Keithley 7072-HV Instruction Manual Download

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Summary of Contents for 7072-HV

Page 1: ...cess underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Dem...

Page 2: ...2 HV High Voltage Semiconductor Matrix Card Instruction Manual A G R E A T E R M E A S U R E O F C O N F I D E N C E Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artis...

Page 3: ...ES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS INC HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES SUCH EXCLUDED DAMAGES SHALL INCLUDE BUT ARE NO...

Page 4: ...rd Instruction Manual 1990 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A Second Printing January 2002 Document Number 7072 HV 901 01 Rev B Artisan Technology Group Quality Instrume...

Page 5: ...n of the manual are incorporated into the new Revision of the manual Each new Revision includes a revised copy of this print history page Revision A Document Number 7072 901 01 February 1988 Revision...

Page 6: ...rd and earth ground on Rows A and B Do not exceed ZOOVbetween any two pins or between any pin and earth ground on Rows C through H Inspect the connecting cables and test leads for possible wear cracks...

Page 7: ...evels greater than 30V RMS 42 4V peak or 60VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring Operators of this product must...

Page 8: ...er transformer test leads and input jacks must be purchased from Keithley Instru ments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other co...

Page 9: ...4 pF 1 PF 0 6 pF A0 dB A0 dB 50 dB 4MHZ 8MHz 5MHZ 40m 4 1300 2oov 6Om 4 200 2oov 80 mA 2oov 2oov 5o lv 2opv 2ojlv MATRIX CONFIGURATION 8 rows by I2 columns CONNECTOR TYPE Three lug triaxial Signal Gua...

Page 10: ...ding combined quasistatic and high frequency CV measurements semiconductor switching matrix van der Pauw resistivity measurements and semiconductor pa rameter analysis SECTION 3 Applications Contains...

Page 11: ...ables and Adapters 2 3 2 5 3 Triaxial to Banana Plug Adapter Preparation 2 4 2 5 4 General Instrument Connections 2 5 2 5 5 Keithley Instrument Connections 2 11 2 5 6 Typical Test Fixture Connections...

Page 12: ...ocedure SECTION 4 Service Information 4 1 INTRODUCTTON 4 2 HANDLING AND CLEANING PRECAUTIONS 4 3 PERFORMANCE VERIFICATION 4 3 1 EnvironmentalConditions 4 3 2 Recommended Test Equipment 4 3 3 RelayTest...

Page 13: ...nODUCTION 5 l 5 2 PARTSLIST ___ __ __ __ 5 l 5 3 ORDERING INFORMATION 5 1 5 4 FACTORYSERVICE 5 l 5 5 COMPONENT LAYOUT AND SCHEMATIC DIAGRAM 5 l Artisan Technology Group Quality Instrumentation Guarant...

Page 14: ...Eliminating Ground Loops Shielding Example Dual Shield Test Fixture Guarded Circuit Typical Guarded Signal Connections SECTION 3 Applications Figure 3 1 Stand Alone CV System Configuration Figure 3 2...

Page 15: ...Model 7072 HV Offset Verification Test Connections Connections for Path Isolation Verification Triaxial Cable Preparation Connections for path Res tance Verification Shorting Measurement Paths Using T...

Page 16: ...osspoint Summary Table 3 2 Crosspoint Summary for Resistivity Measurements Table 3 3 Crosspoint Summary for JFET Test SECTION 4 Service Information Table 4 1 Table 42 Table 4 3 Recommended Verificatio...

Page 17: ...is instruction manual Should your Model 7072 HV require warranty service contact the Keithley represen tative or authorized repair facility in your area for further information When returning the matr...

Page 18: ...part number 7072 HV 901 00 The manual package indudes an inshuction manual and any perhnent addenda 1 6 REPACKING FOR SHIPMENT Should it become necessary to return the Model 7072 HV for repair careful...

Page 19: ...To avoid this problem operate the mainframe and matrix card only in a clean environ ment If contamination is suspected clean the card as dis cussed in Section 4 Also the performance verification proce...

Page 20: ...ated secure it to the mainframe by finger tightening the spring loaded 4 To remove a card first turn off the power and dis screws connect the line cord from the mainframe Discon nect all external and...

Page 21: ...urrent or high voltage measurements Rows G and Hare labeled CV and are designed for capacitance voltage measure ments Rows C through F are general purpose rows that can be used for ordinary voltage cu...

