M-2000® Hardware Manual
©2023 J.A. Woollam Co.
87
5.
When finished with the alignment, click ‘Cancel Alignment’ to begin the
calibration.
6.
System Check status will be displayed in
Hardware
>
Hardware Status
.
Figure 4-65. Hardware Status.
Evaluating Calibration Results
System Check Successful
If the system check is successful, the following message will appear.
Figure 4-66. System Check successful.
Take a quick look at the spectroscopic data graph to verify that the data fit is
good (Figure 4-67). If the model generated Psi and Delta data match the
Experimental data, the procedure is finished.
Figure 4-67. A good fit to system check data. It is good practice to verify the system check fit even when the
system check is successful.
If the system check is successful, basic testing is finished and the ellipsometer is
ready for general use.
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