9-54
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Change LOWER RINSE
3 Touch LOWER RINSE to activate (ON) or deactivate (OFF) the
bottom spray rinse. The current status displays on the right side of
the button.
The LOWER RINSE button is an ON/OFF toggle switch for the
DI water spray applied to the bottom of the wafer throughout the
spin EVENT.
Change HEAT LAMP
4 Touch HEAT LAMP to activate (ON) or deactivate (OFF) the heat
lamp. The current status displays on the right side of the button.
STANDARD
STANDARD
Summary of Contents for Synergy Integra
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