Jetec MF5000 Series User Manual Download Page 2

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Gas Mass Flow Meter

with MEMS calorimetric sensing technology

MF5000 Series

User Manual

Document No.

07-2022-M7 EN

Issue date:

2022.07

Revision:

VE.2.01

久德電子

TEL:+886-4-23729418

FAX:+886-4-23724011

(40349)台中市西區福人街11號

Email: [email protected]

P a g e

http://www.jetec.com w

om.tw/

電話：

23729418 傳真：04-23724011 Email：[email protected] LINE：@jetec

MF5000 User Manual

Summary of Contents for MF5000 Series

Page 1: ...Gas Mass Flow Meter VE 2 01 Model MF5000 http www jetec com w om tw t 04 23729418 04 23724011 Email sales jetec com tw LINE jetec...

Page 2: ...eries User Manual Document No 07 2022 M7 EN Issue date 2022 07 Revision VE 2 01 TEL 886 4 23729418 FAX 886 4 23724011 40349 11 Email sales jetec com tw 1 P a g e http www jetec com w om tw t 04 237294...

Page 3: ...the trained or qualified personnel shall be allowed to perform product services Be cautious for the electrical safety even it operates at a low voltage any electrical shock might lead to some unexpec...

Page 4: ...address 15 5 4 4 Set the RS485 communication baud rate 16 5 4 5 Reset or calibrate the offset 16 5 4 6 Gas conversion factor GCF for different gas measurement 17 5 4 7 Set the 2nd correction factor 1...

Page 5: ...erformance 34 8 1 Measurement principle 34 8 2 Precautions for the best performance of the product 34 8 2 1 Comparison with a third party reference meter 34 8 2 2 Particle contamination and fluidic cl...

Page 6: ...with Siargo s proprietary MEMS calorimetric mass flow sensors together with the smart control electronics The sensor surface is passivated with silicon nitride ceramic materials and with a water oil p...

Page 7: ...ta cable as shown below may also be found according to your actual order Flow meter data cable Figure 2 1 MF5000 flow meter and data cable Please check immediately for the integrity of the product as...

Page 8: ...duct measures Some symbols are reserved for future upgrades and will not be lighted during the operation The following table details the meaning of each of the symbols Meter body LCD display MENU keys...

Page 9: ...ADC error E3 Error 3 RTC error E4 Error 4 EEPROM error E5 Error 5 Oscillator crystal error Temperature for models with temperature option P Pressure for models with pressure option Note Both the pres...

Page 10: ...meter dimensions Model DN mm D NPTM L MF5003 3 1 8 138 MF5006 6 1 4 144 MF5008 8 3 8 144 MF5012 12 1 2 150 MF5019 19 3 4 182 5 9 P a g e http www jetec com w om tw t 04 23729418 04 23724011 Email sale...

Page 11: ...be aligned with the arrow mark on the meter body If the flowing fluid may have particles or debris a filter is strongly recommended to be installed upstream of the meter Figure 4 1 MF5000 meter insta...

Page 12: ...some typical situations please follow the installation recommendation detailed in the following sketches c 2x90 degree elbow 3 D d Pipe size reduction e Pipe size expansion f Control valve at upstream...

Page 13: ...s if any upstream or downstream or both of the pipeline and the meter should then start to measure the flow in the pipeline Note because the meter has a large dynamical measurement range it could be...

Page 14: ...sured must be clean and free of particles or other foreign materials 5 2 Check the leakage Check gas leakage before any measurement If it is needed pressurized nitrogen or air can be used for the leak...

Page 15: ...the power is supplied and no abnormal issues are observed the meter is ready to perform the measurements The default display is for the mass flow measurement having two numerical lines on the LCD The...

Page 16: ...the instant flow rate F32 UnT F Change the default password F91 PASS Clear or reset the accumulated or totalized flow rate F92 CLr A Reset the 2nd correction factor F94 rS2nd Exit from the MENU F99 qU...

Page 17: ...certain time of usage the meter s offset zero flow rate might or might not have a small shift Or when you apply the meter for different gases the offset might be shifted To ensure measurement accurac...

Page 18: ...air is 1000 Note If the meter during purchase is ordered for a special real gas calibration contact the manufacturer before further proceeding Following the above mentioned steps at the MENU setting s...

Page 19: ...M key to set the response time There are 6 response time selectable 125 250 500 1000 2000 and 5000 unit is msec The default response time is 125 msec Use the Up or Down key to select the desired one...

Page 20: ...U and return to the Main Display screen 5 4 10Set the unit for the instant flow rate This function is to set the unit for an instant flow rate If one likes to switch between SLPM m3 h m3PH and SCFM fo...

