DMTA-10004-01EN, Rev. D, November 2016
Software Options
95
7.3.2
Setting Up for Oxide Layer Measurement
You need to connect an appropriate transducer, select the corresponding default
setup, and configure the oxide and material measurement parameters.
To set up for oxide layer measurement
1.
Connect the M2017 or M2091 transducer to an LCM-74-4 cable.
2.
Connect the cable to the T/R 1 single-element transducer connector at the top of
the 38DL PLUS.
3.
Press
[ON/OFF]
to start the instrument.
4.
While in the measurement screen, press
[XDCR RECALL]
.
5.
In the
DEFAULT SINGLE ELEMENT
screen, highlight
DEF
‑
OXIDE/M2017
or
DEF
‑
OXIDE/M2091
depending on which transducer you are using.
6.
Press
[MEAS]
.
7.
Press
[SETUP MENU]
.
8.
In the menu, select
OXIDE
.
9.
In the
OXIDE
screen (see Figure 7-2 on page 95):
a)
In
OXIDE MEAS TYPE
, select the type of measurement for the oxide layer
(
THICKNESS
or
TIME OF FLIGHT
).
b)
In
MATERIAL MEAS TYPE
, select the type of measurement for the material
layer.
Figure 7
‑
2 The OXIDE screen
Summary of Contents for 38DL PLUS
Page 9: ...DMTA 10004 01EN Rev D November 2016 Table of Contents ix Index 297 ...
Page 10: ...DMTA 10004 01EN Rev D November 2016 Table of Contents x ...
Page 28: ...DMTA 10004 01EN Rev D November 2016 Important Information Please Read Before Use 16 ...
Page 30: ...DMTA 10004 01EN Rev D November 2016 Introduction 18 ...
Page 50: ...DMTA 10004 01EN Rev D November 2016 Chapter 2 38 ...
Page 60: ...DMTA 10004 01EN Rev D November 2016 Chapter 3 48 ...
Page 102: ...DMTA 10004 01EN Rev D November 2016 Chapter 6 90 ...
Page 222: ...DMTA 10004 01EN Rev D November 2016 Chapter 11 210 ...
Page 254: ...DMTA 10004 01EN Rev D November 2016 Chapter 13 242 ...
Page 274: ...DMTA 10004 01EN Rev D November 2016 Chapter 14 262 ...
Page 286: ...DMTA 10004 01EN Rev D November 2016 Chapter 15 274 ...
Page 294: ...DMTA 10004 01EN Rev D November 2016 Appendix A 282 ...
Page 300: ...DMTA 10004 01EN Rev D November 2016 Appendix C 288 ...
Page 306: ...DMTA 10004 01EN Rev D November 2016 List of Figures 294 ...