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Keithley 7174A Instruction Manual Download Page 23

 

Operation

 

2-7

HI

LO

DMM

Signal

Guard

Signal

Guard

DUT

Signal

Guard

Signal

Guard

Sense HI

Sense LO

C.) DMM 4-Wire

Rows

Columns

HI

LO

Electrometer

Signal

Guard

Signal

Guard

DUT

D.) Electrometer, Unguarded Volts

Rows

Columns

7174A

7174A

Figure 2-5

General instrument connections (cont.)

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Summary of Contents for 7174A

Page 1: ...cess underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Dem...

Page 2: ...n Manual Contains Operating and Servicing Information Model 7174A 8 12 Low Current Matrix Card 7174A 901 01 Rev A 9 98 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www art...

Page 3: ...SOLE AND EXCLUSIVE REMEDIES NEITHER KEITHLEY INSTRUMENTS INC NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT INDI RECT SPECIAL INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS...

Page 4: ...truction Manual 1998 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A First Printing September 1998 Document Number 7174A 901 01 Rev A Artisan Technology Group Quality Instrumentation...

Page 5: ...num bered sequentially When a new Revision is created all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual Each new Revision includes a...

Page 6: ...t before measuring Users of this product must be protected from electric shock at all times The responsible body must ensure that users are prevented access and or insulated from every connection poin...

Page 7: ...d the associated infor mation very carefully before performing the indicated procedure The CAUTION heading in a manual explains hazards that could damage the instrument Such damage may invalidate the...

Page 8: ...AGE Pin to Ground 0 01pA V Pin to Pin 0 005pA V INSULATION RESISTANCE 6 7 1013 minimum CAPACITANCE Guard Driven Path to Ground 10pF Path to Path 1pF typical ACCESSORY SUPPLIED Instruction manual and e...

Page 9: ...mmended cables and adapters 2 3 2 5 3 Triax banana plug adapter 2 4 2 5 4 General instrument connections 2 5 2 5 5 Keithley instrument connections 2 11 2 5 6 Typical test fixture connections 2 17 2 6...

Page 10: ...ng precautions 4 1 4 3 Principles of operation 4 2 4 3 1 Block diagram 4 2 4 3 2 ID data circuits 4 2 4 3 3 Relay control 4 3 4 3 4 Power on sequence 4 3 4 3 5 Isolator relays 4 4 4 4 Troubleshooting...

Page 11: ...ector locations 2 21 Figure 2 17 Two cards in daisy chain configuration 2 22 Figure 2 18 Power line ground loops 2 23 Figure 2 19 Eliminating ground loops 2 23 Figure 2 20 Shielded and guarded 2 24 Fi...

Page 12: ...for path isolation verification 4 7 Figure 4 5 Triaxial cable preparation 4 8 Figure 4 6 Connections for path resistance verification 4 9 Figure 4 7 Shorting measurement paths using triax tee adapter...

Page 13: ...3 2 Crosspoint summary for resistivity measurements 3 9 4 Service Information Table 4 1 Recommended troubleshooting equipment 4 4 Table 4 2 Troubleshooting procedure 4 4 Table 4 3 Recommended verific...

Page 14: ...s 1 6 Specifications 1 7 Unpacking and inspection 1 8 Packing for shipment 1 9 Optional accessories 1 2 Features Key features of the Model 7174A Low Current Matrix Card include Eight row by twelve col...

Page 15: ...e Report any such damage to the shipping agent immediately Save the original packing carton for possible future reshipment 1 7 2 Shipment contents The following items are included with every Model 717...

Page 16: ...with cap Use this connector for custom applica tions and interface connections such as test fixtures Model 7078 TRX T 3 slot male to dual 3 lug female triax tee adapter Model 237 BAN 3 3 slot male tri...

Page 17: ...t considerations Reviews a number of considerations when making low level current and capacitance measurements 2 8 Coaxial jumper access Provides information on jumper removal 2 2 Handling precautions...

Page 18: ...until it is properly seated in the edge connectors at the back of the slot Once the card is properly seated secure it to the main frame by finger tightening the spring loaded screws WARNING The mount...

