place a collection receptacle under each drain 3 Fill the lubricant on both sides up to the maximum fill level Once full lubricant overfills the fill level limiter and drips out of the drain hole 4 Screw the filler and drain screws back in Maintenance 49 68 ...

Page 50: ... recommend you carry out maintenance and a lu bricant change prior to recommissioning 10 Please note the vacuum pump may not be stored in the vicinity of machines traffic routes etc as strong vibrations may damage the bearing 10 2 Recommissioning NOTICE Damage to the roots pump due to aging of the lubricant The useful life of the lubricant is limited max 2 years Prior to recommissioning carry out ...

Page 51: ...in accordance with the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 11 1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle Dispose of our products according to the following Iron Aluminium Copper Synthetic Electronic components Oil and fat solvent f...

Page 52: ... you can find information about potential causes and how to fix them here Problem Possible causes Remedy The vacuum pump does not start up and no LED lights up on the opera tor panel of the electronic drive unit No mains voltage or operating voltage incorrect Check the mains voltage Check the mains fuse Electronic drive unit defective Contact Pfeiffer Vacuum Service Vacuum pump will not start up S...

Page 53: ...ion speed Error in the frequency converter FC Contact Pfeiffer Vacuum Service Err002 Motor excess voltage Error in the frequency converter FC Contact Pfeiffer Vacuum Service Parameter 13 was not activated during pump operation with brak ing resistance Check parameter 13 and set as appropri ate for the equipment if applicable RC 4000 deactivated RC 5500 activated RC 7500 activated RC 15000 activate...

Page 54: ...acuum pump excess temperature Insufficient cooling Improve the cooling Check the operating conditions Observe the intended use Tbl 19 Warning messages of the electronic drive unit 12 4 Warning and error messages when operating with DCU Besides the device specific warning and error messages on the electronic drive unit additional messag es are displayed with the connected display and control panel ...

Page 55: ...lity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum representa tive For fast and smooth service process handling we recommend the following 1 Download the up to date form templates Explanations of service requests Service requests Contamination declaration a ...

Page 56: ...oduct in suitable stable transport containers only e Maintain applicable transport conditions ERKLÄRUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send your product to your local Service Center 8 You will receive an acknowledgment quotation from Pfeiffer Vac uum Our sales and delivery conditions and repair and maintenance conditions for vacuum devi...

Page 57: ...re parts Spare parts packages Pump version Order number Maintenance kit 1 HiLobe 1002 HiLobe 1002 H HiLobe 1302 HiLobe 1302 H PP E47 100 T Maintenance kit 3 HiLobe 1002 HiLobe 1002 H HiLobe 1302 HiLobe 1302 H PP E42 000 T Maintenance kit for cleaning the suction chamber HiLobe 1002 HiLobe 1002 H HiLobe 1302 HiLobe 1302 H PP E48 000 T Tbl 21 HiLobe spare parts packages Spare parts 57 68 ...

Page 58: ... M Okta 800 M DN ISO K Zinc Plated Steel PP 042 661 T Claw Set for Okta 300 M Okta 500 M Okta 600 M Okta 800 M Zinc Plated Steel PP 042 662 T Screw Set for Okta 300 M Okta 500 M ATEX Okta 600 M Okta 800 M Zinc Plated Steel PP 042 663 T Blank flange set for Okta 300 M Okta 500 M Okta 600 M Okta 800 M Stainless steel PP 042 664 T Blank flange set for Okta 300 M Okta 500 M Okta 600 M Okta 800 M DN IS...

Page 59: ...aling gas kit plastic tube for HiLobe 100x 210x G 3 8 4x PP 100 091 T Spray lance G1 2 PP 042 765 U Tbl 22 Accessories Description Order number P3 mineral oil 1 l PK 001 106 T P3 mineral oil 5 l PK 001 107 T P3 mineral oil 20 l PK 001 108 T D1 synthetic diester based oil 1 l PK 005 875 T D1 synthetic diester based oil 5 l PK 005 876 T D1 synthetic diester based oil 20 l PK 005 877 T Tbl 23 Consuma...

Page 60: ... Hg 1 33 1 33 10 3 133 32 1 33 0 133 1 1 Pa 1 N m2 Tbl 24 Conversion table Pressure units mbar l s Pa m3 s sccm Torr l s atm cm3 s mbar l s 1 0 1 59 2 0 75 0 987 Pa m3 s 10 1 592 7 5 9 87 sccm 1 69 10 2 1 69 10 3 1 1 27 10 2 1 67 10 2 Torr l s 1 33 0 133 78 9 1 1 32 atm cm3 s 1 01 0 101 59 8 0 76 1 Tbl 25 Conversion table Units for gas throughput Special versions The technical data and dimensions ...

Page 61: ...ro tection 16 A 16 A Motor protection PTC PTC Operating fluid D1 D1 Operating fluid amount 0 65 l 0 65 l I O interfaces RS 485 PV can RS 485 PV can Ambient temperature 5 40 C 5 40 C Shipping and storage temperature 10 40 C 10 40 C Paint finish color RAL 7035 RAL 7035 Weight 105 kg 105 kg Tbl 27 Technical data HiLobe vertical direction of flow Type designation HiLobe 1002 H HiLobe 1302 H Part numbe...

Page 62: ...commended on site electric fuse pro tection 16 A 16 A Motor protection PTC PTC Operating fluid D1 D1 Operating fluid amount 0 65 l 0 65 l I O interfaces RS 485 PV can RS 485 PV can Ambient temperature 5 40 C 5 40 C Shipping and storage temperature 10 40 C 10 40 C Paint finish color RAL 7035 RAL 7035 Weight 105 kg 105 kg Tbl 28 Technical data HiLobe horizontal direction of flow Technical data and d...

Page 63: ...N 2 DN 1 240 146 Ø145 Ø180 Ø145 Ø180 181 246 282 198 4 198 4 247 82 678 208 4 209 4 M8 4x M16 8x M8 8x M8 8x M16 8x G 3 8 4x G 1 2 4x 2 2 5 2 2 5 Fig 20 HiLobe 1002 HiLobe 1302 DN 100 Technical data and dimensions 63 68 ...

Page 64: ...5 1 8 0 DN 100 ISO F DN 100 PN16 DN 100 ISO F DN 100 PN16 G 3 8 4x G 1 2 4x 82 282 319 3 186 4 247 209 4 208 4 401 4 677 7 188 4 90 5 90 5 M16 8x M8 8x Fig 21 HiLobe 1002 H HiLobe 1302 H DN 100 Technical data and dimensions 64 68 ...

Page 65: ...ase PE max 16 A 433 410 410 522 300 338 352 440 motor cable connection wall holder optional included in the delivery Fig 22 Electronic drive unit RC 5500 Dimensions in mm Technical data and dimensions 65 68 ...

Page 66: ...rective 2015 863 EU Harmonized standards and applied national standards and specifications DIN EN ISO 12100 2011 DIN EN 61010 1 2011 DIN EN 1012 2 2011 12 DIN EN 61000 3 11 DIN EN ISO 13857 2008 DIN EN 61000 3 12 DIN ISO 21360 1 2016 DIN EN 61000 6 2 2006 ISO 21360 2 2012 DIN EN 61000 6 4 2007 DIN EN ISO 2151 2009 DIN EN 60529 2014 DIN EN 60204 1 2014 DIN EN IEC 63000 2019 The authorized represent...

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Page 68: ... PW0322 ed E Date 2102 P N PW0322BEN ...

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Pfeiffer Vacuum HILOBE 1002, Operating Instructions Manual

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