3. Functionality
647C
22
3.7.1 Range Selection
MGC 647C V3.0
CH1 CH2 CH3 CH4
ACT.FLOW 0.000 1.750 1.400 0.000
UNIT SCCM SCCM SLM SLM
RANGE FS. 5.000 5.000 2.000 1.000
STATUS OFF ON ON ON
00 ERRORS FLOW ON INPUT DIRECT
Figure 14
The following ranges are available:
1 sccm,
10 sccm,
100 sccm,
1 slm,
10 slm,
100 slm,
1 scmm,
1 scfh,
10 scfh,
100 scfh,
1 scfm,
10 scfm,
100 scfm,
2 sccm,
20 sccm,
200 sccm,
2 slm,
20 slm,
200 slm,
2 scfh,
20 scfh,
200 scfh,
2 scfm,
20 scfm,
200 scfm,
5 sccm,
50 sccm,
500 sccm,
5 slm,
30 slm,
300 slm,
5 scfh,
50 scfh,
500 scfh,
5 scfm,
50 scfm,
500 scfm,
50 slm,
400 slm,
500slm,
sccm
=
standard cubic centimeter per minute
slm
=
standard cubic liter per minute
scmm
=
standard cubic meter per minute
scfh
=
standard cubic feet per hour
scfm
=
standard cubic feet per minute