Page 19: ...e measure ments made See paragraph 2 7 for a discussion of measure ment considerations Table 2 1 Recommended cables and adapters Model Description 7078 TRX x 237 BAN 3 237 ALG 2 7078 TRX BNC 7078 TRX...

Page 20: ...of a triaxial cable with inner shield shorted to center conductor 1 Using a knife cut and strip back the jacket about 1 1 2 inches 2 Remove the outer insulation then cut away the outer shield as far a...

Page 21: ...through G The unguarded volts connections in D show the HI signal path routed through one jack and the LO path goes through the other connector Both GUARD pathways are connected to electrometer LO For...

Page 22: ...his configuration only for non critical measurements Warning Hazardous voltage from guard sources may be present on LO B DMM Common LO Rows Columns Rows Columns 7174A 7174A Figure 2 5 General instrume...

Page 23: ...e HI Sense LO C DMM 4 Wire Rows Columns HI LO Electrometer Signal Guard Signal Guard DUT D Electrometer Unguarded Volts Rows Columns 7174A 7174A Figure 2 5 General instrument connections cont Artisan...

Page 24: ...Guard Signal Guard DUT F Electrometer Fast Current Rows Columns Rows Columns HI LO Electrometer Signal Guard Signal Guard DUT Guard G Electrometer Resistance Guarded 7174A 7174A 7174A Figure 2 5 Gene...

Page 25: ...d Signal Guard DUT I Current Source Unguarded HI LO Current Source Signal Guard Signal Guard DUT J Current Source Guarded Guard Rows Columns Signal 7174A 7174A 7174A Figure 2 5 General instrument conn...

Page 26: ...uard Note DUT shielding guarding not shown See Figures 2 20 and 2 21 Force I or V Source Measure Unit Rows Columns Signal Signal Guard Signal Guard 7174A Figure 2 5 General instrument connections cont...

Page 27: ...7174A 8 x 12 LOW CURRE NT MATRIX COLUMNS ROWS S IGNAL GUARD 200V PK 200V PK 200V PK WARNING TIGHTE N MOUNTING S CRE WS TO E NS URE PROPE R CHAS S IS GROUND 6172 2 slot to 3 lug Triax Adapter 237 BAN...

Page 28: ...nect the inner shield of the HI cable to VOLT OHMS LO to minimize noise 196 DMM Connect inner shield to LO for low level measurements Modify the cable of Figure 2 4 HI LO 1 2 3 4 5 6 7 8 9 10 11 12 A...

Page 29: ...V PK 200V PK WARNING TIGHTE N MOUNTING S CRE WS TO E NS URE PROPE R CHAS S IS GROUND 237 BAN 3 or Special Triax Note See paragraph 2 5 3 and Figure 2 4 for special triax to banana cable 237 BAN 3 Comm...

Page 30: ...8 x 12 LOW CURRE NT MATRIX COLUMNS ROWS S IGNAL GUARD 200V PK 200V PK 200V PK WARNING TIGHTE N MOUNTING S CRE WS TO E NS URE PROPE R CHAS S IS GROUND 7174A Matrix Card Figure 2 9 Model 590 CV analyzer...

Page 31: ...adapter and the desired row of the Model 7174A 3 Connect the Model 220 GUARD output to GUARD INPUT terminal of the adapter 4 Connect the triax end of a triax banana cable to the desired row on the Mo...

Page 32: ...ONLY 100VA MAX ADDRESS ENTERED VIA FRONT PANEL PROGRAM IEEE 488 INTERFACE CAL ENABLE INTERLOCK 1 2 LINE VOLTAGE SELECTED LINE FUSE SLOWBLOW TRIGGER OUT IN 200V MAX OUTPUT LO SENSE LO OUTPUT LO SENSE...

Page 33: ...nect internally recommended for specified performance 1 2 3 4 5 6 7 8 9 10 11 12 A B C D E F G H KEITHLE Y 7174A 8 x 12 LOW CU RRE NT MATRIX COLUMNS ROWS S IGNAL GUARD 200V PK 200V PK 200V PK WARNING...

Page 34: ...closed and open automatically when all crosspoints on the path are opened 2 6 Matrix configuration This section describes the matrix configuration of the Model 7174A It also explains ways to expand t...

