Section 3: Installation
Model 9139B Probe Card Adapter Instructions
3-6
9139B-901-01 Rev. A / January 2019
Stack height
The height from the mounting seat of the prober to the surface of the chuck (stack height) is a basic
installation consideration.
Figure 10: 9139B-PCA
Stack height must be equal to the stack height of the probe card adapter. The stack height of the
Keithley probe card adapter can be 3.378 cm (1.330 in.) or 3.790 cm (1.492 in.), depending on the
type of prober and the requirements for cable routing.
Refer to
(on page 6-1) for detailed mechanical drawings of the 9139B to
determine if your prober is compatible. You may have to install mounting hardware onto the prober to
ensure that the prober stack height is the same as the probe card adapter stack height.
Cable routing
Cable routing is an important installation consideration. Device under test (DUT) cables can be routed
above or below the top plate of the prober. For cable routing above the top plate, the DUT cables exit
vertically from the probe card adapter. For cable routing below the top plate, the DUT cables exit
horizontally from the probe card adapter.
The DUT cables are routed under the prober ring of the probe card adapter and may exit from the left,
right, or back of the prober. The cable exit you use depends on the type of prober and how the prober
is oriented next to the system.
All DUT cables must be the same length. Uniform cable length provides uniform electrical
characteristics (capacitance and inductance) of the cables. This is important when performing
capacitance measurements or when measuring low-level currents.
See
(on page 3-7) for more information about installing DUT cables.