Newport FSM-300, User Manual

Page: 30 / 42

30 System Components
Pin
Controller
Pin
FSM Head
Name
Type
Controller
Description
1 6
+15VA DC power FSM positive 15V power
2 11
-15VA DC power FSM negative 15V power
3 2
B- Analog input B axis position sensor negative (±10V)
4 8
B_RTN Analog output B axis actuator drive return
5 13
B_OUT Analog output B axis actuator drive output
6 4
A- Analog input A axis position sensor negative ( ± 10V)
7 10
A_RTN Analog output A axis actuator drive return
8 15
A_OUT Analog output A axis actuator drive output
9 1
GND Analog ground FSM ground reference and power return
10 7
B+ Analog input B axis position sensor positive ( ± 10V)
11 12
B_TEMP_RTN Analog ground B axis temperature sensor return (Analog Ground)
12 3
B_TEMP Analog input B axis temperature sensor signal
13 9
A+ Analog input A axis position sensor positive ( ± 10V)
14 14
A_TEMP_RTN Analog ground A axis temperature sensor return (Analog Ground)
15 5
A_TEMP Analog input A axis temperature sensor signal
Table 1. FSM pinout descriptions of 15-pin interface cable.
Figure 13: FSM pinout diagram of 15-pin interface cable.