Matheson 819 Series, Operating Manual

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42
67mm
50in
26.67mm
1.050in
[8.53mm]
.336in
98.98mm
3.897in
[8.53mm]
.336in
[13.34mm]
.525in
M5X0.8 (10-32 UNF)
Both Sides
2.375in
56.52mm
2.225in
3.81mm
.150in
3.175mm
.125in
23.495mm
.925in
.525in
819-Series:
0
– 0.5 sccm
0 – 1 sccm
0 – 2 sccm
0 – 5 sccm
2X 8-32 UNC .175in[4.45mm]
0.5 sccm to 50 sccm approximate shipping weight: 0.8 lb
0 – 10 sccm
0 – 20 sccm
0 – 50 sccm
DATE
1/4/2016
M-0.5SCCM-D-MSPEC
REV.
1
26.
1.0
103.30mm
4.067in
8.89mm
.350in
8.89mm
.350in
13.34mm
.525in
1/8 NPT
Both Sides
2X 8-32 UNC .350in 8.89mm
60.33mm
2.375in
56.52mm
2.225in
3.81mm
.150in
3.18mm
.125in
23.50mm
.925in
13.34mm
.525in
819-Series:
0
– 100 sccm
0 – 200 sccm
0 – 500 sccm
0 – 1 slpm
0 – 2 slpm
0 – 5 slpm
0 – 10 slpm
M-20SLPM-D-MSPEC
0 – 20 slpm
DATE
1/4/2016
REV.
1
100 sccm to 20 slpm approximate shipping weight: 1.0 lb