General
Chapter Five: Maintenance and Troubleshooting
46
Chapter Five: Maintenance and Troubleshooting
General
In general, no maintenance is required other than proper installation and operation, and an
occasional zero adjustment. If a transducer fails to operate properly upon receipt, check for
shipping damage, and check the power/signal cable for correct continuity. Any damage should be
reported to the carrier and MKS Instruments immediately. If there is no obvious damage and the
continuity is correct, obtain an RMA (Return Material Authorization) number before returning
the unit to MKS Instruments for service.
In production operations such as semiconductor manufacturing, verify the transducer zero (and
adjust if necessary) each time the equipment is shut down for routine maintenance.
Note
The
ZERO
adjustment is the
only
adjustment that can be made in the field.
Return the transducer to MKS Instruments for other adjustments,
calibration, or servicing.
Periodically check for wear on the cables and inspect the enclosure for visible signs of damage.
Zero Adjustment
All pressure transducers require initial and periodic zero adjustments. Make these adjustments at
a pressure lower than the transducer’s minimum resolution to achieve the full dy
namic range
specified for the transducer. Refer to
Chapter Two: Installation
, page 19, for instructions on
adjusting the zero setting.
