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MKS T3B Series, Supplement Manual

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MKS T3B Series Supplement Manual Download Page 5

 

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Table of Contents 

Valve Safety Information ..................................................................................................................................1

 

Symbols Used in This Instruction Manual .................................................................................................................... 1

 

Symbols Found on the Unit ........................................................................................................................................... 1

 

Safety Procedures and Precautions................................................................................................................................ 1

 

Sicherheitshinweise für das Ventil....................................................................................................................3

 

In dieser Betriebsanleitung vorkommende Symbole ..................................................................................................... 3

 

Erklärung der am Gerät angebrachten Symbole ............................................................................................................ 3

 

Sicherheitsvorschriften und Vorsichtsmaßnahmen ....................................................................................................... 3

 

Informations de sécurité relatives au manomètre...........................................................................................5

 

Symboles utilisés dans ce manuel d’utilisation ............................................................................................................. 5

 

Symboles figurant sur l’unité ........................................................................................................................................ 5

 

Mesures de sécurité et précautions ................................................................................................................................ 5

 

Medidas de seguridad del manómetro .............................................................................................................7

 

Símbolos usados en este manual de instrucciones......................................................................................................... 7

 

Símbolos hallados en la unidad ..................................................................................................................................... 7

 

Procedimientos y precauciones de seguridad ................................................................................................................ 7

 

Chapter One:  Remote RS-232 Operation .......................................................................................................9

 

RS-232 Protocol ............................................................................................................................................................ 9

 

Special Commands supported (version 01.04.00 and newer).......................................................................10

 

Setup Messages ........................................................................................................................................................... 12

 

Chamber Pump Speed ................................................................................................................................................. 24

 

Setpoint Messages ....................................................................................................................................................... 27

 

(code version 01.04.08 or newer) ................................................................................................................................ 36

 

Control Messages ........................................................................................................................................................ 37

 

Slow Pump Introduction .................................................................................................................................42

 

Slow Pump Behavior................................................................................................................................................... 43

 

Activation of Slow Pump ............................................................................................................................................ 44

 

Abortion of Slow Pump  Abortion of slow pump occurs when the slow pump enable attribute is set to zero 
(disabled). When slow pump is disabled, the controller approaches the setpoint at full speed, limited only 
by controller tuning.   Note: slow pump feature is not available in an Analog configured 
valve.Informational Messages ..................................................................................................................................... 44

 

Informational Messages............................................................................................................................................... 45

 

Chapter Two:  RS-232 Message Summary....................................................................................................49

 

 

Summary of Contents for T3B Series

Page 1: ...MKS Type T3B and T3P Valves With RS 232 Interface Supplement 2 Tech Drive Suite 201 Andover MA 01810 2449 Main 978 975 2350 134414 P1 www mksinst com RS 232 Interface Rev 00G...

Page 2: ...Sales Representative or distributor from which the equipment was purchased or in the case of a direct purchase from MKS with the MKS home office in Andover Massachusetts USA This warranty does not app...

Page 3: ...MKS Type T3B and T3P Valves With RS 232 Interface Supplement...

Page 4: ...ed or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in wr...

Page 5: ...ucciones 7 S mbolos hallados en la unidad 7 Procedimientos y precauciones de seguridad 7 Chapter One Remote RS 232 Operation 9 RS 232 Protocol 9 Special Commands supported version 01 04 00 and newer 1...

Page 6: ...Symbole 3 Tableau 3 D finition des symboles sur l unit 5 Tabla 4 Definici n de los s mbolos hallados en la unidad 7 Table 5 Message Syntax 10 Table 6 RS 232 Setup Messages 12 Table 7 Sensor Range Val...

Page 7: ...ound on the Unit On Supply IEC 417 No 5007 Off Supply IEC 417 No 5008 Earth ground IEC 417 No 5017 Protective Earth ground IEC 417 No 5019 Frame or Chassis IEC 417 No 5020 Equipotentiality IEC 417 No...

Page 8: ...to eliminate all traces of the previously used flow material USE PROPER PROCEDURES WHEN PURGING This valve must be purged under a ventilation hood and gloves must be worn for protection DO NOT OPERATE...

Page 9: ...ebenheit aufmerksam Erkl rung der am Ger t angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen die am Ger t angebracht sein k nnen Tabelle 2 Bedeutung der am Ger t...

Page 10: ...s Ventils mit Gas Nach dem Installieren oder vor dem Ausbau aus einem System mu das Ventil unter Einsatz eines reinen Trockengases vollst ndig gesp lt werden um alle R ckst nde des Vorg ngermediums zu...

Page 11: ...tuation pr sentant un int r t particulier Symboles figurant sur l unit Le tableau suivant d crit les symboles pouvant appara tre sur l unit Tableau 3 D finition des symboles sur l unit Marche sous ten...

Page 12: ...et sec afin d liminer toute trace du produit de flux utilis pr c demment UTILISATION DES PROC DURES APPROPRI ES POUR LA PURGE Cette valve doit tre purg e sous une hotte de ventilation et il faut port...

