Section 1: Introduction to S530 Diagnostics
S530
Diagnostic Manual
2. Low-level looping: loop through only the instruments that you want to include in your diagnostic
testing by using the Clear All function then selecting the specific instruments and tests that are
desired.
S530 diagnostic execution flow
The following information and steps will help you to accomplish your diagnostic testing and help to
isolate any problems that you may have incurred:
1. Run diagnostics with the probe card in place, unless the probe card contains extra components
such as resistors or jumpers. If the probe card contains extra components, install either a blank
probe card (such as the Keithley 9139-type; see next Figure), or one without components before
starting diagnostics. Diagnostics should be run with the probes up. With the probe card in place,
the force and sense leads will be connected.
2. When you start the diagnostic test, ACS will query each instrument to determine if the calibration
has expired.
If an instrument’s calibration has expired, the diagnostic report will contain a warning
indicating this, however, the diagnostic testing will continue.
3. Load the diagnostic project, select the desired test modules from the test tree (if in engineer
mode), and click the run icon. Diagnostics will begin and a status dialog box opens displaying the
pass or fail status.
NOTE
If a leakage test or matrix test fails, you may be able to narrow the problem down by disconnecting
the probe card from the switch and rerun diagnostics. If the S530 system is a non-Kelvin type, you
can disconnect all of the probe card adaptor wiring from the switch matrix before rerunning. If the
S530 system is a four-wire (4W; Kelvin-type), each pin’s force and sense lead must be connected
together using triax cables (if you are unsure how to do this, contact your local Keithley Instruments
service center). If after disconnecting the probe wiring from the switch the test passes, the previous
failure was probably due to a fault in either the probe card or the probe card adaptor cabling. If the
test continues to fail, the failure is probably due to a fault in the matrix – at this point, you should
contact the Keithley Instruments service center.
If a SMU test fails, check the diagnostic report to see if the SMU is past its calibration due date. If it is,
have the instrument calibrated. If the instrument is within its calibration period, then there may be an
instrument fault, and your local Keithley Instruments service center should be contacted immediately.
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S530-906-01 Rev. A / March 2011
