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A1387A0-EDH0429En1010 11/21
USER's MANUAL
Preface
CONFIDENTIALITY & PROPRIETARY RIGHTS
Reservation of Title
The MKS Instruments, Inc. Programs and all materials furnished or produced in connection with them
("Related Materials") contain trade secrets of MKS and are for use only in the manner expressly
permitted. MKS claims and reserves all rights and benefits afforded under law in the Programs
provided by MKS.
MKS shall retain full ownership of Intellectual Property Rights in and to all development, process, align
or assembly technologies developed and other derivative work that may be developed by MKS.
Customer shall not challenge, or cause any third party to challenge, the rights of MKS.
Preservation of Secrecy and Confidentiality and Restrictions to Access
Customer shall protect the MKS Instruments, Inc. Programs and Related Materials as trade secrets of
MKS and shall devote its best efforts to ensure that all its personnel protect the MKS Programs as
trade secrets of MKS. Customer shall not at any time disclose MKS trade secrets to any other person,
firm, organization, or employee that does not need (consistent with Customer's right of use hereunder)
to obtain access to the MKS Programs and Related Materials. These restrictions shall not apply to
information (1) generally known to the public or obtainable from public sources; (2) readily apparent
from the keyboard operations, visual display, or output reports of the Programs; (3) previously in the
possession of Customer or subsequently developed or acquired without reliance on the MKS
Programs; or (4) approved by MKS for release without restriction.
SERVICE INFORMATION
The user should not attempt any maintenance or service of the present product and its accessories
beyond the procedures outlined in this manual. Any problem that cannot be resolved should be
referred to MKS l Newport. When calling MKS l Newport regarding a problem, please provide the Tech
Support representative with the following information:
•
Your contact information.
•
System serial number or original order number.
•
Description of problem.
•
Environment in which the system is used.
•
State of the system before the problem.
•
Frequency and repeatability of problem.
•
Can the product continue to operate with this problem?
•
Can you identify anything that may have caused the problem?
NEWPORT CORPORATION RMA PROCEDURES
Any product being returned to MKS l Newport must have been assigned an RMA number by Newport.
Assignment of the RMA requires the item serial number.
PACKAGING
Materials being returned under an RMA must be securely packaged for shipment. If possible, reuse the
original factory packaging.