Multi Channel
Flow Ratio/Pressure Controller
Type 647C
Instruction Manual
MKS Instruments Deutschland GmbH
Rev. 2009-07
Page 1: ...Multi Channel Flow Ratio Pressure Controller Type 647C Instruction Manual MKS Instruments Deutschland GmbH Rev 2009 07...
Page 2: ...mation storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Cajon and VCR are registered trademarks of Cajon Company Macedonia Ohio Kalrez and Viton are regis...
Page 3: ...8 Installation 7 Powering On 7 Powering Off 7 1 9 Symbols at the case 8 1 10 Accessories 8 1 11 Cables 9 1 12 Service 9 2 Operating Instructions 11 2 1 The User Interface 11 2 2 The Menu Tree 13 2 3 R...
Page 4: ...3 3 10 Information about the System 34 4 Remote Control 35 4 1 Compatibility 35 4 2 Command Syntax 35 4 3 Table of Commands 36 4 4 Response Syntax 39 5 Application of the 647C 41 5 1 Mass Flow Control...
Page 5: ...this document must be followed Please take also a special note of all highlighted text in this document 1 2 CE conformity The unit complies with the European standards and thus it is labelled with the...
Page 6: ...ptions are identified in the model code 647C X Y C R where Options Designation Channels X Four 4 Eight 8 Interface Y RS 232 R Control Option C None 0 PID 1 Relay Option R None N Relays T 1 4 Software...
Page 7: ...frequency consumed power power supply for sensors voltages max current per sensor max total current 100 240 V T2 A 250 V slow blow 50 60 Hz 200 W 15 V 5 500 mA 1 3 3 A 2 Housing Rack depth without co...
Page 8: ...al 647C 1 6 Drawings 1 6 1 Front Panel OFF 0 ALL ON ENTER ESC CLEAR 1 2 3 4 5 6 7 8 9 M ULTI GAS CONTROLLER 647C A B mks Tec hnology for Produc tiv ity A Monitor LCD Display B Keyboard Figure 2 Front...
Page 9: ...Channel 1 to 4 01 Power Supply Connector 02 Power Switch 1 5 Channel 1 or 5 for MFC 2 6 Channel 2 or 6 for MFC 3 7 Channel 3 or 7 for MFC 4 8 Channel 4 or 8 for MFC 9 Connector ACCESS 10 Connector RE...
Page 10: ...hich is essential to highlight 1 7 2 Safety Instructions This device is state of the art and save But danger may appear by the device if not used according to the instructions or the professional know...
Page 11: ...nd perform the setup in the menues INSTRUMENT SETUP and SYSTEM SETUP If the digital interface is used RS232 the setup in the SYSTEM SETUP menu is of special importance Powering On Switch on the unit w...
Page 12: ...ears on the screen If you do so all settings are completely reset You would have to configure the unit again completely Note The display is switched off automatically after the time out period as set...
Page 13: ...type 647A and 647B are the same as for the type 647C 1 12 Service In case of problems or failure of the device please contact your local MKS representative The last page of this manual contains a lis...
Page 14: ...1 General 647C 10 This page left blank...
Page 15: ...itle displays the device type MGC Multi Gas Controller and software version The status line on the bottom of the screen displays the number of errors the status of the main valve and the input status...
Page 16: ...nabled ON last input was ON OFF last input was OFF LOCKED The keyboard is locked through RS232 MEMORY A stored gas menu is active IDLE No commands will be accepted In the 8 channel version it is not p...
Page 17: ...2 EXTENDED DISPLAY 3 PRESSURE CONTROL 4 DIAGNOSTICS 4 1 ERROR LISTING 5 INSTRUMENT SETUP 4 2 SIGNALS 5 1 RANGE SELECTION 5 2 GAS SELECTION 5 3 MODE SELECTION 5 4 ZERO ADJUST 5 5 TRIP LIMITS 5 6 GAS CO...
Page 18: ...e than once contact your local MKS service center Power Up Reset is performed everytime the system is switched on It resets all data which are needed for system administration Data of process paramete...
Page 19: ...low is shown below The sum of all gas flow values TOTAL FLOW is displayed additionally The unit of the total flow can be selected through the keyboard The user can select one out of five predefined co...
Page 20: ...nnot be changed Due to instabilities at the lower end of MFC range the lowest setpoint is limited to 1 Setpoints less than that are displayed as zero and an output value of 0 5 V is transferred to the...
Page 21: ...NPUT DIRECT Figure 8 The PRESSURE CONTROL menu displays the actual flows and the actual pressure with its unit During an application with an external pressure controller the corrective action is also...
