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USER's MANUAL
Warranty
MKS Instruments, Inc. warrants that this product will be free from defects in material and workmanship
and will comply with MKS published specifications at the time of sale for a period of one year from date
of shipment. If found to be defective during the warranty period, the product will either be repaired or
replaced at MKS option.
To exercise this warranty, write or call your local MKS office or representative. You will be given prompt
assistance and return instructions. Send the product, freight prepaid, to the indicated service facility.
Repairs will be made, and the instrument returned freight prepaid. Repaired products are warranted for
the remainder of the original warranty period or 90 days, whichever occurs last.
Limitation of Warranty
The above warranties do not apply to products which have been repaired or modified without MKS
written approval, or products subjected to unusual physical, thermal or electrical stress, improper
installation, misuse, abuse, accident or negligence in use, storage, transportation or handling.
THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED,
INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A
PARTICULAR USE. MKS INSTRUMENTS, Inc. SHALL NOT BE LIABLE FOR ANY INDIRECT,
SPECIAL, OR CONSEQUENTIAL DAMAGES RESULTING FROM THE PURCHASE OR USE OF ITS
PRODUCTS.