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MEMS Differential pressure Sensor

MEMS Differential pressure Sensor

User’s Manual

A288-E1-01

D6F-PH

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Summary of Contents for D6F-PH

Page 1: ...MEMS Differential pressure Sensor MEMS Differential pressure Sensor User s Manual A288 E1 01 D6F PH...

Page 2: ...egister 02h 9 7 2 3 Write Buffer Registers 03h 06h 10 7 2 4 Read Buffer Registers 07h 0Ah 10 7 2 5 Initialize 0Bh 11 7 2 6 Power Sequence Register 0Dh 11 7 2 7 Example of I2C Access Commands 12 7 3 De...

Page 3: ...t which should be referenced when using the sensor 2 Structure Fig 1 shows the internal cross section view of the MEMS differential pressure sensor D6F PH Air will flow from one inlet and out the othe...

Page 4: ...method Omron s MEMS differential pressure sensor is more sensitive compared with that of a conventional differential pressure sensor in the low pressure range Fig 4 Comparison with conventional method...

Page 5: ...it Zero point accuracy Note 0 2 0 2 Pa Span accuracy Note 3 3 R D Span shift by Temperature 0 5 0 5 R D With respect to a change of 10 degC Response Time 33 50 msec 12bit Resolution Ambient Operating...

Page 6: ...nerates a small pressure change before and after the orifice The D6F PH will be connected to the bypass flow path from the pressure port which is provided before and after the orifice Fig 5 Recommende...

Page 7: ...up to 400 kHz however if there is a likelihood of occurrence of a communications error we recommend using the SCL frequency at 100 kHz 2 Checking the wiring cable If the length of the cable used to co...

Page 8: ...4 Bit 3 Bit 2 Bit 1 Bit 0 R W Value 1 1 0 1 1 0 0 1 0 During Write Set LSB of slave address to 0 to form D8h 1101_1000b During Read Set LSB of slave address to 1 to form D9h 1101_1001b 7 2 Interface C...

Page 9: ...of first Access Address 02h Serial Control Write Read Access Control 03h Write Buffer 0 Data to be written at Address 04h Write Buffer 1 Data to be written at Address 1 05h Write Buffer 2 Data to be...

Page 10: ...ess Address MSB D7 D6 D5 D4 D3 D2 D1 LSB D0 02h D_byte_ cnt 3 D_byte_ cnt 2 D_byte_ cnt 1 D_byte_ cnt 0 Req R_WZ Acc_ctl2 1 Acc_ctl2 0 Acc_ctl2 1 0 Access Control bits 0 0 16bits address A15 A0 access...

Page 11: ...ster 02h If Req 0 02h 3 controller is finished with write 7 2 4 Read Buffer Registers 07h 0Ah There are four read data buffer registers at address 07h 0Ah To perform a read the host can either use a s...

Page 12: ...0 Pwr_seq_state5 R Indicates the state of the power sequence h0 0000b Idle h2 0010b Active h9 1001b Execute 6 4 ADC_state R State in which ADC is controlled 7 Hard_Reset R W 1 Hardware reset is perfo...

Page 13: ...STOP 18h A 06h A P START Slave Address ACK Access Address ACK S D8h 6Ch 7b 0 A 07h A Re Start Slave Address ACK Read Data H ACK Read Data L ACK STOP RS D9h 6Ch 7b 1 A xxh A xxh NA P Start address of s...

Page 14: ...one None None None None Host MCU Host MCU Host MCU Default 0 0 0 0 0 0 0 0 DV_PWR 1 0 Main Device power mode setting 0 0 Standby All blocks are powered down 1 0 MCU on Used when only MCU is required B...

Page 15: ...Flag 0 Supply voltage is within specification 1 Supply voltage is outside of specification HV1 Heater Voltage Flag 0 Heater voltage is within specification 1 Heater voltage is outside of specification...

Page 16: ...CRC check calculation enable See below for more information about the CRC 0 CRC check calculation disable 1 CRC check calculation enable Description of the CRC calculation CRC Overview The CRC is used...

Page 17: ...ed one bit to the right 4 1 3steps are repeated until the polynomial bit sequence reaches the right end of the data bit sequence The following example shows how to calculate the CRC byte based on XOR...

Page 18: ...ister Map Address Registers Name MSB D7 D6 D5 D4 D3 D2 D1 LSB D0 Description D051h COMP_DATA1_H DATA 15 8 Compensated Flow rate Register D052h COMP_DATA1_L DATA 7 0 D061h TMP_H DATA 15 8 Internal Temp...