Page 22: ...disturbance response gain 0 95 K integral action 2 4 Ts lead 0 42 Tt K is the relation of actual pressure to actual total flow both are to be taken as percent of full scale To improve the speed of yo...
Page 23: ...n 647C Baratron process pump Figure 10 Configuration of a typical system with three flowcontrollers MFC plus pressure control with a Baratron capacitance manometer No extra pressure control unit is r...
Page 24: ...is lower than the low limit see also TRIP LIMITS menu page 22 TRIP HIGH LIMIT The actual flow is higher than the high limit see also TRIP LIMITS menu page 22 INPUT OVERFLOW INPUT UNDERFLOW The input...
Page 25: ...pped This menu is designed for test and maintenance purposes only It displays all signals of the interface to the process The display unit is mV It is possible to enter setpoints in mV directly if the...
Page 26: ...00 sccm 1 slm 10 slm 100 slm 1 scmm 1 scfh 10 scfh 100 scfh 1 scfm 10 scfm 100 scfm 2 sccm 20 sccm 200 sccm 2 slm 20 slm 200 slm 2 scfh 20 scfh 200 scfh 2 scfm 20 scfm 200 scfm 5 sccm 50 sccm 500 sccm...
Page 27: ...e used to scroll through the table entries of each channel For gases which are not included in the table there is the position USER which allows a direct numerical input of the GCF of any gas For a de...
Page 28: ...er Slave configuration the ratio between the setpoints of the slaves and the setpoint of d the the master is kept at the selected ratio of gas composition If the setpoint of the master is changed the...
Page 29: ...This declaration technique applicated to channel 2 as master has the advantage that this channel may be declared as slave while being a master Channel 4 is independent Example 2 menu extract CH1 CH2 C...
Page 30: ...the Auto Zero function the status needs to be changed from EXEC executable to ACT active through the cursor keys The status DONE or FAIL displays the completition of the function The status FAIL indi...
Page 31: ...be generated The limits are considered as absolute values The BAND mode is similar to LIMIT mode but the limits are considered as deviation to the setpoint The low limit represents negative deviation...
Page 32: ...tive inactive inactive active inactive active active inactive active inactive active X any condition Figure 19 3 7 6 Gas Composition MGC 647C V3 0 CH1 CH2 CH3 CH4 SET 1 1 000 1 700 0 000 0 000 SET 2 1...
Page 33: ...the line The transfer rate of commands and data is determined by this baudrate and by the processing speed of 647C The first 30 commands will be directed to a buffer at maximum speed while the transfe...
Page 34: ...transfer There are three kinds of handshake modes for the communication with the host computer no handshake software handshake XON XOFF hardware handshake RTS CTS The usage of one of the above modes d...
Page 35: ...xD RTS DSR DTR groun sub d 9 3 8 2 7 6 4 5 647 TxD CTS RxD RTS DSR DTR groun sub d 9 3 8 2 7 6 4 5 647 hardware handshake software handshake no handshake Figure 22 A typical error in handling the RS23...
Page 36: ...round line FE framing error recognition of stopbit failed Synchronization of bytes did not work i e stop bit was not present This is typical for noise on the line Check the ground line two dashes no e...
Page 37: ...mTorr 10 000 Torr 10 000 kTorr 10 000 Bar 10 000 mBar 10 000 Bar 10 000 Pa 10 000 kPa 100 00 mTorr 100 00 Torr 100 00 kTorr 100 00 Bar 100 00 mBar 100 00 Bar 100 00 Pa 100 00 kPa 1000 0 mTorr 1000 0...
Page 38: ...0 MKS Instruments Aug 23 2001 TC 00 ERRORS FLOW ON INPUT DIRECT Figure 24 This menu gives information about the device such as company software release code internal code If you call MKS for support i...
Page 39: ...nitialized and the device will act like an actual 647C If a 147B command is used the 647C will switch to B MODE e g MO c 1 PL 1 3 It is also possible to switch to B MODE through menu SYSTEM SETUP and...
Page 40: ...xxx actual pressure in 0 1 percent of full scale check for PCS result xxxxx actual PCS signal in 0 1 percent of full scale enter pressure mode mode off mode auto check for pressure mode reult m enter...
Page 41: ...o adjust MFC result xxxxx channel offset value in mV error occured enter high limit channel high limit in 0 1 percent of full scale check for high limit result xxxxx enter low limit channel low limit...
