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Sicherheitshinweise für den Druckmeßwertwandler

Sicherheitsvorschriften und Vorsichtsmaßnahmen

11

Sicherheitsvorschriften und Vorsichtsmaßnahmen

Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses
Instruments zu befolgen. Eine Mißachtung der Sicherheitsvorschriften und sonstiger
Warnhinweise in dieser Betriebsanleitung verletzt die für dieses Instrument und seine
Bedienung geltenden Sicherheitsstandards, und kann die Schutzvorrichtungen an diesem
Gerät wirkungslos machen. MKS Instruments, Inc. haftet nicht für Mißachtung dieser
Sicherheitsvorschriften seitens des Kunden.

Niemals Teile austauschen oder Änderungen am Gerät vornehmen!

Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine
eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Instrument zwecks Wartung und
Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle
Schutzvorrichtungen voll funktionsfähig bleiben.

Wartung nur durch qualifizierte Fachleute!

Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur
von qualifizierten Fachleuten durchgeführt werden, niemals vom Bedienpersonal.

Vorsicht beim Arbeiten mit gefährlichen Stoffen!

Wenn gefährliche Stoffe verwendet werden, muß der Bediener die entsprechenden
Sicherheitsvorschriften genauestens einhalten, das Instrument, falls erforderlich, vollständig
ausblasen, sowie sicherstellen, daß der Gefahrstoff die am Gerät verwendeten Materialien,
insbesondere Dichtungen, nicht angreift.

Ausblasen des Instrumentes

Nach dem Installieren oder vor dem Ausbau aus einem System muß das Instrument unter Einsatz
eines reinen Trockengases vollständig ausgeblasen werden, um alle Rückstände des
Vorgängermediums zu entfernen.

Anweisungen zum Ausblasen des Instrumentes

Das Instrument darf nur unter einer Ablufthaube ausgeblasen werden. Schutzhandschuhe sind zu
tragen.

Gerät nicht zusammen mit explosiven Stoffen, Gasen oder Dämpfen benutzen!

Um der Gefahr einer Explosion vorzubeugen, darf dieses Gerät niemals zusammen mit (oder in
der Nähe von) explosiven Stoffen aller Art eingesetzt werden, sofern es nicht ausdrücklich für
diesen Zweck zugelassen ist.

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Summary of Contents for Baratron 122B

Page 1: ...l service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE INSPECTION Remotely inspect equipment before purchasing with our interactive website at www instraview com LOOKING FOR MORE INFORMATION Visit us on the web at www artisantg com for more information on ...

Page 2: ...D 8 98 Instruction Manual MKS Baratron Type 122B Absolute Pressure Transducer Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http www mksinst com ...

Page 3: ...er before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shall make specific written arrangements with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distributor from which the equipment was purchased or in the case of a direct purchase from MKS with the MKS...

Page 4: ...110899 P1 Rev D 8 98 MKS Baratron Type 122B Absolute Pressure Transducer ...

Page 5: ...ing or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Printed in the United States of America Baratron is a registered trademark of MKS Instruments Inc Andover MA Swagelok VCR and VCO are registered trademarks of Swagelok Marketing Company Solon OH Inconel is a registered trademark of Inco Alloys International Inc Huntington WV...

Page 6: ...leitung vorkommende Symbole 9 Erklärung der am Gerät angebrachten Symbole 10 Sicherheitsvorschriften und Vorsichtsmaßnahmen 11 Medidas de seguridad del transductor de presión 13 Símbolos usados en este manual de instrucciones 13 Símbolos hallados en la unidad 14 Procedimientos y precauciones de seguridad 15 Chapter One General Information 17 Introduction 17 How This Manual is Organized 18 Customer...

Page 7: ...l 32 Highest Base Pressure For Proper Zero Adjust 31 Chapter Five Maintenance 33 General Information 33 How To Clean the Unit 33 Signal Conditioner Electronics 33 Sensor 33 Appendix A Product Specifications 35 Electrical Specifications 35 Performance Specifications 35 Physical Specifications 35 Environmental Specifications 36 Appendix B Model Code Explanation 37 Model Code 37 Type Number 122BA 37 ...

