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Appendix A - Remote Electronic Interface
STANDARD AMAT 5000 PLATFORM INTERFACE
The Steelhead unit is designed to operate like the AMAT heat exchanger. The
interface cable should be connected to the AMAT HEAT EXCHANGER port
of the AMAT tool.
Connecting the Steelhead to the NESLAB HEAT EXCHANGER port will
damage the Steelhead controller.
Based on the specification given by Charles Pennington of Applied Materials
for out sourcing the Steelhead 1 and 0 heat exchangers, the NESLAB
controller can be upgraded to other types of serial communications by
addition of the communications board and a connector to the rear of the unit
with associated cabling.
Connector Type: Female D-Subminiature (DB 15S) Connector
AMAT Standard 5000 Platform Interface Pinout (Inputs and Outputs are to the
heat exchanger)
Pin 1
Digital Output
Thermal Fluid Flow
Pin 2
Digital Output
Thermal Fluid Level in Reservoir
Pin 3
Digital Input
Heater Control Signal
Pin 4
Digital Input
Facility Water Valve
Pin 5
Digital Input
Pump Power Control
Pin 6Analog Common
Referenced to Pin 7
Pin 7
Analog Output
Temperature Read Out
Pin 8
1
Analog Output
Resistivity Readout
Pin 9
Digital Common
24 VDC Common
Pin 10
Digital Power Supply
+24 VDC
Pin 11
Analog Common
Referenced to pin 8
Pin 12
Analog Power Supply
+15 VDC (we do not use)
Pin 13
Analog Power Supply
- 15 VDC (we do not use)
Pin 14
Analog Common
Referenced to Pin 15
Pin 15
Analog Input
Temperature Setpoint (5000 and 5200
platforms supply no signal)
1. Older versions - constant 10 volts.
Continued on next page
A-1
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