Description
11
300324726_002_C0 - 10/2016 - © Leybold
1.1 Design and function
The turbomolecular pump comprises basically the pump housing, the multi-
stage rotor with the stator package, the drive, and a magnetic bearing.
The rotor is made from an aluminum alloy. In addition to the turbine stage the
rotor has a Holweck stage.
The MAG has a built-in precision 5-axes controlled magnetic bearing. The
rotor is suspended by trouble-free magnetic bearings.
The bearing concept allows low vibration operation and insures operation of
the pump in any mounting position. Magnetic bearings also guarantee ultra-
clean vacuum because no grease is used for lubrication of bearings.
Touch down bearings are provided to stabilize the rotor mechanically if
impacts occur during operation. They are only used in case of strong shocks
or faulty electronics.
When interrupting the power supply voltage, the turbomolecular pump will
operate as a generator supplying the frequency converter with power. The
rotor is decelerated down to approximately 100 Hz and will then touch down
on the touchdown bearings.
The MAG has a purge gas device. It is water-cooled.
A controlled synchronous motor is used to power the rotor.
Rotor
Magnetic bearing
Touch-down bearings
High-vacuum flange
Rotor
Stator elements
Upper touch-down
bearings
Holweck stage
Synchronous motor
and magnetic
bearing cartridge
Base flange
Bottom touch-down
bearings
Fig. 1.2 Schematic section of the MAG integra with frequency converter, other models similar
Frequency converter
On/Off switch
Start/Stop keys
Local/Remote key
Service interface
Customer interface
Address switch
for Profibus
LEDs
Mains connection
24 V DC outputs for valves
