Appendix A: Product Specifications
MKS Types 622 and 626 Units
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Appendix A: Product Specifications
MKS Types 622 and 626 Units
Type 622 and 626 (Unheated)
Accuracy (non-linearity, hysteresis and
non-repeatability)
0.25% of Reading
Optional: 0.15%
1
Ambient operating temperature range
2
0° to 50° C (32° to 122° F)
CE Compliance
Electromagnetic Compatibility
3
EMC Directive 89/336/EEC
Connector
622
626
5-position terminal block
15-pin Type “D”
Fittings
Standard
Optional
½ inch (12.7 mm) tubulation
NW-16-KF, mini-CF, Swagelok
8-VCR, 8-VCO female
Full Scale Range (Torr)
1, 2, 10, 100, 1K
Input required
±15 VDC (±5%) @ 35 mA
Materials exposed to gases
Inconel
®
Output
0 to +10 VDC into
≥
10K ohm load
Overpressure limit without damage
45 psia (310 kPa)
Temperature coefficients
Zero
Span
0.005% F.S./°C
4
0.04% Reading/°C
Time constant
< 20 msec
Usable measurement range
1 x 10
-4
F.S.
Volume (Px side)
6.3 cc
Due to continuing research and development activities, these specifications are subject to change without notice.
1
Available only on 10, 100, and 1K Torr ranges.
2
Some specifications may vary outside this temperature range - consult factory for further information.
3
An overall metal braided shielded cable, properly grounded at both ends, is required during use.
4
For Types 622/626 2 Torr transducers, the zero temp. coef. is 0.010% F.S./°C.
For Types 622/626 1 Torr transducers, the zero temp. coef. is 0.015% F.S./°C.