Page 13: ...4 Definici n de los s mbolos hallados en la unidad Encendido alimentaci n el ctrica IEC 417 N 5007 Apagado alimentaci n el ctrica IEC 417 N 5008 Puesta a tierra IEC 417 N 5017 Protecci n a tierra IEC...

Page 14: ...n gas limpio y seco para eliminar todo resto de la sustancia l quida empleada anteriormente USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA La v lvula debe purgarse debajo de una campana de ventil...

Page 15: ...e to the computer appears as response value where response is a label that allows you to identify the response value is the requested information Security To help ensure that certain parameters are no...

Page 16: ...e end of every response Special Commands supported Firmware version 01 04 00 and newer Typically the set type commands do not produce a serial response from the valve However a response can be request...

Page 17: ...ause is an attempt to stop a service that is already stopped or a command that is password protected 4 9 Reserved Reserved for future use Priority and Timing of Command Execution Each RS 232 command i...

Page 18: ...eal 4 20 mm Geared O ring 5 1 Direct Fcup 6 1 Direct Nonseal 7 1 Geared Fcup 8 1 Geared Nonseal 9 1 Geared O ring 10 2 Direct Fcup 11 2 Direct Nonseal 12 2 Geared Fcup 13 2 Geared Nonseal 14 2 Geared...

Page 19: ...onseal For T3P valves value 0 4 1 6 2 8 3 10 4 12 5 14 RJT JT value For T3P valves 0 1 2 3 4 5 Pressure Control Mode V value value 1 PID 0 Model Based R51 V value value 1 PID 0 Model Based Pressure Un...

Page 20: ...lect Active Channel LA Auto Dual channel LH High CH1 LL Low CH2 R7 Refer to parameter w in the Operational Status Word see Table 9 page 37 Learn the System L Learns the system pump speed None None Set...

Page 21: ...e value 0 5 VDC 1 10 VDC R24 A value value 0 5VDC 1 10VDC Sensor Range LOW EL value value 00 0 1 Torr 01 0 2 02 0 5 03 1 04 2 05 5 06 10 21 20 07 50 08 100 22 200 09 500 10 1000 11 5000 12 10000 13 1...

Page 22: ...6 19 13332 20 0 1333 23 0 001 Speedup Lowpass Filter SUE value value 1 turns on 0 turns off RUE SUE value value 1 turns on 0 turns off Speed Up Filter SUF value value time in sec 0 020 RUF SUF value S...

Page 23: ...ct Nonseal 17 60 mm Geared Fcup 18 60 mm Geared Nonseal 19 60 mm Geared O ring 20 3 Direct Nonseal 21 3 Geared Fcup 22 3 Geared Nonseal 23 4 Direct Nonseal 24 4 Geared Fcup 25 4 Geared Nonseal 26 6 Di...

Page 24: ...al 14 2 Geared O ring 15 60 mm Direct Fcup 16 60 mm Direct Nonseal 17 60 mm Geared Fcup 18 60 mm Geared Nonseal 19 60 mm Geared O ring 20 3 Direct Nonseal 21 3 Geared Fcup 22 3 Geared Nonseal 23 4 Dir...

Page 25: ...rical repairs have been made in the field This LEARN function will have already been performed when receiving a valve from the factory The Q command stops the LEARN function Note Be sure to first sele...

Page 26: ...sabled When the backfill valve control feature is disabled relay 2 is enabled These features share the same pins on the I O connector The value of the BEvalue command determines whether the backfill v...

Page 27: ...ducer To report the minimum delta pressure value enter RMD The controller responds with the message MDvalue where value is a percentage of the high range pressure transducer full scale 0 to 100 Settin...

Page 28: ...ion To change this default enter one of these commands SS0 Open valve SS1 Close valve SS2 Hold valve position SS3 Activate Safe value applicable to DeviceNet platforms only SS4 Cycle the valve factory...

Page 29: ...range to 5 Volts enter G 1 Setting the Sensor Range Note Be sure that the sensor is connected to the device before changing the sensor range The Ex value command identifies the range of the sensor in...

Page 30: ...e of the High Channel MUST be greater than the sensor range of the low channel Also you cannot successfully change the value of the high channel to a value that is greater than the current low channel...

Page 31: ...estimator will determine the volume during the system LEARN To report the estimated volume after the system LEARN use RVO Ensure the correct high channel transducer setting using EHx command to set i...

Page 32: ...by the pressure transducer It has two adjustable parameters Speedup compensation constant Speedup filter constant Both constants have units of time seconds The speedup compensation constant should be...

Page 33: ...int Messages Description Command Request Response Setpoint Control T x value x 1 Setpoint A 2 Setpoint B 3 Setpoint C 4 Setpoint D 5 Setpoint E 6 Analog Setpoint value 0 Position 1 Pressure R xx xx 25...

Page 34: ...se SP E 6 Phase SP Analog value 0 to 32767 Gain Compensation Factor GCvalue value 0 to 100 0 RGC GCvalue value 0 to 100 0 Phase Compensation Factor PCvalue value 0 to 100 0 RPC PCvalue value 0 to 100...