Page 22: ...Model 237 BAN 3 Note that you can use either an unterminated triax cable or cut a dual connec tor cable 7078 TRX 10 in half to construct two cables The steps for the procedure below are shown in Figur...

Page 23: ...gures assume instruments are connected to rows and the DUT is connected to columns DMM Connections General DMM connections are shown in Figure 2 5 A B and C Floating connections are shown in A with LO...

Page 24: ...igure 2 50 shows typical connections for a source measure unit SMW In this instance a remote sensing type of a SMU is shown requiring a total of four signal pathways to the DUT For critical measuremen...

Page 25: ...MNS L l 7072 HV C DMM 4 Wire ROWS COLUMNS Electrometer L A D Electrometer Unguarded Volts 7072 HV General Instrument Connections C D 2 7 Artisan Technology Group Quality Instrumentation Guaranteed 888...

Page 26: ...ROWS r i COLUMNS I I Electrometer F Electrometer Fast Current 7072 HV ROWS r _ COLUMNS HI LO i DUl GlWd Electrometer G Electrometer Resistance Guarded 7072 HV General Instrument Connections E G 243 A...

Page 27: ...NS L A 7072 HV H Voltage Source ROWS COLUMNS L l I Current Source Unguarded 7072 HV ROWS _ COLUMNS J Current Source Guarded L A 707BHV DUT 2 9 Artisan Technology Group Quality Instrumentation Guarante...

Page 28: ...H K Source Measure Unit Notes 1 DUT shielding guarding not shown See figures Z 21 and2 24 2 Z Pole switching for rows A F shown GUARD is not witched on rows G and H enerai Instrument Connections K 2 1...

Page 29: ...one end of a Model 7078 TIW 3 or 10 3 lug triaxial cable to rcw A of the Model 7072 HV 2 Connect the other end of the triax cable to the Model 617 INPUT connector using a Model 6172 adapter 3 Connect...

Page 30: ...e Model 230 OUTPUT and COMMON tenni nals to the desired rows using the prepared triax banana plug cables as shown in Figure 2 8 For remote sensing applications the SENSE OUTPUT and SENSE COM MON conne...

Page 31: ...ON 2 Operation Common 230 Voltage Source 7072 HV Matrix Card Figure 2 8 Model 230 Voltage Source Connections Z 13 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisant...

Page 32: ...triax cable be tween the guarded adapter and the desired row of the Model 7072 HV 3 Connect the Model 220 GUARD output to GUARD INPUT terminal of the adapter 4 Connect the triax end of a triax banana...

Page 33: ...in the equivalent circuit of Figure Z 12 SIGNAL should be connected to the probe or other device contact points while GUARD should be carried through as close to the device as possible If coaxial prob...

Page 34: ...mance Warning Do not use BNC cO ectorS to avoid possible shock hazard 7072 HV Matrix Card 3gure 2 11 Typical Test Fixture Connections Triw Cable 1 From 7072 HV CWd Wafer Chassis 1 Ground L _ _ _I Test...

Page 35: ...n a card in slot 5 of unit 1is accessed as matrix column 62 Each intersecting point in the matrixis called a crosspoint that can be individually closed or opened by program ming the Model 707 mainfram...

Page 36: ...ay asso ciated with that row is closed 2 6 3 Pathway Considerations As discussed previously the eight rows on the matrix card are designed for different purposes Rows A and B are designated low curren...

Page 37: ...2 HV cards in slots 1 through 3 are connected and rows C through F of Model 7072 HV cards in slots 4 through 6 are connected together move cards to install the jumpers Figure 2 15 shows an edge on vie...

Page 38: ...are internally jumpered only columns must be jumpered externally in this config ration Note that the backplane jumpers must be removed to separate the cards into two CUPS Trim tee adapters Model 7078...

Page 39: ...SECTION 2 Operation Figure 2 17 16 x 36 Matrix Constructed by External Jumpering 2 21 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 40: ...N 2 Operation Triax Tee AdaDters Matrix Input Output Figure 2 18 Using Trim TeeAdapters to Daisy Chain Cards 2 22 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisant...

Page 41: ...clude radio and television broadcast transmitters communications transmitters including cellular phones and handheld radios devices incorporating microprocessors and high speed digital circuits impuls...

Page 42: ...conductor and insulator caused by friction Low noise cable can be used to minimize these effects Such cable has a special graphite coating under the shield to provide lubrication and to provide a cond...

