Troubleshooting
46
300324726_002_C0 - 10/2016 - © Leybold
Malfunction
Possible cause
Corrective action
Responsible
Turbomolecular pump
does not start, ERROR
LED does not light.
CONTROL connector connected
wrongly.
CONTROL and SERVICE connec-
tors mixed up.
Connect as shown in Fig. 3.13.
Connect correctly.
Operator/
Maintenance staff
Maintenance staff
Turbomolecular pump
produces loud running
noises and vibrations.
Rotor out of balance.
Bearing defective.
Exciting of vibrations by the process
Balance the rotor.
Replace the bearing.
Modify the system.
Leybold service
Leybold service
Maintenance staff
Turbomolecular pump
does not reach ultimate
pressure.
Measurement instrument defective.
Measurement sensors soiled.
Leaks at the equipment, lines or the
pump.
Pump soiled.
Backing pump provides insufficient
pumping speed or ultimate pressure
which is too high.
Frequency parameters programmed
wrongly.
Inspect the measurement sensor.
Clean or replace the sensors.
Check for leaks.
Clean the pump.
Check the ultimate pressure of the back-
ing pump and install a higher capacity
vacuum pump if necessary.
Check parameters.
Operator/
Maintenance staff
Maintenance staff
Maintenance staff
Leybold service
Operator/
maintenance staff
Leybold service
7
Waste Disposal
The equipment may have been contaminated by the process or by environ-
mental influences. In this case the equipment must be decontaminated in
accordance with the relevant regulations. We offer this service at fixed prices.
Further details are available on request.
Contaminated parts can be detrimental to health and environment.
Before beginning with any work , first find out whether any parts are con-
taminated. Adhere to the relevant regulations and take the necessary pre-
cautions when handling contaminated parts.
Separate clean components according to their materials, and dispose of
these accordingly. We offer this service. Further details are available on
request.
When sending us any equipment, observe the regulations given in Section
“5.3 Leybold service”.
Contamination
WARNING
Troubleshooting / Disposal
