MKS 937B Series, Operation And Maintenance Manual, Page: 14 / 106

937B Controller Instruction Manual pg. 14
2.3.2 Display Resolutions
Resolution of the pressure values displayed on a 937B Vacuum System Controller front panel varies with
the type of sensor connected, and range of measurement. In addition, three display formats are available:
Default, HighR
9
(high resolution), and PatchZ (patch zero) and can be selected based on preference.
PatchZ Default/HighR
Percentage of Full-Scale Displayed Resolution Displayed Resolution
>110% FS >(110%*FS value) >(110%*FS value)
110% to 10% X.XXXE+X X.XXXE+X
10% to 1% X.XX0E+X X.XXE+X
1% to 0.1% X.X00E+X X.XE+X
<0.1% X.000E+X XE+X
Table 2-1 Capacitance Manometer with Exponential Display Format
Table 2-1 shows the exponential display format for Capacitance Manometer. If a Capacitance Manometer
measurement range is between 10
4
and 10 (regardless of pressure unit), it is possible to toggle between
the decimal and exponential formats. To do this, select the desired CM channel with the up down keys
until the LED indicator on the front panel is opposite the channel and press the
Degas ON/OFF button.
Pressure
Range Convection Pirani Pirani Hot Cathode Cold Cathode
Torr PatchZ
Default
HighR PatchZ
Default
HighR PatchZ Default HighR PatchZ Default HighR
10
3
X.X0E+03 X.XE+03 ATM ATM
10
2
X.X0E+02 X.XE+02
X.00E+02
(X=1,2,3,4) X.XE+02
10 X.X0E+01 X.XE+01 X.X0E+01 X.XE+01
1 X.X0E+00 X.XE+00 X.X0E+00 X.XE+00
10 -1 X.X0E-01 X.XE-01 X.X0E-01 X.XE-01
10
-2
X.X0E-02 X.XE-02 X.X0E-02 X.XE-02 X.X0E-02 XE-02 X.XE-02 X.X0E-02 XE-02 X.XE-02
10 -3 X.X0E-03 X.XE-03 X.X0E-03 X.XE-03 X.X0E-03 X.XE-03 X.XXE-03 X.X0E-03 X.XE-03 X.XXE-03
10 -4 LO<E-03 LO<E-03
X.X0E-04
(X.X down
to 1.3)
X.XE-04
(>5.0E-
04) X.X0E-04 X.XE-04 X.XXE-04 X.X0E-04 X.XE-04 X.XXE-04
10 -5 LO<E-04 LO<E-04 X.X0E-05 X.XE-05 X.XXE-05 X.X0E-05 X.XE-05 X.XXE-05
10
-6
X.X0E-06 X.XE-06 X.XXE-06 X.X0E-06 X.XE-06 X.XXE-06
10
-7
X.X0E-07 X.XE-07 X.XXE-07 X.X0E-07 X.XE-07 X.XXE-07
10 -8 X.X0E-08 X.XE-08 X.XXE-08 X.X0E-08 X.XE-08 X.XXE-08
10 -9 X.X0E-09 X.XE-09 X.XE-09 X.X0E-09 X.XE-09 X.XXE-09
10
-10
X.00E-10 XE-10 XE-10 X.X0E-10 X.XE-10 X.XE-10
10 -11 X.00E-11 XE-11 XE-11
Table 2-2 937B Pressure Display Format for Indirect Gauges including CP, PR, CC and HC
9 When HighR mode is selected, the controller displays extra digit for ion gauge pressure to assist the
monitoring of pressure changes.