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Keithley S530, Diagnostic Manual

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Keithley S530 Diagnostic Manual Download Page 7

 

Section 1 

Introduction to S530 Diagnostics 

If you have any questions after reviewing this information, contact your local Keithley Instruments 
representative or call one of our applications engineers at 1-888-KEITHLEY (1-888-534-8453) within 
the U.S. and Canada. You can also visit the Keithley Instruments website at www.keithley.com for 
updated worldwide contact information. 

In this section: 

Diagnostic manual content .........................................1-1 
Diagnostics overview..................................................1-1 
Diagnostic project.......................................................1-4 
Hardware configuration ..............................................1-5 
Running the diagnostic tests ......................................1-5 
S530 diagnostic execution flow ................................1-10 

Diagnostic manual content 

This manual contains diagnostic information for the S530 system only. It includes information about 
how to run the S530 system diagnostics and how to interpret the results. The appendices contain 
detailed information regarding the individual diagnostic tests. An understanding of the information in 
the appendices is not required in order to run the system diagnostics. 

For more information about instruments that can be used within the S530 system, refer to the 
documentation for each specific Keithley Instruments model: 

 

S530 Integrated Test System 

 

Model 707B Switching Matrix  

 

Model 708B Switching Matrix  

 

Series 2400 SourceMeter  

 

Series 2600A System SourceMeter  

 

Model 4200-SCS Semiconductor Characterization Suite 

Also, refer to the supplied documentation that is located on the Keithley Instruments CD-ROM that 
was shipped with your purchase. You can also visit the Keithley Instruments website at 
www.keithley.com to search for updated information by model number. 

Diagnostics overview 

The S530 diagnostic testing gives you an opportunity to assess the overall health of your system. 
Performing various electrical and communications tests and comparing the results against a built-in 
set of limits achieves this health assessment. 

 

Summary of Contents for S530

Page 1: ...m o c y e l h t i e k w w w E C N E D I F N O C F O E R U S A E M R E T A E R G A S530 Integrated Test System Diagnostics Manual S530 906 01 Rev A March 2011...

Page 2: ...prohibited All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments Inc Other brand names are trademarks or registered trademarks of their respective hol...

Page 3: ...t control and data I O connections are for connection to Category I sources unless otherwise marked or described in the user documentation Exercise extreme caution when a shock hazard is present Letha...

Page 4: ...ers that might result in personal injury or death Always read the associated information very carefully before performing the indicated procedure The CAUTION heading in the user documentation explains...

Page 5: ...15 FTP sever configuration 1 16 Non Kelvin 2W S530 system diagnostics Appendix A Introduction 2 1 Non Kelvin hardware connection 2 1 Non Kelvin SMU diagnostic test flow 2 1 SMU communication test 2 2...

Page 6: ...test 3 3 Kelvin voltage communication test 3 6 Kelvin matrix diagnostic 3 6 Matrix Communication Test 3 6 Kelvin basic short and continuity tests 3 6 Kelvin short test 3 10 Short test flow 3 10 Kelvi...

Page 7: ...garding the individual diagnostic tests An understanding of the information in the appendices is not required in order to run the system diagnostics For more information about instruments that can be...

Page 8: ...vin system Operating modes The S530 diagnostic project supports two operating modes engineer and operator The mode used is determined by the ACS login account type Engineer Engineer mode enables all o...

Page 9: ...oad and run diagnostic tests that have been previously created and saved by an engineer user see next Figure The output of the operator level diagnostics will display as the testing occurs in the ACS...

Page 10: ...iple PTMs see next Figure Each module represents a specific diagnostic test for the supported S530 instruments If you are in engineer mode you can choose which modules and tests to run If you are in o...

Page 11: ...2410 SMUs and Model 7174 or 7072 HV matrix cards in the Models 707B or 708B switch matrix mainframe The diagnostic project supports four types of S530 hardware configurations high voltage in either 2...

Page 12: ...4 After the Diagnostic xml project opens the ACS window opens see next Figure Figure 5 Diagnostic xml project To view expand the diagnostic tests that can be performed click the double arrows in the...

Page 13: ...ed in your probe card adaptor Also make sure that the vacuum is applied for the probe card to ensure a proper connection Run diagnostics Click the Run icon on the ACS toolbar and the selected diagnost...

Page 14: ...Section 1 Introduction to S530 Diagnostics S530 Diagnostic Manual Figure 7 Progress status fail Figure 8 Progress status pass 1 8 S530 906 01 Rev A March 2011...

Page 15: ...ail status of each test however it does not indicate the detailed measurement results Both reports are located in the following default directory C ACS Projects Diagnostic Reports Review diagnostic re...

Page 16: ...ct the desired test modules from the test tree if in engineer mode and click the run icon Diagnostics will begin and a status dialog box opens displaying the pass or fail status NOTE If a leakage test...

