Table of Contents
iv
Checking the Transducer Zero .......................................................................25
Coarse Zero Adjustment ................................................................................27
Dimensions....................................................................................................29
Electrical Information.................................................................................................30
Connectors.....................................................................................................31
Chapter Three: Overview .......................................................................................................33
General.......................................................................................................................33
Sensor ........................................................................................................................33
Signal Conditioner/Electronics ...................................................................................33
Differences in the Type 629 Unit................................................................................34
Chapter Four: Operation ........................................................................................................35
General.......................................................................................................................35
Lowest Suggested Pressure Available for Reading .........................................35
Lowest Suggested Pressure to Use for Control ...............................................35
How to Use the External Zero on the Type 629 Unit...................................................37
Adjusting the External Zero ...........................................................................37
Rejecting Common-Mode Voltages ...............................................................37
Chapter Five: Maintenance and Troubleshooting....................................................................39
General.......................................................................................................................39
Zero Adjustment ........................................................................................................39
Troubleshooting Chart................................................................................................40
Appendix A: Product Specifications.......................................................................................41
MKS Types 622 and 626 Units...................................................................................41
MKS Type 627 and 629 Units ....................................................................................42
MKS Type 627 and 629 50 mTorr Units ....................................................................43
MKS Type 628 Units .................................................................................................44
Appendix B: Model Code Explanation...................................................................................45
Model Code ...............................................................................................................45
Index ......................................................................................................................................47
