Technical data
31
13
Technical data
13.1 General
Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps:
●
Recommendations of PNEUROP committee PN5
●
ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum-
pump performance - General description"
●
ISO 5302; 2003: "Vacuum technology - Turbomolecular pumps - Measurement of per-
formance characteristics"
●
Ultimate pressure: using a test dome and a 48 hrs. period of baking out
●
Integral leak rate: using a Helium concentration of 100 %, period 10 s
Conversion table: pressure units
Conversion table: gas throughput units
Information relating to technical data on HiCube Pro
●
Versions available for:
– Netzanschluss 230 V AC, 50/60 Hz
– Netzanschluss 110 V AC, 50/60 Hz
●
Environmental conditions
(see p. 12, chap. 4.3)
●
Weight specification including fore-vacuum valve (optional for version with rotary vane
pump)
Maximum values refer exclusively to the input as a single load.
mbar
bar
Pa
hPa
kPa
Torr
mm Hg
mbar
1
1 · 10
-3
100
1
0.1
0.75
bar
1000
1
1 · 10
5
1000
100
750
Pa
0.01
1 · 10
-5
1
0.01
1 · 10
-3
7.5 · 10
-3
hPa
1
1 · 10
-3
100
1
0.1
0.75
kPa
10
0.01
1000
10
1
7.5
Torr
mm Hg
1.33
1.33 · 10
-3
133.32
1.33
0.133
1
1 Pa = 1 N/m
2
mbar·l/s
Pa·m
3
/s
sccm
Torr·l/s
atm·cm
3
/s
mbar·l/s
1
0.1
59.2
0.75
0.987
Pa·m
3
/s
10
1
592
7.5
9.87
sccm
1.69 · 10
-2
1.69 · 10
-3
1
1.27 · 10
-2
1.67 · 10
-2
Torr·l/s
1.33
0.133
78.9
1
1.32
atm·cm
3
/s
1.01
0.101
59.8
0.76
1
