937B Controller Instruction Manual
pg. 10
HC
<50 msec
Pirani, CP
<80 msec
CM
<80 msec
Resolution
7
CC
2 significant digits between 10
-10
and 10
-2
Torr, 1 significant digit
in 10
-11
Torr decade
HC
2 significant digits between 10
-9
and 10
-2
Torr; 1 significant digit
in 10
-10
Torr decade
Pirani
1 significant digit from 450 to 100 Torr; 2 significant digits
between 10
-4
and 100 Torr
CP, Convectron
2 significant digits over the entire range.
CM
4 significant digits from 10 to 100% FS, 3 significant digits from 1
to 10% FS, 2 significant digits from 0.1 to 1% FS, 1 significant
digit from 0.01 to 0.1% FS.
Repeatability
CC, HC, Pirani, CP
5% of indicated pressure at constant temperature
CM
0.25% of indicated pressure at constant temperature
Calibration gas
CC, HC
Nitrogen, Argon
Pirani, CP
Air/nitrogen, Argon, Helium
CM
Any (gas independent)
Installation orientation
CC, HC, CM, Pirani,
Any (port down suggested)
CP
Body horizontal only
Materials exposed to vacuum may include
CC
Series 431 and 422
– SS 304, Al 6061, silver-copper brazing
alloy, alumina ceramic, Elgiloy
®
, OFHC
®
copper
Series 423
– SS 302, SS 304, glass, Al, Inconel X-750, alumina
ceramic
HC
304 SS, Inconel
®
X750
®
, glass, tungsten, platinum clad
molybdenum, tantalum, nickel, braze alloy, either yttria coated
iridium or tungsten filament
Pirani
300 series stainless, platinum, glass, alumina ceramic, silver
brazing alloy, nickel 200
CP
300 series stainless, nickel, glass, platinum
7
Trailing zeros displayed on LCD screen do not reflect the resolution of the pressure reading.