Keysight Technologies B1505A, Configuration Manual

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Keysight B1505A Configuration and Connection Guide 5-25
Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect High Voltage Bias Tee
To Connect High Voltage Bias Tee
Keysight N1260A high voltage bias-tee is used to perform the high voltage C-V
measurement. The C-V measurement of up to 3000 Vdc can be realized by using the
bias-tee, MFCMU, and HVSMU. The N1260A should be installed near your DUT
interface as shown in
Table 5-1 on page 5-5 . Also see Figure 5-9 for connection example.
The N1260A is also used for the high voltage C-V measurement using the N1265A test
fixture. It must be connected between the MFCMU and the N1265A. Then use two
N1254A-518 SHV cables to connect the N1260A output to the N1265A Bias Tee input.
The N1260A input connection is same as
Table 5-18 . Ignore Table 5-19 .
Table 5-18 To Connect N1260A Input
NOTE Turn the B1505A off before connecting the CMU cable.
Connect HVSMU to obtain DC bias input. Because the bias-tee cannot pass the MFCMU
internal DC bias.
B1505A terminals Required cables N1260A terminals
HVSMU
Force 16493T HVSMU cable, 3 m or 1.5 m From HVSMU
MFCMU Hcur N1300A CMU cable, 3 m or 1.5 m
It is not needed to connect the ground wire extended from the
CMU cable.
From
MFCMU
Hcur
Hpot Hpot
Lpot Lpot
Lcur Lcur
From HVSMU
Hcur
Hpot
Lpot
Lcur
From MFCMU
㼼 3 k V M a x
䞉䞉䞉䞉
㼼 3 k V M a x
䞉䞉䞉䞉䞉䞉䞉䞉
!!