LN0364E2109D0
Mass Flow Controller for Device
Net™
Instruction Manual
MC-5000L Series
Safety Precautions
Incorrect handling may cause death or injury
(1) Before connecting the fittings, check that no damage or defects are found on the fittings.
Make connections properly and make sure that a leak test is conducted before actual
operation to prevent fluid from leaking into the atmosphere (
Hereinafter, the fluid used
is referred as
“gas” or “fluid”).
(2)
DO NOT
apply any corrosive fluid to materials exposed to gas. Corrosion may cause gas
to leak into the atmosphere.
(3) This device is not designed as an explosion proof structure.
DO NOT
use this device in a
place where explosion-proof structures are required. Doing so may cause fire or explosion.
Incorrect handling may lead to medium or slight injury or may
cause damage to, or loss of, facilities or equipment
(1) Observe the precautions listed in the WARNING (above).
(2) Strictly observe the electrical specifications. Not doing so may cause fire, damage to
sensors or malfunction.
(3) This device is not designed to be waterproof.
DO NOT
locate this device outdoors or in a
place where it may be splashed with water. Doing so may cause fire, trouble, or
malfunction of the device.
(4)
DO NOT
modify this device. It may cause fire or other problems.
(5) This device is not designed to handle hot swap. Please avoid attaching and removing the
power supply connector and interface connector with the power switched on. Attachment
and/or removal with the power on may result in failure of the device.
(6) This device is a precious device, please handle it carefully. Dropping down or handling it
carelessly will cause damage. Please use assist instrument while moving or setting the
device.
(7) Regular maintenance is recommended for steady use of this device (Recommended
proofreading frequency is once a year).
1. Introduction
This manual explains basic operation of the MC-5000L series (Hereinafter referred
as "MFC"). MFC is equipped with a network interface, and can be operated by
connecting to a network environment of Device
Net ™.
Since MFC is a slave device, please prepare a master device of Device
Net ™
network interface.
The device profile follows the MFC profile in ODVA specification.
Please go through the ODVA specification and device profile manual of MC-5000L
for proper use.
2. Summary
The MFC is high performance mass flow controller for gas using thermal flow
sensor and high response piezoelectric valve. In the MFC model, MO type and
MC type are available depending on the kind of valve operation mode.
Also,
MFC interface employs Device Net™ network, so MFC is compatible with other
makers.
3. Features
The MFC is the following features.
(1)
LINTEC’s proprietary ambient temperature compensation type flow sensor is carried.
·
Low sensor temperature, long-time steady monitor, and few problems such
as degradation of gas to be monitored.
·
The effect of ambient temperature is less because the sensor temperature is
kept at the ambient temperature.
·
Steady temperature distribution of sensor and high-speed response.
(2)
Digital computing system with microprocessor and high-resolution A/D, D/A
converter is carried.
· High functionality.
·
By setting of device number (address), multiple devices can be controlled
through a single interface.
· Many additional are provided as standard, e.g., totalizer function, zero adjust,
ramping function.
(3) MFC employs Device
Net™ network protocol.
(4)
Small dead space structure using a diaphragm valve.
(5)
Single power supply 11 to 25VDC.
(6)
Superior corrosion resistant sealing materials make maintenance easy. Metal
seals (Au).
(7)
Particle-free structure.
(8)
By using a metal case and various types of filters, steady operation can achieve
even in an environment of high-frequency noise and stationary magnetic field.
(9)
Based on RoHS.
4. Structure
The MFC consists of sensors, bypass, valves, and a microcomputer for signal
processing. A digital PID feedback control system controls the valve action so that
flow rate output from the sensor agrees with flow rate setting value.
5. Specification / Dimensions
(1) Specification
Name
Mass Flow Controller
Model
MC-5100L
MC-5200L
MC-5250L
Flow rate range
(N2 conversion)
10SCCM to 5 SLM
~20SLM
~50SLM
Valve operation mode
Normally open / Normally closed
Surface treatment
Precision polishing
Minimum controllable flow rate
2%F.S.
Accuracy
100%F.S. to 10%F.S.
±1.0%S.P.
10%F.S. to 2%F.S.
±0.1%F.S.
Repeatability
±0.2%F.S.
Response time
1 second (Typical)
Operating differential
pressure
50 to 300kPa
Normally open
50 to 300kPa (~10SLM)
100 to 300kPa (10 to 20SLM)
Normally closed
100 to 300kPa (~10SLM)
200 to 300kPa (10 to 20SLM)
100 to 300kPa
(~30SLM)
150 to 300kPa
(~50SLM)
Maximum operating
pressure (Note1)
300kPa(G)
Withstanding pressure
1MPa(G)
Operating temperature &
Humidity
5 to 50 ºC·0 to 80%RH (Condensation should be avoided)
Storage temperature &
Humidity
0 to 60 ºC·0 to 80%RH (Condensation should be avoided)
Leak integrity
Less than 1×10
-11
Pa · m
3
/sec (He)
Mounting direction
Free
Wetted materials
Stainless steel 316L, PCTFE, PTFE, Au
Seal Materials
Au
Actuator
Piezoelectric actuator
Fittings
6.35VCR (106mm, 124mm)
1.125 W-Seal 79.8mm, 1.125 W-Seal 92mm
Power supply
11 to 25VDC (5VA max.)
Digital interface
Device
Net™
Optional
B: Liquefied gas, G: Minimum control flow rate 0.5%F.S.
E: Small Range Control 1 to 10SCCM in nitrogen
J: Valve is closed at below 2% setting, M: Applied to ClF3
Weight
Approx. 1kg
Name
Mass Flow Controller
Model
MC-5460L
MC-5470L
Flow rate range
(N2 conversion)
~150 SLM
~200SLM
Valve operation mode
Normally closed
Surface treatment
Precision polishing
Minimum controllable flow rate
2%F.S.
Accuracy
100%F.S. to 35%F.S.
±1.0%S.P.
35%F.S. to 2%F.S.
±0.35%F.S.
1.0%F.S.
Repeatability
±0.5%F.S.
Response time
1 second (Typical)
Operating differential
pressure
250 to 500kPa
350 to 500kPa
Maximum operating
pressure (Note1)
500kPa(G)
Withstanding pressure
1MPa(G)
Operating temperature &
Humidity
5 to 50 ºC·0 to 80%RH (Condensation should be avoided)
Storage temperature &
Humidity
0 to 60 ºC·0 to 80%RH (Condensation should be avoided)
Leak integrity
Less than 1×10
-11
Pa · m
3
/sec (He)
Mounting direction
Free
Wetted materials
Stainless steel 304, Stainless steel 316L, Teflon, Viton, Au
Seal Materials
Au
Actuator
Piezoelectric actuator
Fittings
6.35UJR156mm, 9.52UJR163.4mm
Power supply
11 to 25VDC (5VA max.)
Digital interface
Device
Net™
Optional
J: Valve is closed at below 2% setting
Weight
Approx. 1.4kg
Note1)There is a possibility that the gas does not flow in case of the gas pressure of more than
490kPa was used on the MC-5250L- MO /NO.
·
Connect the MFC to the frame ground.