Page 8: ...sducer 25 Figure 5 Electrical Connections 26 Figure 6 Type 122 Transducer 27 Figure 7 Cross Sectional View of the Type 122 Transducer 28 Figure 8 Block Diagram of the 122 Transducer 29 Figure 9 Serial Number Label 30 Tables Table 1 Definition of Symbols Found on the Unit 2 Tableau 2 Définition des symboles apparaissant sur l unité 6 Tabelle 3 Bedeutung der am Gerät angebrachten Symbole 10 Tabla 4 ...

Page 9: ...List of Figures and Tables vi ...

Page 10: ...o a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention to an operating procedure practice or the like which if not correctly performed or adhered to could result in damage to or destruction of all or part of the product Note The NOTE sign denotes import...

Page 11: ...earth ground IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 417 No 5033 a Class ll equipment IEC 417 No 5172 a Three phase alternating current IEC 617 2 No 020206 Caution refer to accompanying documents ISO 3864 No B 3 1 Caution risk of electric shock ISO 38...

Page 12: ...SE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety precautions completely purge the instrument when necessary and ensure that the material used is compatible with the materials in this product including any sealing materials PURGE THE INSTRUMENT After installing the unit or before removing it from a system ...

Page 13: ... to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use Contamination such as dust dirt lint glass chips and metal chips may permanently damage the unit or contaminate the process ALLOW PROPER WARM UP TIME FOR TEMPERATURE CONTROLLED UNITS Temperature controlled units will only meet specificatio...

Page 14: ...ondition ou toute autre situation présentant un risque d accident pour le personnel en cas d exécution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l appareil Elle attire l attention sur une procédure d exploitation une pratique ou toute autre situation présentant un risque d endommagement ou de destruction d une partie ou de la totalité de l a...

Page 15: ... masse IEC 417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialité IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu et alternatif IEC 417 No 5033 a Matériel de classe II IEC 417 No 5172 a Courant alternatif triphasé IEC 617 2 No 020206 Attention se reporter à la documentation ISO 3864 No B 3 1 Attention risque d...

Page 16: ...age doit être uniquement effectué par du personnel qualifié PRÉCAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilisés l utilisateur est responsable de la prise des mesures de précaution appropriées de la purge complète de l appareil quand cela est nécessaire et de la garantie que les produits utilisés sont compatibles avec les composants de cet appareil y ...

Page 17: ...n disque d échappement adapté dans le système à vide afin d éviter une explosion du système en cas d augmentation de la pression MAINTIEN DE L UNITÉ À L ABRI DES CONTAMINATIONS Ne pas laisser des produits contaminants pénétrer dans l unité avant ou pendant l utilisation Des produits contaminants tels que des poussières et des fragments de tissu de glace et de métal peuvent endommager l unité d une...

Page 18: ... Zustand oder eine sonstige Gegebenheit aufmerksam deren unsachgemäße Ausführung bzw ungenügende Berücksichtigung zu Verletzungen führen kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr für das Gerät hin Es macht auf einen Bedienungsablauf eine Arbeitsweise oder eine sonstige Gegebenheit aufmerksam deren unsachgemäße Ausführung bzw ungenügende Berücksichtigung zu einer Beschädigung oder Zer...

Page 19: ...7 Aus Netz IEC 417 No 5008 Erde IEC 417 No 5017 Schutzerdung IEC 417 No 5019 Rahmen Chassis IEC 417 No 5020 Aquipotential anschluß IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleichstrom und Wechselstrom IEC 417 No 5033 a Geräteklasse II IEC 417 No 5172 a Drehstrom IEC 617 2 No 020206 Vorsicht Bitte Begleitdokumente lesen ISO 3864 No B 3 1 Vorsicht Stromschlaggefahr IS...

Page 20: ... durch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgeführt werden niemals vom Bedienpersonal Vorsicht beim Arbeiten mit gefährlichen Stoffen Wenn gefährliche Stoffe verwendet werden muß der Bediener die entsprechenden Sicherheitsvorschriften genauestens einhalten das Instrument falls erforderlich v...

Page 21: ...igen Geeignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr aufgrund von steigendem Systemdruck zu vermeiden Verunreinigungen im Gerät vermeiden Stellen Sie sicher daß Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des Betriebs in das Ins...

Page 22: ...nales Pone de relieve un procedimiento práctica estado etc que en caso de no realizarse u observarse correctamente puede causar daños personales Precaución El símbolo de precaución indica la posibilidad de producir daños al equipo Pone de relieve un procedimiento operativo práctica estado etc que en caso de no realizarse u observarse correctamente puede causar daños o la destrucción total o parcia...

