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Description
Contents
Page
EC Conformance Declaration . . . . . . . . . . . . . 15
1
Description . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.1
Design and Function . . . . . . . . . . . . . . . . . . . . 16
1.2
Standard Specifications . . . . . . . . . . . . . . . . . 18
1.3
Technical Data. . . . . . . . . . . . . . . . . . . . . . . . . 18
1.4
Ordering Data . . . . . . . . . . . . . . . . . . . . . . . . . 19
2
Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.1
Setting the Mains Voltage (optional) . . . . . . . . 20
2.2
Connecting the TURBOVAC . . . . . . . . . . . . . . 20
2.3
Connecting the Forevacuum Pump . . . . . . . . 20
2.4
Connecting the Cooling. . . . . . . . . . . . . . . . . . 20
2.5
Connecting the Venting Valve . . . . . . . . . . . . . 21
2.6
Connecting the Flange Heater . . . . . . . . . . . . 21
2.7
Connecting the Remote Control Unit . . . . . . . 23
2.8
Installing the TURBOTRONIK. . . . . . . . . . . . . 24
3
Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.1
Start-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.2
Start-up of the TURBOVAC . . . . . . . . . . . . . . 25
3.3
Bake-out of the TURBOVAC . . . . . . . . . . . . . 26
3.4
Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
3.5
Shut-down of the TURBOVAC . . . . . . . . . . . . 26
3.6
Venting of the TURBOVAC . . . . . . . . . . . . . . 26
3.7
Shutdown of the TURBOTRONIK. . . . . . . . . . 26
3.8
Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . 26
4
Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . 27
Die deutsche Gebrauchsanleitung
beginnt auf Seite
2
The TURBOTRONIK NT 20 has been manufactured to
the engineering standards and approved safety regula-
tions. Even so when not properly installed or when not
used and operated as intended the frequency converter
may be a source of danger and can cause damage.
Warning
Indicates procedures that must be strictly observed to prevent
hazards to persons.
Caution
Indicates procedures that must be strictly observed to prevent dama-
ge to, or destruction of the appliance.
Figures
The references to diagrams, e. g. (2/10), consist of the Fig. No. and
the Item No. in that order.
We reserve the right to alter the design or any data given in these Ope-
rating Instructions. The illustrations are not binding.
1
Description
1.1 Design and Function
The electronic frequency converter TURBOTRONIK NT
20 is used to drive the following turbo molecular pumps:
TURBOVAC 150, 360,
TURBOVAC 150 CSV, 360 CSV,
TURBOVAC 150 V, 360 V,
TURBOVAC 151, 151 C, 361, 361 C,
TURBOVAC 600, 600 C,
TURBOVAC 1000, 1000 C, 1100 C.
These pumps each comprise a three-phase asynchro-
nous motor with the appropriate rating to drive the rotor.
The TURBOTRONIK NT 20 converts the single-phase
mains voltage into a three-phase AC voltage with regu-
lated frequency and amplitude.
Each installed TURBOVAC has been individually coded.
The respective pump code must be entered using the
DIP switches provided. For safety reasons, the TURBO-
VAC will not start up unless the two codes match.
The acceleration sequence, the regulation during opera-
tion, and the output speed will vary depending on the
installed pump model.
The TURBOTRONIK NT 20 does not support the pump
models TURBOVAC 150 H and TURBOVAC 360 H.
LEYBOLD customer service can adjust the speed of
each TURBOVAC to ± 5%, if required.
External control and monitoring equipment, e.g. the
LEYBOTRONIK I can be connected via floating terminal
strip located at the rear of the TURBOTRONIK. Both the
remote control unit and the lines for the pump system’s
status signals are connected here. These terminals also
provide connections for controlling the forepump, the
heater or valves.
An RS-232 interface provides further monitoring options.
All the main internal parameters are output cyclically
every 8 seconds. More details on request.
The front panel of the TURBOTRONIK NT 20 features
the following three control keys:
HEATING, START and STOP.
Essential operating conditions such as speed, load or
failure are indicated via LEDs.
16
GA 05.208/12 - 05/2003