Plasmalab
System100
Oxford Instruments Plasma Technology
Installation Data
Installation Data (PECVD - TEOS)
Issue 10: February 11
Page 2 of 24
Printed: 10-Feb-11, 9:07
Contents
Page
1.
Introduction ............................................................................................................ 3
2.
Installation information ........................................................................................... 4
2.1
Dimensions ........................................................................................................ 4
2.2
Weights .............................................................................................................. 4
2.3
Heat load ........................................................................................................... 4
3.
Services connections ............................................................................................... 8
4.
Gas handling ........................................................................................................ 10
5.
Services ................................................................................................................ 14
5.1
Electrical Supply requirement ........................................................................... 14
5.2
Water Cooling requirement ............................................................................... 14
5.3
Top Electrode Temperature requirement .......................................................... 14
5.4
Compressed Air requirement ............................................................................ 14
5.5
Nitrogen requirement ....................................................................................... 15
5.6
Process gas requirement .................................................................................. 15
5.7
Extraction requirement ..................................................................................... 15
6.
Pump set information ........................................................................................... 16
7.
Heater/chiller information ..................................................................................... 18
8.
PLC interlock chain ............................................................................................... 20
8.1
General description .......................................................................................... 20
8.2
Gas box interlocks ........................................................................................... 22
8.2.1
Incompatible gases .................................................................................... 22
8.2.2
System Link Configuration Table ................................................................ 23
8.2.3
System LED Monitoring Table ..................................................................... 24
9.
OIPT locations worldwide ...................................................................................... 24
Fig 1: PECVD system layout (3-frame Base pressure turbo configuraton) ..................... 5
Fig 2: PECVD system layout (2-frame) ......................................................................... 6
Fig 3: PECVD Layout (2-frame cluster upgradeable) ..................................................... 7
Fig 4: PECVD services panel ......................................................................................... 8
Fig 5: Electrical connections ........................................................................................ 9
Fig 6: 4-Line gas pod ................................................................................................ 10
Fig 7: 8-Line gas pod ................................................................................................ 11
Fig 8: 12-line gas pod ............................................................................................... 12
Fig 9: TEOS pod ........................................................................................................ 13
Fig 10: TEOS oven ..................................................................................................... 13
Fig 11: Gas box interlock chain ................................................................................. 22
Table 1: RF enable interlock chain details .................................................................. 21
Table 2: Incompatible gases ...................................................................................... 22
Table 3: System link configuration............................................................................. 23
Table 4: System LED monitoring ................................................................................ 24
