Model 9139B Probe Card Adapter Instructions
Section 3: Installation
9139B-901-01 Rev. A / January 2019
3-7
Light cover and microscope clearance
Check the light cover and microscope clearance. Most microscopes are located far enough above the
probe card assembly that they do not present clearance problems when the light cover is installed.
Some microscopes may protrude into the probe ring assembly to the area below the shield plate. This
presents clearance problems. If the microscope is mounted on a pivoted arm, move the microscope
aside and then install the light cover.
Installation procedure
Hazardous voltages may be present on an installed probe card even after the output is
disconnected, that if contacted, may cause personal injury or death.
To install the 9139B Probe Card Adapter:
You must supply all connections and hardware associated with vacuum hosing, in addition to the
vacuum source.
1. Unpack and inspect 9139B (see
(on page 1-4) for special handling
information).
2. Remove all power from the parametric test system.
3. Install the probe card adapter in your prober, following the instructions provided with the prober.
The hardware supplied with your probe card adapter assembly varies depending on the type of
prober you have.
See
(on page 6-1) to determine if your prober is compatible. If you
need assistance with your specific prober configuration, contact your sales representative.
4. Route 0.635 cm (1/4 in.) outside diameter vacuum hose (provided) to the probe card adapter,
away from any moving parts of the prober. Make sure the hose remains clear of any pinch points
that could cut off or restrict flow through the vacuum hose.
5. Install the 9139B to a vacuum hose. Route a section of vacuum hose from the PCA through the
"TO PCA" grommet on the vacuum control box.
6. Connect the vacuum control box end of the hose to valve PF-1 (see the following figure) and the
other end of the hose to the PCA.