Page 17: ...SMU diagnostic contains the following see next Figure KI26XX SMU and KI24XX SMU In this area all scanned SMUs listed in the Hardware Configuration panel are displayed Each SMU can be selected or desel...

Page 18: ...ix GUI opens by default see next Figure The Setup tab contains the following INSTRUMENTS Shows the matrix and matrix cards configured for the system SELECT ALL Allows you to select all of the switch c...

Page 19: ...lly for the Model 4200 SCS CV unit refer to the following section S530 troubleshooting information Similar to the Diag_SMU and Diag_Matrix PTMs the test parameters for Diag_CVU are displayed on the Se...

Page 20: ...files you need to know the type of test as well as the date and time of the diagnostic test Each type of test has a separate diagnostic report For example the results of the Diag_SMU test are containe...

Page 21: ...FTP PTM ACS will provide the FTP client and the data destination for example a network drive will act as the corresponding FTP server However before ACS can upload data to a community server a networ...

Page 22: ...Server IP Server Port User Name Password and FTP Root are the conditions needed to specify an FTP server Test FTP connection 1 Confirm the password 2 Click the Test button When you have successfully c...

Page 23: ...browsing and selecting the folder that you want to upload 4 Run your diagnostic test and when it s complete the reports will upload to the location specified When the upload has finished the following...

Page 24: ...Section 1 Introduction to S530 Diagnostics S530 Diagnostic Manual 1 18 S530 906 01 Rev A March 2011 This page intentionally blank...

Page 25: ...nded to provide low level details regarding how the various diagnostic tests run on 2 wire 2W non Kelvin S530 systems Non Kelvin hardware connection The minimum hardware requirement is one switch card...

Page 26: ...the SMU voltage and current tests will run Figure 19 SMU Diagnostic flow chart SMU communication test The following is an example of the communication test flow for the SMU diagnostic tests see next...

Page 27: ...For the Series 2600A instruments the test support SMU should be the same model as the SMU to be tested This is not the case if the SMU being tested is a model 2410 If the SMU i 1 is not the same mode...

Page 28: ...test To perform the current test diagnostics forces 0V from the support SMU first and then forces current from the SMU under test The voltage or current is measured by both SMUs and compared to the di...

Page 29: ...on test will pass NOTE The communications test is mandatory and cannot be skipped If the communication test fails the other matrix diagnostic tests will not run Non Kelvin basic short test and continu...

Page 30: ...s SMU2 and the support SMU is SMU3 and the row pair is C D see next Figure Figure 24 Test connections rows C and D Basic continuity test The basic continuity test is executed by connecting two SMUs in...

Page 31: ...instrument card For Example the current SMU is SMU2 and the support SMU is SMU3 and the row pair is C D see next Figure When SMUs are working in the 2W mode the Basic Test will only check the cross po...

Page 32: ...adjacent pins will be tested The last pin will be tested with the first pin to cover the entire set of switch matrix pins For example pin 1 to pin 2 pin 2 to pin 3 pin 3 to pin 4 and pin 4 to pin 1 2...

Page 33: ...ion the two SMUs will be connected by two rows and the same pin Execute the test by forcing 1mA from the first SMU forcing 0V from the second and then measure the voltage and current with the first SM...

Page 34: ...d to test with the first SMU The test is executed using the same method as the pin test and the test results will display in the ACS GUI test log and in the diagnostic report SMU matrix test flow Pin...

Page 35: ...rom the first SMU and forcing 0V from the second Measure the current several times for a period of 2 seconds using the second SMU If the measured current is higher than 1 A Fail will display in the AC...

Page 36: ...he SMU portion of the leakage test uses the first SMU of the Series 2600A instruments group that is under test The remaining SMUs will be looped to test with the first SMU The path is made by separate...

Page 37: ...530 system diagnostics Figure 35 Model 2410 test flow Leakage connection during test For example if SMU3 is the support SMU the current row pair is C and row D see next Figure Figure 36 Test connectio...

Page 38: ...Appendix A Non Kelvin 2W S530 system diagnostics S530 Diagnostic Manual 2 14 S530 906 01 Rev A March 2011 This page intentionally blank...

Page 39: ...he force test is connected to all the force terminals including instruments and the device under test DUT pins The sense test is connected to all the sense terminals NOTE In a Kelvin S530 system force...

Page 40: ...run 2 The communication test must run successfully before the SMU voltage and current tests run Figure 37 Kelvin SMU diagnostic test flow chart SMU communication Test The following is an example of th...

Page 41: ...the Series 2600A instruments the test support SMU should be the same model as the SMU to be tested This is not the case if the SMU being tested is a model 2410 If the SMU i 1 is not the same model as...

Page 42: ...forces voltage from the SMU under test To perform the current test diagnostics forces 0V from the support SMU first and then forces current from the SMU under test The voltage or current is measured b...