Page 35: ...2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 H G C H G C H G C H G C H G C H G C H G C H G C H G C H G C H G C Rows Note For schematic refer to Section 5 Columns User connec...

Page 36: ...305 317 329 341 353 6 18 30 42 54 66 78 90 102 114 126 138 150 162 174 186 198 210 222 234 2446 258 270 282 294 306 318 330 342 354 7 19 31 43 55 67 79 91 103 115 127 139 151 163 175 187 199 211 223 2...

Page 37: ...for each row allowing daisy chaining of card rows These connectors can be reached by lifting the access door on the top of the mainframe do not remove cards to install the jumpers This expansion is sh...

Page 38: ...However it is still possible for sensitive signals to be affected by external sources In these instances special precautions may be required in the test setup Sources of EMI include Radio and TV broa...

Page 39: ...to dry for several hours in a low humidity environ ment before use or they can be dried more quickly using dry nitrogen 2 7 5 Noise currents caused by cable flexing Noise currents can be generated by...

Page 40: ...path of the matrix card should be connected to the guard output of the sourcing or measuring instrument Figure 2 20 shows typical connections Guard should be properly carried through the inner shield...

Page 41: ...2 8 Coaxial jumper access To gain access to jumpers lift jumper across cover Figure 2 22 Figure 2 22 Coaxial jumper access Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www...

Page 42: ...ch as doping profile band bending and mobile ion concentration 3 2 1 Stand alone system configuration The stand alone system shown in Figure 3 1 can be used to make CV measurements without the aid of...

Page 43: ...alone CV system configuration 11 1 2 3 4 5 6 7 8 9 10 12 A C B D E F G H 1 2 3 4 5 6 S G S G S G S G Devices Under Test Triax Cables 4801 Low Noise Cables Model 595 Quasistatic CV Meter Meter Input V...

Page 44: ...ble corrected separately Also for best quasistatic CV results the corrected capaci tance feature of the Model 595 should be used Corrected capacitance compensates for any leakage currents present in t...

Page 45: ...1 20 1 12 1 05 0 97 0 90 0 82 0 75 Capacitance Farad X 10 09 4 99 3 99 2 99 1 99 0 99 0 00 1 00 1 99 2 99 3 99 4 99 Bias Volt X 10 00 Keithley 590 00 00 10 500 100KHz X1 Filter Parallel Figure 3 4 Typ...

Page 46: ...Voltage Source Sources DC voltages up to 101V at a maximum current of 100mA Model 590 CV Analyzer Adds CV sweep measurement capability to the system Model 220 Current Source Used to source currents u...

Page 47: ...ncrements of 0 25V At each VGS value the drain source voltage VDS is stepped across the desired range and the drain current ID is measured at each value of VDS Once all data are compiled it is a simpl...

Page 48: ...ke van der Pauw resistivity measurements four terminals of a sample of arbitrary shape are measured A current from the Model 220 is applied to two terminals while the voltage is measured by the Model...

Page 49: ...2 4 3 B V3 I 1 2 4 3 C D V4 I 2 4 3 V5 I 1 2 4 3 V6 I 1 2 4 3 E F V8 I 1 2 4 3 G H V7 I 2 4 3 1 1 Figure 3 9 Resistivity measurement conventions Artisan Technology Group Quality Instrumentation Guara...

Page 50: ...B 1 1331 f BtS V6 V8 V5 V7 I AVG A B 2 3 5 Semiconductor IV characterization A source measure unit such as the Model 236 237 or 238 is used to test and characterize many types of devices One of these...

Page 51: ...D E F G H Columns Crosspoint Switching for all Rows Signal Guard Signal Guard 7174A Matrix Card 7174A Matrix Card 7078 TRX Cables Source Measure Units Note Do not connect guards to the DUT or short t...

Page 52: ...cks 4 2 Handling and cleaning precautions Because of the high impedance circuits on the Model 7174A care should be taken when handling or servicing the card to prevent possible contamination The follo...

Page 53: ...to Serial Converter Relay Drivers Power On Safeguard Output Enable Relays Rows A H Columns 1 12 Figure 4 1 Model 7174A block diagram ID Data is contained within an on card ROM U406 In order to read t...