Page 35: ...ol 6 Analog setpoint control value 0 Position control 1 Pressure control initial To configure setpoint A for pressure control enter T 1 1 Note The RS 232 T6 value command overrides the digital logic c...

Page 36: ...ate the device at a different full scale input for example 4 5 V by recalibrating the full scale of the analog setpoint Refer to Calibrating the A D Converter page 41 for more information Setting the...

Page 37: ...0 of full scale pressure an example response is S 1 50 To report the value for the analog setpoint enter R 0 An example response is S 0 100 Note The request R 0 reports the analog setpoint value as a...

Page 38: ...the controller gives the best response to the low range setpoints When the device receives a setpoint in the range of the high sensor Channel 1 it uses the gain value entered with the Mxvalue command...

Page 39: ...point A Phase 2 Setpoint B Phase 3 Setpoint C Phase 4 Setpoint D Phase 5 Setpoint E Phase 6 Setpoint Analog Phase value 0 to 32767 If the Phase for setpoint A is set to 10 an example response is X 1 1...

Page 40: ...ve s full speed ranging from 0 1 to 100 If it is not necessary to utilize softstart control in your process leave the softstart rate at 100 of full speed The I x value command sets the softstart rate...

Page 41: ...reshold Process Limit 2 4 High threshold Process Limit 2 value Pressure limit as FS of High Sensor or Position as typical values are between 0 and 100 of the sensor range with pressure control of open...

Page 42: ...ith the message PLS1x2y where x 1 Relay A source pressure 2 Relay A source position 3 Relay A close limit switch 4 Relay A open limit switch y 1 Relay B source pressure 2 Relay B source position 3 Rel...

Page 43: ...int D 5 Setpoint E 6 Valve Open 7 Valve Closed 8 Valve Stop 9 Valve Learning y Valve Status 0 Controlling 2 Valve open 4 Valve close z Pressure 0 10 FS 1 10 FS w Active Sensor Channel Select Zero Adju...

Page 44: ...Close Backfill Relay CB RB Open Backfill Relay OB RB The RS 232 commands to open close or halt the valve override the active setpoint control of the valve Activating a Setpoint The D x command activa...

Page 45: ...lve is open and the pressure is 10 FS an example response is M 1 1 0 0 Controlling the Valve The unit can drive the throttle valve to full open or full close or to stop at its current position There a...

Page 46: ...mand zeros the base pressure in systems where the known base pressure is not at but near zero as measured by another transducer in the system There is no request associated with this function To use t...

Page 47: ...ter is calibrated at the factory You may need to recalibrate the span if the controller issues a checksum error when you power it up or if the transducer s readings are incorrect To calibrate the span...

Page 48: ...age To report the applied input voltage for the analog setpoint as a percentage of full scale send the command R 0 If the actual voltage input is 100 of the analog setpoint FS range an example respons...

Page 49: ...target setpoint will be approached at the rate defined by slow pump rate REQUEST Request Message Information Requested Response RSR Slow pump rate SR value Where value is slow pump rate Torr s RSE Slo...

Page 50: ...n zero Abortion of Slow Pump Abortion of slow pump occurs when the slow pump enable attribute is set to zero disabled When slow pump is disabled the controller approaches the setpoint at full speed li...

Page 51: ...Operation 0 Local 1 Remote y State of the LEARN Function 0 Not learning 2 Learning valve z Valve Control 0 Open 1 Close 2 Stop 3 Setpoint A 4 Setpoint B 5 Setpoint C 6 Setpoint D 7 Setpoint E 8 Analog...

Page 52: ...ure reading is 10 of the sensor s full scale Calculating the Absolute Pressure Calculate the absolute pressure using the formula ABSOLUTE PRESSURE P value 100 x FULL SCALE For example if the pressure...

Page 53: ...e response is M 1 0 3 Reporting the Firmware Version To report the version of firmware that is installed in your device issue the command R 38 The controller responds with a message such as 01 02 Repo...

Page 54: ...ror Condition If the A D calibration is OK an example response is CS 0 If the A D calibration is out of range an example response is CS 1 If the controller detects a checksum error perform a full cali...

Page 55: ...tStart Setpoint D Value I5 Set SoftStart Setpoint E Value I6 Set SoftStart Analog Setpoint Value I7 Set SoftStart Open Valve Value I8 Set Softstart Close Valve Value IE Interlock Enabled 0 or 1 IL7 Se...

Page 56: ...re R29 Get Setpoint D Position Pressure R3 Get Setpoint C Value R30 Get Setpoint E Position Pressure R31 Get Valve Position Output Range B1 10V R32 Get Valve Action N0 normal R33 Get High Sensor Range...

Page 57: ...S Get Relay A B Status RSE Get Slow Pump Enable RSN Get Serial Number of the Unit RSR Get Slow Pump Rate RSS Get Valve Safe State Open Close Hold RTC Report valve temperature in Celsius RTF Report val...

Page 58: ...ller Phase or Lead W90 Clear Battery Stats T3P only X1 Set Phase Setpoint A Value X2 Set Phase Setpoint B Value X3 Set Phase Setpoint C Value X4 Set Phase Setpoint D Value X5 Set Phase Setpoint E Valu...

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