Page 21: ...contact the manufacturer to obtain a special password to access the meter MENU 5 4 12Reset the accumulated or totalized flow rate The maximum value of the accumulated or totalized flow rate that the...

Page 22: ...ess the M key to set the 2nd correction factor 5 4 14Exit the MENU At the MENU settings use the Up or Down key to select the F99 qUIT option and press the M confirming key to exit the MENU settings an...

Page 23: ...5 4 15MENU key sequence for the settings Figure 5 2 MF5000 MENU key sequence 22 P a g e http www jetec com w om tw t 04 23729418 04 23724011 Email sales jetec com tw LINE jetec MF5000 User Manual...

Page 24: ...A EIA 485 A as illustrated below In this configuration the product MF5000 is a slave Figure 5 3 RS485 hardware connection 5 5 2 Communication parameters The PC UART communication parameters are listed...

Page 25: ...tion codes These codes are used to set or read the registers of the product Code Name Functions 0x03 Read register Read register s 0x06 Set single register Write one single 16 bit register 0x10 Set mu...

Page 26: ...marked functions need to disable the write protection before setting The detailed information of each register is described below Y enabled N disabled Address 0x0081 Write Y Read Y Description RS485...

Page 27: ...for a gas that is different from the calibration gas Value type UINT 16 Notes The air default is 1000 normally read from register 0x008B The product will disable this function with write protection o...

Page 28: ...When you execute this function make sure there is NO flow in the flow channel Notes please disable the write protection before executing this function Reset accumulated flow rate 0x00F2 Write Y Read N...

Page 29: ...rrent output load depends on the power supply the yellow area in the graph The maximum load resistor RL with a 24Vdc supply will be 850Ohm Figure 5 4 Analog output 28 P a g e http www jetec com w om t...

Page 30: ...male N3F NPT 3 8 female 1 2 120 0 072 7 2 0 05 5 MF5012 12 0 N4M NPT 1 2 male N4F NPT 1 2 female 3 300 0 18 18 0 1 10 MF5019 19 0 N6M NPT 3 4 male N6F NPT 3 4 female 8 800 0 48 48 0 3 30 e g MF5006 N2...

Page 31: ...Modbus half duplex 4 20 mA MENU access 3 key front face keyboard digital Display Instant flow rate Accumulated or totalized flow rate Mechanical connection NPT or customized Hazardous rating Ex ia II...

Page 32: ...159 10 0 1690 0 245 12 0 2420 0 351 15 0 3750 0 544 7 2 2 MF5006 Flow rate SLPM Pressure loss Pa PSI 2 0 5 0 001 5 0 21 0 003 10 0 70 0 010 20 0 250 0 036 30 0 540 0 079 40 0 950 0 138 50 0 1460 0 213...

Page 33: ...84 100 0 1860 0 270 120 0 2560 0 371 7 2 4 MF5012 Flow rate SLPM Pressure loss Pa PSI 30 0 110 0 016 50 0 215 0 031 70 0 350 0 051 100 0 610 0 088 150 0 1185 0 173 200 0 1950 0 282 250 0 2885 0 418 30...

Page 34: ...0 008 100 0 140 0 020 200 0 370 0 053 300 0 695 0 100 400 0 1110 0 161 500 0 1625 0 236 600 0 2230 0 324 700 0 2930 0 425 800 0 3730 0 541 33 P a g e http www jetec com w om tw t 04 23729418 04 237240...

Page 35: ...er publications made available to the public for additional information 8 2 Precautions for the best performance of the product 8 2 1 Comparison with a third party reference meter It is very common th...

Page 36: ...t use a foreign cleanser or other fluids to clean the flow path which could bring irrecoverable damage 8 2 3 Apply to a different gas medium The product is calibrated with a high precision NIST tracea...

Page 37: ...errors or unexpected flow rate Particles fluid type Check system Erroneous or large noise Vibration unstable flow Check system Valve not work Wire connection valve Return to factory Offset unstable C...

Page 38: ...case of questions and or product supports please contact customer service at the address listed below We will respond to your request in a timely fashion and will work with you toward your complete sa...

Page 39: ...l For further information and purchase of the evaluation kit please contact the manufacturer or the sales representative Each converter has a fixed cable that can be directly connected to the product...

Page 40: ...rview Revision D 2 April 2021 Corrections Revision D 1 March 2021 Reformat corrections and add the evaluation kit Revision C 7 July 2019 Update the MENU key functions Revision C 6 July 2018 Add the RS...

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