Page 42: ...lve main valve corresponds to OFF ALL channel valve check for status of a channel result xxxxx incompatible channel status value bit 0 0 1 channel off on bit 4 trip limit low bit 5 trip limit high bit...
Page 43: ...d nl and new line If no result value is available also an empty response cr nl is possible If an error has been detected in the command string an error message is sent before the acknowledge signal In...
Page 44: ...nl 5 Autozero error There was a trial to set the zero offset of an active channel Before setting the zero offset either the channel OF or the gas OF 0 has to be switched off carriage return 0D hex for...
Page 45: ...t 0 V Other possible symptoms are undesired oscillations when the setpoint is varied or disturbances of the regulation loop To operate mass flow controllers it is important that the allowed maximum of...
Page 46: ...arming up Set point is not being transmitted Valve in the supply line is closed Defect in the pipe line system Supply line valve is closed Pressure is down check gas supply No differential pressure e...
Page 47: ...rear connectors 43 6 Pin Assignment of rear connectors 6 1 RS232 connector Sub D male 9 pol 1 6 RxD 2 7 RTS TxD 3 8 CTS 4 9 GND 5 Figure 25 6 2 Service connector Sub D male 9 pol This connector is for...
Page 48: ...e 25 pol relay 11 nc 1 14 relay 11 cmn relay 11 no 2 15 relay 12 nc relay 12 cmn 3 16 relay 12 no relay 21 nc 4 17 relay 21 cmn relay 21 no 5 18 relay 22 nc relay 22 cmn 6 19 relay 22 no relay 31 nc 7...
Page 49: ...10 flow feedback valve close 3 11 signal GND valve open 4 12 signal GND PGND 5 13 15V 6 14 15V 7 15 chassis setpoint output 8 for use with cable type CB147 1 Figure 27 6 5 PRESSURE connector Sub D fem...
Page 50: ...ve open 1 2 15 external setpoint 2 valve close 1 3 16 external setpoint 3 flow signal 1 4 17 external setpoint 4 valve open 2 5 18 15V valve close 2 6 19 15V flow signal 2 7 20 PGND valve open 3 8 21...
Page 51: ...Carbon Tetraflouride Freon 14 Chlorine CO2 CO CCl4 CF4 Cl2 0 2016 0 2488 0 1655 0 1654 0 1144 1 964 1 250 6 86 3 926 3 163 0 701 1 00 0 31 0 42 0 86 Chlorodifluoromethane Freon 22 Chloropentafluoroeth...
Page 52: ...0 176 0 1357 0 1432 0 153 1 695 3 127 6 129 5 395 4 660 0 98 0 50 0 33 0 35 0 38 Freon 13 B1 Freon 14 Freon 21 Freon 22 Freon 23 CBrF3 CF4 CHCl2 F CHClF2 CHF3 0 1113 0 1654 0 140 0 1544 0 176 6 644 3...
Page 53: ...250 0 56 0 21 1 46 0 99 1 00 Nitrogen Dioxide Nitrogen Trifluoride Nitrous Oxide Octafluorocyclobutane Freon C318 Oxygen NO2 NF3 N2 O C4 F8 O2 0 1933 0 1797 0 2088 0 1866 0 2193 2 052 3 168 1 964 8 9...
Page 54: ...en Hexafluoride Xenon SF6 CCl3 F SiHCl3 CCl2 FCClF2 or C2 Cl3 F3 WF6 Xe 0 1592 0 1357 0 1380 0 161 0 0810 0 0378 6 516 6 129 6 043 8 360 13 28 5 858 0 26 0 33 0 33 0 20 0 25 1 32 1 Empirically defined...
Page 55: ...24 H handshake 30 hardware handshake 31 Hardware Reset 14 helium 24 HISTORY mode 20 HOST MODE 33 hydrogen 24 I independent mode 25 INPUT OVERFLOW 20 INPUT UNDERFLOW 20 integral 18 Interface Connection...
Page 56: ...ke 31 software release 35 step response 18 stop bits 30 T TEST 25 test signal 27 TOTAL FLOW 15 TRIP HIGH LIMIT 20 Trip Limit 28 TRIP LOW LIMIT 20 Trouble Shooting 44 Truth Table 29 U USER 24 USER DISP...
Page 57: ...x 33 1 48 35 32 52 TAIWAN MKS Instruments Taiwan 10F No 93 Shoei Yuan Street Hsinchu City 300 Taiwan R O C 886 3 575 3040 Fax 886 3 575 3048 GERMANY BENELUX MKS Instruments Deutschland GmbH Schatzboge...
