14 Technical data and dimensions
14.1 General
Basis for the technical data of Pfeiffer Vacuum rotary vane pumps:
● Specifications according to PNEUROP committee PN5
● ISO 21360-1: 2016: “Vacuum technology - Standard methods for measuring vacuum-pump per-
formance - Part 1: General description”
● Leak test to ascertain the integral leakage rate according to EN 1779: 1999 technique A1; with
20 % helium concentration, 10 s measurement duration
● Sound pressure level according to ISO 3744, class 2
mbar
bar
Pa
hPa
kPa
Torr | mm Hg
mbar
1
1 · 10
-3
100
1
0.1
0.75
bar
1000
1
1 · 10
5
1000
100
750
Pa
0.01
1 · 10
-5
1
0.01
1 · 10
-3
7.5 · 10
-3
hPa
1
1 · 10
-3
100
1
0.1
0.75
kPa
10
0.01
1000
10
1
7.5
Torr | mm Hg
1.33
1.33 · 10
-3
133.32
1.33
0.133
1
1 Pa = 1 N/m
2
Tbl. 16:
Conversion table: Pressure units
mbar l/s
Pa m
3
/s
sccm
Torr l/s
atm cm
3
/s
mbar l/s
1
0.1
59.2
0.75
0.987
Pa m
3
/s
10
1
592
7.5
9.87
sccm
1.69 · 10
-2
1.69 · 10
-3
1
1.27 · 10
-2
1.67 · 10
-2
Torr l/s
1.33
0.133
78.9
1
1.32
atm cm
3
/s
1.01
0.101
59.8
0.76
1
Tbl. 17:
Conversion table: Units for gas throughput
14.2 Technical data
Classification
Hena 201 R
Hena 301 R
Operating fluid
D1
D1
Connection: Atmospheric side
Female thread G 2" Female thread G 2"
Connection: Vacuum side
Female thread G 2" Female thread G 2"
Final pressure with gas ballast
≤ 1.5 hPa
≤ 1.5 hPa
Final pressure without gas ballast
≤ 5 · 10
-1
hPa
≤ 5 · 10
-1
hPa
Rated power 50 Hz
5.5 kW
7.5 kW
Rated power 60 Hz
6.6 kW
9.2 kW
Mains requirement: voltage (range)
±5 %
±5 %
Nominal pumping speed at 50 Hz
200 m³/h
300 m³/h
Nominal pumping speed at 60 Hz
240 m³/h
360 m³/h
Water vapor capacity 50 Hz
4000 g/h
5000 g/h
Water vapor capacity 60 Hz
4600 g/h
5800 g/h
Water vapor tolerance at 50 Hz
40 hPa
40 hPa
Water vapor tolerance at 60 Hz
40 hPa
40 hPa
Leak rate safety valve
≤ 8 · 10
-3
Pa m³/s
≤ 8 · 10
-3
Pa m³/s
Rotation speed at 50 Hz
1500 rpm
1500 rpm
Technical data and dimensions
55/62
