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NOTE
•
To perform the concentration displayed gas reading setting, see the "Gas list" in the following page.
Gas list for fumigation gases
Gas name
(standard name)
Display
Scale 1
Scale 2
Scale 3
Remarks
Phosphine
PH3
0.1
2.0
4.5
Methyl bromide
CH3Br
1
20
100
Carbon dioxide
CS2
0.1
-
-
Sulfur compound.
See the below NOTE.
Methyl iodide
CH3I
1
10
30
Hydrogen cyanide
HCN
1
-
-
Sulfuryl fluoride
SO2F2
-
-
800
Ethylene bromide
C2H4Br2
1
10
30
* - (bar display) has no scale.
NOTE
•
High-concentration or continuous contact with a chloride or sulfur compound will shorten the sensor
life or cause larger errors.
•
If a Si compound is detected, the sensitivity will decrease, shortening the sensor life.
•
Even for a gas shown only with the bar meter display but no scales, the meter reads Scale 2 or 3.
Use it as an indication of concentration increase.
•
If a high-concentration solvent gas is drawn, the rubber seal or other part used in the detector will
deteriorate.
Gas list for semiconductor material gases
Gas name
(standard name)
Display
Scale 1
Scale 2
Remarks
Phosphine
PH3
0.1
2.0
Acetone
C3H6O
1
10
Arsine
AsH3
0.2
-
.
Ammonia
NH3
10
-
Isobutane
i-C4H10
1
10
Isopropyl alcohol
IPA
1
10
Carbon monoxide
CO
10
30
Ethyl alcohol
C2H5OH
1
10
Ethylene
C2H4
1
10