Document #107-00092-001
30
Open Left Inner
Door Control
Failed
The door was not open successfully in the
allotted time. Check for a physical obstruction
preventing door to open. Check for insufficient
pressure or no pressure into gas supply for
doors.
inner door solenoids,
galil controller output or
input card, galil
controller, or door
sensors.
Left Chamber
Purge Failed
The door open pressure was not reached in
the allotted time. Check for insufficient
pressure or no pressure into environmental
gas supply. Decrease the door open pressure.
vacuum sensor, backfill
solenoid, galil controller,
galil output card or
analog card.
Left Chamber
Backfill Failed
The door open pressure was not reached in
the allotted time. Check for insufficient
pressure or no pressure into environmental
gas supply. Decrease the door open pressure.
vacuum sensor, backfill
solenoid, galil controller,
galil output card or
analog card.
Close Right Inner
Door Control
Failed
The door was not closed successfully in the
allotted time. Check for a physical obstruction
preventing door to close. Check for insufficient
pressure or no pressure into gas supply for
doors.
inner door solenoids,
galil output or input card,
galil controller, or door
sensors.
Open Right Inner
Door Control
Failed
The door was not open successfully in the
allotted time. Check for a physical obstruction
preventing door to open. Check for insufficient
pressure or no pressure into gas supply for
doors.
inner door solenoids,
galil controller output or
input card, galil
controller, or door
sensors.
Right Chamber
Purge Failed
The door open pressure was not reached in
the allotted time. Check for insufficient
pressure or no pressure into environmental
gas supply. Decrease the door open pressure.
vacuum sensor, backfill
solenoid, galil controller,
galil output card or
analog card.
Right Chamber
Backfill Failed
The door open pressure was not reached in
the allotted time. Check for insufficient
pressure or no pressure into environmental
gas supply. Decrease the door open
pressure
.
vacuum sensor, backfill
solenoid, galil controller,
galil output card or
analog card.
Close Left Inner
Door Sequence
Failed
Check the inner doors for any mechanical
obstructions. Check the compressed air
supply for the doors.
inner door solenoids,
galil controller output or
input card, galil
controller, or door
sensors.
Open Left Inner
Door Sequence
Failed
Check the inner doors for any mechanical
obstructions. Check the compressed air
supply for the doors.
inner door solenoids,
galil controller output or
input card, galil
controller, or door
sensors.
Close Right Inner
Door Sequence
Failed
Check the inner doors for any mechanical
obstructions. Check the compressed air
supply for the doors.
inner door solenoids,
galil controller output or
input card, galil
controller, or door
sensors.
Open Right Inner
Door Sequence
Failed
Check the inner doors for any mechanical
obstructions. Check the compressed air
supply for the doors.
inner door solenoids,
galil controller output or
input card, galil
controller, or door
sensors.
Left Chamber
Backfill Sequence
Timeout
The door open pressure was not reached in
the allotted time. Check for insufficient
pressure or no pressure into environmental
gas supply. Decrease the door open pressure.
vacuum sensor, backfill
solenoid, galil controller,
galil output card or
analog card.
Right Chamber
Backfill Sequence
Timeout
The door open pressure was not reached in
the allotted time. Check for insufficient
pressure or no pressure into environmental
gas supply. Decrease the door open pressure.
vacuum sensor, backfill
solenoid, galil controller,
galil output card or
analog card.