Page 43: ...use two shields one this configumtion is also recommended for guarded ap mounted within kind insulated from the other In this plications with the inner shield as guard and the outer shield acting as...

Page 44: ...of little consequence because that current is supplied by the buffer amplifier rather than the signal itself In a similar manner guarding also reduces the effective cable capacitance resulting in much...

Page 45: ...ce specifications other types of cards do not affect the specifications because they use different pathways in the mainframe backplane The extent depends on how many cards are used as well as the amou...

Page 46: ...ch as doping profile band bending and mobile ion concentration 3 2 1 Stand Alone System Configuration The stand alone system shown in Figure 3 l can be used to make CV measurements without the aid of...

Page 47: ...afers Under Test r Note Rows C F can be used for this signal path Model 595 Quasistatic CV Meter 6 IB 0 ID IE IF IG I I IT HP GL 3 2 Artisan Technology Group Quality Instrumentation Guaranteed 888 88...

Page 48: ...ut I 7072 HV Matrix Card I Cables Model 590 I L 707 Switching Matrix CV Analyzer I Computer P IEEE 488 Bus Note Remove jumpers to other 7072 HV cards if installed to optimize Model 595 measurement acc...

Page 49: ...the Model 595 only 2 Set up the Model 595 for the expected CV sweep 3 Close the crosspoints necessary to connect the Model 595 to the device under test as summarized in Table 3 l For example to test...

Page 50: ...plications 0 4E 10 0 4E 10 005 00 005 00 KEITHLEY 595 Figure 3 3 Typical Quasistatic CV Curve Generated by Model 595 3 5 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www a...

Page 51: ...stem Configuration Figure 3 5 shows the configuration for a typical multi purpose semiconductor test matrix Instruments in the system perform the following functions Model 617 Electrometer Source Meas...

Page 52: ...s of a particular JFET 3 3 2 Testing Common Source Charac teristic of FETs ThesystemshowninFigure3 5couldbeused totestava riety of characteristics including IGSS IOIO I IG ONI Im and Vos om To demonst...

Page 53: ...a are compiled it is a simple matter to generate the common source IV curves an example of which is shown in Figure 3 7 If the system is connected to a computer the test and graphing could all be done...

Page 54: ...nal paths as necessary In order to minimize sample loading which will reduce accuracy the Model 196 DMM should be used only on the 300mV or 3V ranges Also this con figuration is not recommended for re...

Page 55: ...able 3 2 summarizes the crosspoints to close for each voltage measurement on all three samples from the test configuration shown in Figure 3 8 Table 3 2 Crosspoint Summary for Resistivity Measurements...

Page 56: ...SECTION 3 Applications 1 0 Fiaure 3 9 Resisti Measurement Conventions 3 11 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 57: ...e drain and source leads of the FETs are connected in a4 wire sensing configuration This con nection scheme allows the Model 237 to use remote sens ing to accurately apply Vds to the FETs The Model 23...

Page 58: ...I I I I I H I I I I I I I I I I II I I 7072 HV 7072 HV MATRIX CARD MATRIX CARD Fkure 3 10 Multi Unit Test System Using Models 236 and 237 Source Measure Units 3 13 Artisan Technology Group Quality Ins...

Page 59: ...t ports The unit can automatically run a variety of tests on semi conductors and plot data on a built in CRT Test Fixture K 1 12 t 13 24 25 36 1 12 13 24 p 25 36 1 I 1 7 r 1 SMU 1 A SMU 2 HP 41458 SMU...

Page 60: ...nts is well be yond the scope of this manual However there are a few points that should be kept in mind when using this ar rangement Additional measurement considerations may be found in Section 2 par...

Page 61: ...ctor Parameter 7 11 Analyzer Triax Cables Triax Cables 181 7072 HV t ix CCWI Cigure3 12 SPA Connections Triax SNC I Adapters Model 7078 TRX SNC 3 16 Artisan Technology Group Quality Instrumentation Gu...

Page 62: ...2 2 3 3 4 4 Triax Cables HP 41458 Semiconductor Parameter Analyzer I I 7072 HV Matrix Card I i A 707 Switching Matrix Figure 3 13 System Configuration for JFET Test 3 17 Artisan Technology Group Quali...

Page 63: ...the FJZT being tested to the SMUs see Table 3 3 9 Press the MEASUREMENT SINGLE key to initiate the sweep The SPA will generate the IO vs VDS curves at specified VGSvalues 10 Open the crosspoints pres...