Page 43: ...ystem diagnostics Figure 40 Force test Sense test During the sense test the SMUs are used in four wire 4W mode and both the force and sense parts of the matrix are used Figure 41 Example connections f...

Page 44: ...rminals of the pin are not shorted together at the probe card If this is the case then a blank probe card should be installed In the case of high voltage system which uses the Keithley Model 7072 HV m...

Page 45: ...he short test SMUs are used in the 2W mode The test flow is the same as the instrument card 2W tests Basic short sense test During the short test SMUs are used in 4W mode Use pin 1 to connect the forc...

Page 46: ...r of SMUs The loop should be SMU1 to SMU N 1 because the last SMU was tested by previous loops 2 For example when SMU2 is the current instrument under test and the total number is seven the test suppo...

Page 47: ...ect the current SMU under test and the support SMU together Figure 45 Example SMU sense test connections using rows A and B 2 If the current row is C D E and F Use pin 1 to connect the force and sense...

Page 48: ...3 5 see next Figure After connecting each set of pins and rows execute the test by forcing 1mA from the first SMU and forcing 0V from the second SMU The current is then measured using the second SMU I...

Page 49: ...ment card 2W tests Sense test During the sense test the SMUs are used in four wire 4W mode and both the force and sense parts of the matrix are used see next two Figures Use pin 1 or pin N and pin 3 t...

Page 50: ...SMUs are connected by two rows using the same pin Execute the test by forcing 1mA from the first SMU forcing 0V from the second and then measuring voltage and current with the first SMU If the resist...

Page 51: ...be used together Therefore the rows used will depend on the SMU ranges see next Figure 1 If the current row is A and B Use pin 1 to connect the force and sense terminals of the current SMU under test...

Page 52: ...t the force and sense terminals of the SMU under test with row C Use pin 2 to connect the force and sense terminals of the support SMU except GNDU with row D Use pin 3 to connect the force and sense t...

Page 53: ...600A instruments Systems without a Model 2410 will test rows A through H using the Series 2600A instruments Figure 55 Model 2410 within rows A and B Force test During the continuity test SMUs are used...

Page 54: ...eries 2600A instruments Each pair of adjacent pins will be tested with pairs of rows Each pair of rows consists of row n and row n 1 where n 1 3 5 The last pin is connected and tested with the first p...

Page 55: ...in 3 to pin 4 2 If the system contains a high voltage Model 2410 SMU only the row A and B pair will be used during the test of the high voltage SMU 3 The pair of rows will be tested in reverse order o...

Page 56: ...d F without a Model 2410 For the Model 2410 on row C pin 3 or pin 1 will be connected to GNDU see next Figure Figure 59 Model 2410 row C pin 1 or 3 3 If the current row is C D E and F Use pin 1 to con...

Page 57: ...0A instruments Systems without a Model 2410 will test rows A through H using the Series 2600A instruments Figure 61 Model 2410 rows A and B Force test During the leakage test SMUs are used in the 2W m...

Page 58: ...Appendix B Kelvin 4W S530 system diagnostics S530 Diagnostic Manual 3 20 S530 906 01 Rev A March 2011 This page intentionally blank...

Page 59: ...mmended that you run CVU confidence check in order to test for opens and shorts on the CVU The following information will guide you through this process This is a step by step process to run a CVU con...

Page 60: ...ss 3 Click connect 4 Log On to Windows with user name kiadmin and password kiadmin1 see next Figure Figure 65 Log On to Windows 5 When the Model 4200 SCS first opens the Keithley eXternal Control Inte...

Page 61: ...rol Interface KXCI 6 On the Model 4200 SCS desktop click the KITE icon see next Figure Figure 67 Model 4200 SCS desktop KITE icon 7 Once you have KITE open click on Tools in the toolbar and select CVU...

Page 62: ...nt see next Table For a 2 wire system this triax connection is not required Table 1 4 wire Kelvin system cards used for Open Check testing Wiring configuration Card Column Connected to card Column 2 1...

Page 63: ...information Figure 69 CVU Confidence Check dialog box 9 Click the Settings function and make sure the settings for the CVU match the parameters in the next Figure before continuing Figure 70 CVU Conf...

Page 64: ...eters set and the relays closed click on the Open Check function 12 After you click Open Check you will see a dialog box open Click OK see next Figure Figure 71 Open Check probe connections 13 After t...

Page 65: ...tton will turn green and red if it fails NOTE Once you have completed the confidence check tests you must make sure that all of the relays on the Model 707B switch matrix are open Additionally make su...

Page 66: ...Appendix C S530 troubleshooting information S530 Diagnostic Manual 4 8 S530 906 01 Rev A March 2011 This page intentionally blank...

Page 67: ...of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies A G R E A T E R M E A S U R E O F C O N F I D E N C E Keithley Instruments Inc Corporate...

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