Page 23: ... tierra IEC 417 N 5017 Protección a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente continua y alterna IEC 417 N 5033 a Equipo de clase II IEC 417 N 5172 a Corriente alterna trifásica IEC 617 2 N 020206 Precaución Consulte los documentos adjuntos ISO 3864 N B 3 1 Precaución Riesgo de de...

Page 24: ...BEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento o reparación deben ser realizadas únicamente por personal autorizado TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS Cuando se utilicen materiales tóxicos es responsabilidad de los operarios toma...

Page 25: ... hallará la presión máxima permitida INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una cápsula de seguridad adecuada en el sistema de vacío para evitar que se produzcan explosiones cuando suba la presión del sistema MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES No permita el ingreso de contaminantes en la unidad antes o durante su us...

Page 26: ...metal diaphragm Inconel one side of which is exposed to the gas whose pressure is to be measured The other reference side of the diaphragm contains a dual electrode assembly previously found in premium transducers only sealed in a high vacuum reference cavity which is maintained by a chemical getter system The signal conditioning electronics board contains a fixed frequency oscillator balance sens...

Page 27: ...sducer Appendix A Product Specifications lists the specifications of the instrument Appendix B Model Code Explanation describes the instrument s ordering code Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers listed on the back cover In addition MKS accepts the instruments of other manufacturers for recalibration usin...

Page 28: ...ials until you have completed your inspection and are sure the unit arrived safely If you find any damage notify your carrier and MKS immediately If it is necessary to return the unit to MKS obtain an ERA Number Equipment Return Authorization Number from the MKS Service Center before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Cent...

Page 29: ...pecifications 2 To order an overall metal braided shielded cable add an S after the cable type designation For example to order a cable to connect a 122 unit to a 146 controller use part number CB259 5 XX where XX designates the cable length for a shielded cable part number CB259S 5 XX Interface Cables To Connect the 122B Unit to Use the MKS Cable Standard Shielded PDR C 1C 2C PDR 5B PDR D1 CB127 ...

Page 30: ... Controllers 152 244 250 252 260 Figure 1 Interface Cables for the Type 122 Transducer Interface Cables for Non MKS Power Supplies Readouts Shielded cable assemblies in a nominal 10 3M length with one end terminated in flying leads pigtail fashion are available at nominal cost Shielded cable assemblies are recommended especially if the transducer s environment contains high EMI RFI noise ...

Page 31: ...les with flying leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum length Refer to Figures 2 and 3 on page 23 A inch piece of 22 wire may be undesirably long since it has approximately 5 nH of inductance equivalent to 31 ohms at 1000 Mhz After picking up the braid s ground keep wires and braid flat against th...

Page 32: ...tional Plastic or Metal Cable Clamp For Physical Strain Relief Figure 2 Preferred Method to Connect an Overall Metal Braided Shielded Cable Example 2 Alternate Method to Connect Cable shown on a transducer Transducer Overall Insulation if present Braid Strands Twisted Under Washer Keep Wires Flat Against Case Optional Plastic or Metal Cable Clamp For Physical Strain Relief Screw Split Lock Washer ...

Page 33: ...Setup Mounting Although the 122 unit may be mounted in any attitude it is recommended that it be placed in a system with the PX port facing down as this allows contamination if present to fall away from the pressure sensing diaphragm Any standard vacuum fitting installed by MKS may be used Swagelok VCR Ultra Torr KF flange etc The sensor port will easily carry the weight of the transducer ...

Page 34: ...Chapter Two Installation Setup 25 Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses Figure 4 Dimensions of a 122 Transducer ...

Page 35: ...ich has input capabilities of 0 to 10 VDC and impedance greater than 10k ohms Grounding Note The ground of any external power supply and readout should be the same as the sensor ground chassis ground to minimize any possible ground loops which can affect the performance and stability of the system 15 VDC 7 15 VDC 6 15 V Rtn 5 Press Out 2 Out Rtn 12 Chassis 15 15 V 15 V Common O O O O Power Supply ...

Page 36: ... of the diaphragm faces a rigidly mounted ceramic disc containing two electrodes in a volume which is permanently evacuated and sealed When pressure is applied to the diaphragm its deflection produces a change in distance between the electrodes and diaphragm which produces corresponding changes in capacitances The change in capacitance of the electrode near the center of the diaphragm is always mo...

