Installation Data
Oxford Instruments Plasma Technology
Plasmalab
System100
Installation Data (PECVD - TEOS)
Printed: 10-Feb-11, 9:07
Page 11 of 24
Issue 10: February 11
356
426.3
496.6
566.9
637.2
707.5
777.8
848.1
918.4
988.7
41
0
650
45
SECONDARY GAS OUTLET
LINE TO SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
IS FITTED)
¼"
PRIMARY GAS
OUTLET LINE TO
SYSTEM
HEATER
CONTROLLERS
(IF FITTED)
GAS INLET LINES
(¼"STAINLESS
STEEL TUBE
FOR WELDING TO
THE CUSTOMER'S
SUPPLY)
GAS 1
GAS 2
GAS 3
GAS 4
GAS 5
GAS 6
GAS 7
GAS 8
160
GAS POD COVER
INTERLOCK MICROSWITCH
COMPRESSED
AIR IN (LEFT-HAND
CONNECTOR) & OUT
(4mm push fit)
25-WAY ‘D’ CONNECTOR
FOR PLC/PCB
CONTROL SIGNALS
EARTH
STUD
FIXING HOLE
(6.5 mm DIA.)
LOCATED 20 mm
FROM EDGES
OF BACKPLATE
(ONE AT EACH
CORNER)
220
1030
100
100 mm DIAMETER
EXTRACTION COLLAR
Fig 7: 8-Line gas pod