Page 64: ...and Brews J R MOS Phvsics and Technolow Wiley New York 1982 Sze S M Phvsics of Semiconductor Devices 2nd edition Wiley New York 1985 Van der Pauw LJ A Method of Measuring Specific Resistivity and Hal...

Page 65: ...flux Take care not to spread the flux to other areas of the circuit EON4 formation 4 board Once the flux has been removed swab only the repaired area with methanol then blow dry the board with dry nit...

Page 66: ...epared using the information shown in Figure 4 l The center conductor of the unter minated end of one triax cable should be connected to pin 1of the relay test connector while the inner shield should...

Page 67: ...eter should be operated in the unguarded mode Procedure NOTE The following procedure should be per formed at an ambient temperature of 23 C and at a relative humidity of less than 60 1 Turn on the Mod...

Page 68: ...1 Repeat steps 5 through 8 for crosspoints Bl through 812 Only one crosspoint at a time should be closed 12 With zero check enabled disconnect the electrome 13 Close crosspoint Cl by using the front p...

Page 69: ...617 Electrometer input through a Model 6172 frame Of course it will not be possible to 2slct female to 3 lug male triaxial adapter The other row close crosspoints with the card removed If is to be co...

Page 70: ...ction and enable zero check Se lect the 2pA range and zero correct the instrument 4 Connect the Mode1617 to rows A and B of the matrix card as shown in Figure 4 4 5 Program the Model 617 voltage sourc...

Page 71: ...rosspoint is probably defec tive See the schematic diagram at the end of Section 5 to determine which relay is defective Recommended Equipment 0 Model 196 DMM Connections Figure 4 6 shows the connecti...

Page 72: ...umn 1 connectors on the Model 7072 HV see Figure 4 6 8 Close crosspoint Al and allow the reading to settle 9 Verify that the resistance reading is 3 5Q 10 Open the crosspoint and disconnect the triax...

Page 73: ...dering irons 4 5 TROUBLESHOOTING 4 5 1 Recommended Equipment Table 4 2 summarizes the recommended equipment for general troubleshooting 4 5 2 Using the Extender Card In order to gain access to the tes...

Page 74: ...a sequence 8 TP8 Relay data 128 bits Present when updating relays 9 TP9 CLK pulses Present during relay data or ID data 10 TPIO High on power up until first STROBE Power on safe guard sets low 11 U30...

Page 75: ...el 7072 HV require the clos ing of more than one relay to close a specific crosspoint 4 6 1 Block Diagram ID data is contained within an on card ROM U27 In or der to read this information the sequence...

Page 76: ...ed relay while the output is high when the relay is de energized For example if the Ql output of U35 is low relay Kl will be energized 4 6 4 Power on Safeguard A power on safeguard circuit made up of...

Page 77: ...Matrix card model number 7072 HV 2 Card serial number 3 Part description 4 Circuit designation if applicable 5 Keithley part number 5 4 FACTORY SERVICE Jf the matrix card is to be returned to Keithle...

Page 78: ...RELAY REED Dl ST KlOO K125 R ZAY 4I ST Rl R2 R3 R4 R5 i R18 TSlOO TE149 TERMINAL TEFLON Trl TrlO CONN TEST POINT Wl STIFFENER BOARD KEITHLEY PART NO c 314 10 C 237 01 C 386 270P c 64701 C 36 5 1 CS 7...

Page 79: ...CAPJ ROTECTIVE FASTENER HANDLE SHIELD REAR SHIELD ROW A SHIELD ROW B STANDOFF SOCKET FOR U27 KEITHLEY PART NO cc 334 ST 137 l 7072 302 CA 54 l CAP 30 I FA 154 l HH 33 1 7071311 7072 305 7072 306 7071...

Page 80: ...M 1 M 2 M 3 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 81: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 82: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 83: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 84: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 85: ...le 0 Will not read applied input 0 Overload m Calibration only 0 Data required 0 Certificate of calibration required attach any additional sheetsasnecessary Show a block diagram of your measurement sy...

Page 86: ...berger Strasse 65 82110 Germering 089 84 93 07 40 Fax 089 84 93 07 34 GREAT BRITAIN Unit 2 Commerce Park Brunel Road Theale Berkshire RG7 4AB 0118 929 7500 Fax 0118 929 7519 INDIA Flat 2B Willocrissa...

Page 87: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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