Page 19: ...ghest address 8 2 Register content COMP_DATA1_H COMP_DATA1_L D051h D052h Compensated Data unsigned These registers contain compensated flow rate data If pressure range is 50 Pa or 500 Pa Dp Pa Pv 1024...

Page 20: ...ct to given flow and temperature The values listed in the tables are given under the hypothesis of perfect device calibration i e no offset no gain error etc Table14 Temperature Data registers content...

Page 21: ...gister D051h and D052h Enable CRC Function 1 Hardware Reset Enable When freezing occurs By calling the Initialize function of the provided sample code No 1 routine can be executed By calling the Press...

Page 22: ...ion registers Writing 06h to the Sensor Control Register D040h will execute the MCU mode outlined in Section 6 with the configured setting for the ADC Resolution and Gain Compensation Reading the Sens...

Page 23: ...t 2Ch it means 2byte read to interface configuration register address 2h START Slave Address ACK Access Address ACK Reg Address H ACK Reg Address L ACK S D8h 6Ch 7b 0 A 00h A D0h A 51h A I2C command T...

Page 24: ...ACK Reg Address H ACK Reg Address L ACK S D8h 6Ch 7b 0 A 00h A D0h A 49h A 5 Execute Hardware Reset 1 Set to 1 to bit 7 of the Power Sequence register I2C command Write 80h to the Power Sequence Regi...

Page 25: ...MODE 250 Full Range 0 250 Pa define RANGE_MODE 1000 Full Range 500 Pa for Measure Mode define P 1 Pressure mode define T 2 Temperature mode Function prototypes void Initialize void short Press_meas vo...

Page 26: ...CL_PIN GPIO_Pin_6 define I2C1_SDA_PIN GPIO_Pin_7 define I2C2_SCL_PIN GPIO_Pin_10 define I2C2_SDA_PIN GPIO_Pin_11 typedef unsigned char uint8 typedef unsigned short uint16 typedef unsigned long uint32...

Page 27: ...6 I2C_WR SA_7 send2 5 wait_time 33 33msec wait wait time depend on resolution mode adc_wait wait_time D051 D052 Read Compensated Flow value char send3 0x00 0xD0 0x51 0x2C 0x07 uRD_FIFO I2C_RD_u16 SA_7...

Page 28: ...D_FIFO I2C_RD_16 SA_7 send3 5 rd_temp RD_FIFO 10214 1000 3739 convert to degree C x10 return rd_temp Public Basic Functions I2C Write command Usage I2C1_WR Argument 7bit Slave Address char Return valu...

Page 29: ...lave Address 7bit 8bit I2C1_senddata dbuf n 1 Word Address I2C1_Start Re Start condition I2C1_MastrSel add 1 Slave 7bit 8bit for RD I2C1_AckDis ack diable for 1 byte I2C1_Stop Stop condition send RD_R...

Page 30: ...ion send rd_fifo 1 I2C1_rcvdata Read Data RD_FIFO rd_fifo 0 8 rd_fifo 1 return RD_FIFO I2C Read command Usage I2C_RD_u16 Argument char add 7bit Slave Address char dbuf Write data unsigned char n Numbe...

Page 31: ...gedAddress I2C_AcknowledgedAddress_7bit I2C1_InitStructure I2C_ClockSpeed 400000 GPIO_InitTypeDef GPIO_InitStructure make instance of InitStructure RCC_APB2PeriphClockCmd RCC_APB2Periph_GPIOB ENABLE s...

Page 32: ...it the received command while I2C_CheckEvent I2C1 I2C_EVENT_MASTER_BYTE_TRANSMITTED wait ACK uint8_t I2C1_rcvdata void while I2C_CheckEvent I2C1 I2C_EVENT_MASTER_BYTE_RECEIVED wait ACK return I2C_Rece...

Page 33: ...ents or other reasons 3 NOTE ABOUT USE Please understand followings as to your adoption and use of Omron Products 1 Please use the product in conformance to the Conditions including rating and perform...

Page 34: ...could not be foreseen by the level of science and technology at the time of shipment of the product d Cause outside Omron or Omron Products including force majeure such as disasters 5 LIMITATION ON LI...

Page 35: ......

Page 36: ...1 01 0918 0918 O Americas Europe https www components omron com http components omron eu Asia Pacific China https ecb omron com sg https www ecb omron com cn Korea Japan https www omron ecb co kr http...

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