Page 37: ...Sensor Chapter Three Overview 28 Figure 7 Cross Sectional View of the Type 122 Transducer ...

Page 38: ...hrough the bridge and to the following buffer amplifier The output from the buffer amplifier is fed to the output amplifier whose gain is set by the SPAN control potentiometer This pot is normally set at the time of calibration its access hole through the transducer cover is plugged to prevent inadvertent decalibration The ZERO potentiometer adds in a small amount of correction voltage which is de...

Page 39: ...Label The serial number label lists the serial number and the model number of the unit The CE symbol designates compliance with the European CE directive 122BA00010AB Serial Model 0123456789 MKS Instruments Inc Made in the USA Figure 9 Serial Number Label ...

Page 40: ... recommended pressure values Suggested Pressure For Zero Adjustment Full Scale Range Torr Highest Base Pressure for Proper Zero Adjust Torr 10 1 0 x 10 3 100 1 0 x 10 2 1000 1 0 x 10 1 5000 5 0 x 10 1 10000 1 0 x 100 15000 1 5 x 100 20000 2 0 x 100 25000 2 5 x 100 Table 6 Suggested Pressure For Zero Adjustment Note The gauge should be in place and allowed to warm up for at least 30 minutes before ...

Page 41: ... Optimum repeatability of low pressure 100 milliTorr measurement is achieved with temperature controlled transducers Lowest Suggested Pressure Control The pressures noted in this column are for reference and represent the pressure reading of the transducer at 50 millivolts signal output A 50 millivolt DC signal is usually the preferred minimum signal level when integrating any electronic component...

Page 42: ...r MKS recommends that you do not attempt to clean the sensor except in the case of water soluble deposited material such as ammonium chloride from the exhaust line of a low pressure CVD Nitride reactor In this case the following procedure may be used 1 Remove the cover from the 122 transducer 2 Unscrew the metal standoffs which hold the lower PC board 3 Remove the two boards being careful not to c...

Page 43: ...Sensor Chapter Five Maintenance 34 This page intentionally left blank ...

Page 44: ...r 1 2 10 100 1000 5000 10000 15000 20000 25000 Materials Exposed to Gases Inconel and stainless steel Overpressure Limit 120 of FS or 35 psia 240 kPa whichever is greater Resolution 0 01 FS Temperature Coefficients Zero Span 0 008 of FS C 0 04 of Reading C Volume Px side 1 2 10 100 1000 Torr 5k 10k 15k 20k 25k Torr 7 00 cc 8 5 cc Physical Specifications Fittings Standard Optional 12 7 mm tubulatio...

Page 45: ...ix A Product Specifications 36 Environmental Specifications Ambient Operating Temperature Range 0 to 50 C 32 to 122 F Due to continuing research and development activities these product specifications are subject to change without notice ...

Page 46: ... The options of your unit are identified in the model code The model code is identified as follows 122BA XXXXXYZ where Type Number Full Scale Range Fittings Type 122BA XXXXX Y Z Accuracy Type Number 122BA This designates the model number of the instrument as a 122B absolute pressure transducer ...

Page 47: ...le B NW 16 KF D Swagelok 8 VCO Female E Accuracy Z Three specifications for accuracy are available designated by a single letter code Power Ordering Code Standard 0 5 of Reading B Optional 0 3 of Reading C 0 15 of Reading D How To Order a Type 122 Unit To order the Type 122 absolute pressure transducer with a 10 Torr full scale range diameter tubulation fittings and standard accuracy of 0 5 of Rea...

Page 48: ...ession 5 Input power 35 Installation checklist 19 Interface cables 20 M Maintenance 33 Manual organization 18 Medidas de seguridad del transductor de presión 13 O Operation zero adjust 31 P Pressure for control 32 Pressure for reading 32 R Returning the product 18 19 S Safety procedures and precautions 1 Serial number label 30 Setup cables 20 electrical installation 26 fittings 24 mounting instruc...

Page 49: ...Index 40 Z Zero 31 Zero base pressure 32 ...

Page 50: ...l service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE INSPECTION Remotely inspect equipment before purchasing with our interactive website at www instraview com LOOKING FOR MORE INFORMATION Visit us on the web at www artisantg com for more information on ...

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