2.4.3 Adjusting the reticle
㩷
(1) Adjusting the reticle with the XY stage moving direction
㩷
㩷
Angle dial cover
㩷 㩷 㩷 㩷 㩷
㩷
Screws (4 pcs.)
Eyepiece mount
Angle dial
Fixing screws (4 pcs.)
Adjustment screws (4 pcs.)
Angle dial clamp
knob
Vernier scale
Vernier scale
clamp knob
㩷
㪈䋮
Remove the clamp knobs from the angle dial and vernier scale.
㩷
㪉䋮
Remove the four screws from the angle dial cover and remove the cover.
㩷
3
㧚
Screw-in the clamp knobs on the angle dial and vernier scale.
4
㧚
Approximately center the vernier scale in the adjustable range. Then secure it with the clamp
knob.
5
㧚
Align the “0” graduation of the angle dial with that on the vernier scale. Then, secure the angle
dial with the clamp knob.
6
㧚
Loosen the adjustment screws and fixing screws (4 pcs. each) so that the eyepiece mount can be
moved manually.
㪎䋮
While looking into the eyepiece, adjust the position of the eyepiece mount so that the horizontal
cross-hair is oriented to coincide with the direction of the stage movement.
㩷
8
㧚
Temporarily secure the eyepiece mount by lightly tightening the fixing screws.
㪐䋮
Centering the reticle as described in
"(2) Centering the reticl
e" below. Firmly secure the
eyepiece mount by fully tightening the fixing screws.
㩷
㪈㪇䋮
Remove the clamp knobs from the angle dial and vernier scale.
㩷
㪈㪈䋮
Replace the angle dial cover and secure it to the optical tube with the four screws.
㩷
㪈㪉䋮
Screw-in the clamp knobs on the angle dial and vernier scale.
㩷
2. Installation and setup
14
Summary of Contents for TM-500 Series
Page 2: ......
Page 8: ...CONTENTS vi ...
Page 18: ...2 Installation and setup 16 ...
Page 32: ...4 Maintenance 30 ...
Page 36: ...5 Troubleshooting 34 ...
Page 42: ...8 Reference Diagrams 40 TM 510 510R Detail drawing of T groove ...