MKS 647C, Instruction Manual, Page: 53 / 57

647C 7. Gas Correction Table
49
GAS SYMBOL SPECIFIC HEAT, Cp
cal/goC
DENSITY
g/l @ 0oC
CONVERSION
FACTOR
Hydrogen Chloride
Hydrogen Fluoride
Isobutylene
Krypton
Methane
HCl
HF
C
4
H
8
Kr
CH
4
0.1912
0.3479
0.3701
0.0593
0.5328
1.627
0.893
2.503
3.739
0.715
1.00
1.00
0.29
1.54
0.72
Methyl Fluoride
Molybdenum Hexafluoride
Neon
Nitric Oxide
Nitrogen
CH
3
F
MoF
6
Ne
NO
N
2
0.3221
0.1373
0.246
0.2328
0.2485
1.518
9.366
0.900
1.339
1.250
0.56
0.21
1.46
0.99
1.00
Nitrogen Dioxide
Nitrogen Trifluoride
Nitrous Oxide
Octafluorocyclobutane
(Freon - C318)
Oxygen
NO
2
NF
3
N
2
O
C
4
F
8
O
2
0.1933
0.1797
0.2088
0.1866
0.2193
2.052
3.168
1.964
8.93
1.427
.- - -2
0.48
0.71
0.164
1.00
Pentane
Perfluoropropane
Phosgene
Phosphine
Propane
C
5
H
12
C
3
F
8
COCl
2
PH
3
C
3
H
8
0.398
0.194
0.1394
0.2374
0.3885
3.219
8.388
4.418
1.517
1.967
0.21
0.17
0.44
0.76
0.36
Propylene
Silane
Silicon Tetrachloride
Silicon Tetrafluoride
Sulfur Dioxide
C
3
H
6
SiH
4
SiCl
4
SiF
4
SO
2
0.3541
0.3189
0.1270
0.1691
0.1488
1.877
1.433
7.580
4.643
2.858
0.41
0.60
0.28
0.35
0.69
(Table continued on next page)