Contents
Page
1
Description . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1
System overview . . . . . . . . . . . . . . . . . . . . . . 3
1.2
Compatibility with pumped media . . . . . . . . . . 3
1.3
Design of the MAG . . . . . . . . . . . . . . . . . . . . 3
1.4
Function and design of the MAG.DRIVE . . . . 4
1.5
Standard specification . . . . . . . . . . . . . . . . . . 6
1.6
Technical data . . . . . . . . . . . . . . . . . . . . . . . . 6
1.7
Ordering information . . . . . . . . . . . . . . . . . . . 7
2
Installation . . . . . . . . . . . . . . . . . . . . . . . . 11
2.1
General safety information . . . . . . . . . . . . . . 11
2.2
Unpacking - storing - transportation . . . . . . . 11
2.3
Operating environment . . . . . . . . . . . . . . . . 12
2.4
Connecting the MAG
to the vacuum chamber . . . . . . . . . . . . . . . . 12
2.5
Connecting the backing pump . . . . . . . . . . . 16
2.6
Connecting the cooling water . . . . . . . . . . . . 18
2.7
Connecting the purge gas . . . . . . . . . . . . . . 19
2.8
Installing the MAG.DRIVE . . . . . . . . . . . . . . 20
2.8.1
Power supply connection X10 . . . . . . . . . . . 20
2.8.2
Pump connection . . . . . . . . . . . . . . . . . . . . . 21
2.8.3
Control plug X14 . . . . . . . . . . . . . . . . . . . . . 21
2.8.4
Interface connector . . . . . . . . . . . . . . . . . . . 24
3
Operation . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.1
General operation rules . . . . . . . . . . . . . . . . 25
3.2
Operation with the START and STOP keys . . 26
3.3
Remote control . . . . . . . . . . . . . . . . . . . . . . 27
4
Plug-in Control . . . . . . . . . . . . . . . . . . . . . 28
4.1
Operation with plug-in control . . . . . . . . . . . 28
4.2
Operating statuses . . . . . . . . . . . . . . . . . . . 30
4.3
Operating menu . . . . . . . . . . . . . . . . . . . . . . 32
4.3.1
Basic menu . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.3.2
Settings converter . . . . . . . . . . . . . . . . . . . . 33
4.3.3
Settings pump . . . . . . . . . . . . . . . . . . . . . . . 34
4.3.6
Total view of the menu . . . . . . . . . . . . . . . . . 35
5
Maintenance . . . . . . . . . . . . . . . . . . . . . . . 36
5.1
Removing the pump from the system . . . . . . 36
5.2
Service at Leybold’s . . . . . . . . . . . . . . . . . . 37
6
Troubleshooting . . . . . . . . . . . . . . . . . . . . . 38
6.1
Warning messages . . . . . . . . . . . . . . . . . . . 39
6.2
Failure messages . . . . . . . . . . . . . . . . . . . . 40
6.3
Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . 43
Certifications . . . . . . . . . . . . . . . . . . . . . . . . 44
Forms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Figures
The references to diagrams, e. g. (1/2) consist of the Fig.
No. and the Item No. in that order.
We reserve the right to alter the design or any data given
in these Operating Instructions. The illustrations are not
binding.
The Operating Instructions are included with the pump
and the converter. If they have different editions, the
version delivered with the pump describes the pump
correctly and the version delivered with the converter
describes the converter correctly. The version number
is the digit behind the „/“ in the GA No.. Example: GA
05.136/1.02 is the first edition.
Differences between the versions:
/1
→
/2
•
We corrected the dimensional drawings and the dra-
wings for the purge gas connector.
•
We changed some ordering data.
•
We added information for fastening the vacuum
chamber.
•
We added certifications concerning EC directives.
•
We corrected some minor mistakes.
Thus, you may use version /2 instead of version /1.
See also the last page.
2
GA 05.136/2.02 - 10/98