Page 54: ...9 4 3 3 Relay control The relays are controlled by serial data transmitted via the RELAY DATA line A total of 16 bytes for each card are shifted in serial fashion into latches located in the 16 relay...

Page 55: ...igura tion jumper in the EXTEND position See the documentation supplied with the Model 7070 for complete details on using the card NOTE Do not use the Model 7070 for performing verification tests beca...

Page 56: ...ation measurements except for path isolation and offset current should be made at an ambient temperature of 21 C 25 C and a relative humidity of less than 0 R H Path isolation and offset current verif...

Page 57: ...ect the instrument and then select autoranging 4 Connect the Model 617 to row A of the Model 7174A as shown in Figure 4 4 5 Close crosspoint A1 by using the Model 707A front panel controls 6 Disable z...

Page 58: ...d the center conductor are to be connected to the banana plug as shown COM and LO terminal of the electrometer voltage source must be connected together as shown Also the ground link between COM and c...

Page 59: ...output 6 Close crosspointsA1 and B2 by using the switching ma trix front panel controls 7 With the Model 617 in amps enable suppress after the reading has settled 8 Turn on the Model 617 voltage sour...

Page 60: ...onductor Recommended equipment Model 196 DMM 7078 TRX T triax tee adapters 3 237 BAN 3 triax to banana cables 4 Connections Figure 4 6 shows the connections for the path resistance tests The Model 196...

Page 61: ...he Model 7174A see Figure 4 6 8 Close crosspoint A1 and allow the reading to settle 9 Verify that the resistance reading is 1 5 10 Open the crosspoint and disconnect the triax adapter from column 1 Co...

Page 62: ...8 Reinstall any reed packs that may have been removed when the cross point interconnect board was removed 9 Reinstall the cross point interconnect board Be sure that it is properly seated 10 Reinstal...

Page 63: ...Cross point Interconnect Board Cover TP1 Bobbin Crosspoint Relay Reed Pack Clear Yellow Note When inserting reed pack make sure long leads are inserted into bobbin Figure 4 8 Cross point relays Artisa...

Page 64: ...ack Red Isolator Relay Reed Pack Pathway Interconnect Board Clear Red Black Bobbin Yellow Note When inserting reed pack make sure long leads are inserted into bobbin Figure 4 9 Isolator relays Artisan...

Page 65: ...applicable 5 Keithley part number 5 4 Factory service If the matrix card is to be returned to Keithley Instruments for repair perform the following 1 Call the Repair Department at 1 800 552 1115 for...

Page 66: ...LM RES 10K 5 1 4W COMPOSITION OR FILM RES 47K 5 1 4W COMPOSITION OR FILM RES 200 5 1 4W COMPOSITION OR FILM RES 680 5 1 4W COMPOSITION OR FILM RES 120K 5 1 4W COMPOSITION OR FILM RES 11K 5 1 4W COMPOS...

Page 67: ...UBE LID GUARD TUBE BASE GUARD TUBE LID HANDLE LOCKNUT REL BD TO FASTENERS BRKT TO BD LUG ON SC 83 SC 120 4 LUG ON SC 120 4 REAR PANEL ASSEMBLY SOCKET SOLDERED ON SC 83 AND SC 120 4 SOCKET I C 28 PIN F...

Page 68: ...M 1 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 69: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 70: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 71: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 72: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 73: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 74: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 75: ...ement considerations 2 22 N Noise currents caused by cable flexing 2 23 O Offset current verification 4 6 Operation 2 1 Optimizing CV measurement accuracy 3 3 Optional accessories 1 2 Ordering informa...

Page 76: ...ing procedure 4 4 Typical CV curves 3 3 Typical test fixture connections 2 17 U Unpacking and inspection 1 2 W Warranty information 1 1 i 2 Artisan Technology Group Quality Instrumentation Guaranteed...

Page 77: ...libration only Certificate of calibration required Data required attach any additional sheets as necessary Show a block diagram of your measurement system including all instruments connected whether p...

Page 78: ...Keithley Instruments Inc 28775 Aurora Road Cleveland Ohio 44139 Printed in the U S A Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 79: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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