LN0371E2109C0
Liquid Mass Flow Controller
Instruction Manual
LC-3000L Series
Safety precautions
Incorrect handling may cause death or injury.
(1) Before connecting the fittings, check that no damage or defects are found on
the fittings. Make connect properly and make sure that leak test is conducted
before actual operation to prevent fluid from leaking into the atmosphere
(Hereafter, the measured fluid is called “liquid” or “fluid”).
(2)
DO NOT
apply any fluids corrosive to the wetted materials. Corrosion may cause
fluid to leak into the atmosphere. Check the liquid type to be used in advance.
(3) The device is not designed as an explosion-proof structure.
DO NOT
use device in a
where explosion-proof structures are required. Doing so may cause fire or explosion.
Incorrect handling may lead to medium or slight injury or may
cause damage to, or loss of, facilities or equipment.
(1) Observe the precautions listed in the WARNING (above)
(2) Strictly observe the electrical specifications. Not doing so cause fire, damage to
sensors or malfunction.
(3) This device is not designed to be waterproof.
DO NOT
locate this device outdoors or
in a place where it may be splashed with water. Doing so may cause fire, trouble or
malfunction of this device.
(4)
DO NOT
modify this device. It may cause fire or other problems.
(5) While a power supply is applied to the device, +15VDC and -15VDC must be
applied simultaneously. If only +15VDC or -15VDC is applied, electronic
circuits will become unstable and it may cause a malfunction.
(6) This device is not designed to handle hot swap. Please avoid attaching and
removing the power supply connector and interface connector with the power
switched on. Attachment and/or removal with the power on may result in
failure of the device.
(7) This device is a precious device, please handle it carefully. Dropping down or
handling it carelessly will cause damage. Please use assist instrument while moving
or setting the device.
(8) Regular maintenance is recommended for continuous use of this device
(Recommended frequency is once a year).
1. Introduction
This manual explains basic operation of the Liquid Mass Flow Controller LC-3000L
Series (Hereafter, it is called "LC").
Please read through this manual and the separate volume “The Digital Interface Manual”
carefully to become familiar with the features of this device.
2. Summary
The LC
is high performance mass flow controller for gas using thermal
flow sensor and high response piezoelectric valve.
3. Features
The LM has the following features.
(1) LINTEC’s original ambient temperature compensation mass flow sensor is
incorporated for measuring flow rates.
·
Low sensor temperature, long-time steady monitor, and few problems such as
degradation of gas to be monitored.
·
The effect of ambient temperature is less because the sensor temperature is kept at
the ambient temperature.
·
Steady temperature distribution of sensor and high-speed response.
(2) Digital control by microprocessor and high-resolution A/D, D/A converter;
·
High functionality
·
By setting of device number (address), multiple devices can be controlled through
a single interface
·
Many added functions such as flow totalizer, auto-zero , and ramping function etc.
(3) Universal digital interface
(4) Superior corrosion resistant sealing materials make maintenance easy.
Metal seals (Stainless Steel 316L) are used
(5) Particle free structure
(6) By using a metal case and various types of filters, steady operation can be achieved
even in an environment of high-frequency noise and stationary magnetic field
(7) RoHS compliant
(8) Bypass-less construction (Easy liquid feed and internal purging. mounting
direction: free)
4. Specification/ Dimensions
(1) Specification
Product name
Liquid Mass Flow Controller
Model
LC-3102L
LC-3202L
Precursor type and Fluid & flow
rate (except HCl, HF and other
liquids which corrode stainless steel)
C2H5OH
0.1 to 1.0g/min F.S.
H2O 0.1 to 0.2
g/min F.S.
C2H5OH
1.0 to 2.0g/min F.S.
H2O 0.2 to 0.4
g/min F.S.
Operation of external valve
Piezo actuator / Normally Open
Surface treatment
NO: No treatment (no surface treatment)
MO: Precision polishing
Minimum control flow rate
5% F.S.
Analog flow rate setting signal
0 to 5VDC (Proportional to flow rate)
Analog flow rate output signal
0 to 5VDC (Proportional to flow rate)
Accuracy (Note1)
±1.0 %F.S.
Repeatability (Note1)
±0.5 %F.S.
Operating differential pressure
(Note1)
50 to 300 kPa(D)
Maximum operating pressure
(Note1)
300 kPa(G)
Pressure Limit
1MPa(G)
Operating temperature & Humidity
(Note2)
15 to 35°C· 0 to 80%RH
(Dewing should be avoided)
20 to 30°C· 0 to 80%RH
(Dewing should be avoided)
Temp. coefficient
(Note2)
(Reference Temp.25)
Zero
±
0.1 %F.S./
℃
Span
Leak integrity
Less than 1×10
-11
Pa
·
m
3
/sec (He)
Recommended gas for pushing
the liquid (Note3)
He
Storage temperature& Humidity
0 to 60 °C
·
0 to 80 %RH (Condensation should be avoided)
Mounting direction
Free
Wetted materials
Stainless Steel 316L,
PCTFE
Stainless Steel 316L,
PFA, Ni-Co
Seal materials
Au
Fittings
3.2mmVCR(male), 6.35mmVCR(male), 3.2mmSWL
Digital interface connector
RS-485 (RJ45 modular jack)
2-wire system
Power supply
+15VDC±3% 100mA, -15VDC±3% 50mA
Inrush current
(Actual measurement value)
+15V: 11A 130 µs -15V: 9A 110 µs
Analog interface connector
D-sub connector (Fixed size of screw M3)
Weights
Approx.1kg
Note
1) When using as a liquid controller for vaporization system, please refer to the specification
sheet of vaporization system.
Note
2) The flow rate will be not accurate if the liquid temperature is different from surrounding
temperature when measuring or controlling, please set the same temperature for liquid and the
device.
Note
3) There is the possibility of failure about measuring and controlling. To reduce the gas solubility of
the liquid, Helium
(He) is recommended to be the pressurized gas.
·
Connect the LC to the frame ground.
·
Flow rate calibration is done by C2H5OH or H2O.
·
Liquid with solid materials can’t be controlled.
·
If the mixture ratio of mixture liquid is changed, please consult us in advance.
·
If there are particles in the target liquid, install a filter to remove particles more than 0.2μm on the
primary side (the inlet side).
·
The viscosity of liquid controlled by the LC should be less than 0.1Pa·s (100cp). Please consult us if
the viscosity of liquid is high.
·
Please feed in the liquid after completely purging (Recommended).
(2) Dimensions
3.2mm VCR (male) 112mm specification
