Instrutech CVM211 User Manual Download Page 13

 

 

Instruction Manual 

InstruTech CVM-211 "

Stinger

" Convection Vacuum Gauge Module

 

 

 

 

 

InstruTech, Inc 

 page 13  

 

 

 

Convection Vacuum Gauge

 Indicated vs. True Total Pressure

Test Gases - N2, Ar, He

0.0001

0.001

0.01

0.1

1

10

100

1000

0.0001

0.001

0.01

0.1

1

10

100

1000

Indicated Pressure (Torr) 

(convection gauge)

T

ru

T

o

ta

l P

ressu

re (

T

o

rr)

(cap

aci

ta

n

ce man

o

met

er)

CVG N2

Convectron N2

CVG Ar

Convectron Ar

Convectron He

CVG He

Ar

N2

He

 

Gas Correction Chart

 

The Y- Axis is actual pressure, measured by a capacitance manometer, a diaphragm gauge that measures true 
total pressure, independent of gas composition. 
The X-Axis is the pressure reading indicated by the convection gauge under test. 
The chart shows readings for an InstruTech CVG as well as for a GP Convectron

®

 gauge, to illustrate that the 

response of the gauges to these different gases is virtually indistinguishable.  (Caution:  Do not assume this data 
applies to other convection gauges, which may or may not be the same.) 
If the gas is N

2

, when the true total pressure is 100 Torr, the gauge will read 100 Torr 

If the gas is Ar, when the true pressure is 100 Torr, the gauge will read only 10 Torr.   
If you are backfilling your vacuum system with Ar, when your system reaches atmospheric pressure of 760 Torr 
true pressure, your gauge will be reading about 20 Torr.  If you continue to backfill your system, attempting to 
increase the reading up to 760, you will overpressure your chamber and probably blow up your vacuum system !   
If the gas is He, the gauge will read 1000 Torr when pressure reaches about 10 Torr actual pressure.   
You probably won't blow up the vacuum system, but opening the chamber to atmosphere prematurely may 
present other hazards for both people and product. 
What these examples illustrate is that, without proper precautions,  

use of different gases can result in injury to personal and/or damage to equipment

.

 

 

Suggested precautions when using gases other than N

2

Install a pressure relief valve, or burst disk, on your chamber, to protect it from overpressure. 
Post a warning label on your gauge readout "Do Not Exceed ____ Torr Indicated Pressure" (fill in the blank for 
your gas) so that an operator using the gauge will not exceed a safe pressure. 

Summary of Contents for CVM211

Page 1: ...11 S ST TI IN NG GE ER R Convection Vacuum Gauge Module User s Manual Revision 1 05 Sept 25 2007 1475 S Fordham St Longmont CO 80503 Phone 303 651 0551 Fax 303 678 1754 E mail info instrutechinc com w...

Page 2: ...4 Gases other than N2 5 Flammable Explosive Gases 5 Installation Mechanical 5 Position 5 Vibrations 5 Fittings 5 Electrical 6 Connector Pinouts 6 Setup Operation User Interface Basics 7 Setting up th...

Page 3: ...Torr to 1 0 mTorr 1 digit LED from 0 9 mTorr to 0 1 mTorr materials exposed to gases gold plated tungsten 304 316 stainless steel glass nickel Teflon internal volume 26 cm3 1 589 in 3 internal surface...

Page 4: ...parts are specified by Instrutech Inc Unauthorized substitutions or non qualified parts may result in fire electric shock or other hazards To reduce the risk of fire or electric shock do not expose t...

Page 5: ...ure difference error between your process and the gauge and cause a delay in response to pressure changes Mounting the CVM too close to a gas source will also cause errors in the readings Don t mount...

Page 6: ...practice is to remove power from any cable prior to connecting or disconnecting it The InstruTech CVM 211 will directly replace GP Mini Convectron modules that have a 9 pin D connector and you can us...

Page 7: ...to save and go to the next step 6 The readout will display 000 to indicate the unit is in the zero adjust mode To properly set zero the gauge must be evacuated to a pressure below 10 4 Torr Factory de...

Page 8: ...il due to chemical reaction are generally not salvageable Sensors that fail due to coating may possibly be restored by cleaning See Appendix C for a more complete discussion of contamination and clean...

Page 9: ...hrough Friday at 303 651 0551 Or e mail us at info instrutechinc com If it becomes necessary to return the unit to InstruTech for service or calibration please call or e mail us for a return authoriza...

Page 10: ...ceed to next step without changing the zero value press select Readout displays current span value Factory default 760 Torr Is system backfilled with air or N2 to some known pressure above 400 Torr Or...

Page 11: ...of 0 375 to 5 659 VDC for 0 to 1000 Torr of N2 roughly in the shape of an S curve as shown at right GP adopted the same output curve for most of their Mini Convectron modules and controllers with non...

Page 12: ...r as thermal conductivity goes but even these two gases will exhibit slight differences in readings at higher pressures For example when venting a system to atmosphere using N2 you may see readings ch...

Page 13: ...essure is 100 Torr the gauge will read 100 Torr If the gas is Ar when the true pressure is 100 Torr the gauge will read only 10 Torr If you are backfilling your vacuum system with Ar when your system...

Page 14: ...70 1 3150 1 2910 1 2650 1 0020 1 3920 500 mTorr 1 6833 1 3860 1 5890 1 6640 1 6680 1 1940 1 8260 1 8050 1 9140 1 4690 2 0140 1 Torr 2 2168 1 8180 2 1640 2 1950 2 1720 1 5360 2 2570 2 2470 2 6030 1 976...

Page 15: ...288 5 233 4 845 5 210 5 220 5 616 5 201 5 522 5 0000 5 699 5 389 6 130 5 697 5 524 5 107 5 389 5 418 7 391 5 719 5 877 10 0000 6 000 5 602 8 041 6 013 5 696 5 250 5 471 5 530 8 041 6 332 6 446 20 0000...

Page 16: ...auge Module InstruTech Inc page 16 Log Linear Analog Output Voltage vs Pressure 0 1 2 3 4 5 6 7 8 9 0 0001 0 001 0 01 0 1 1 10 100 1000 Pressure Torr Output Signal Volts This is a plot of the formulas...

Page 17: ...87 359 781 1 Torr 1 00 600 940 970 950 400 1 05 1 04 1 55 745 1 60 2 Torr 2 00 1 14 2 22 1 94 1 71 700 1 62 1 66 4 13 1 59 3 33 5 Torr 5 00 2 45 13 5 4 98 3 34 1 28 2 45 2 62 246 5 24 7 53 10 Torr 10...

Page 18: ...s steel or ceramic to the gases There is no material that is universally chemical resistant your choice of vacuum gauge as well as all other vacuum components should take into consideration the potent...

Page 19: ...s such as pump oil However depending on your particular contamination you may need to use a more aggressive solvent Cleaning procedure 1 With the gauge port up pour your cleaning solution into the gau...

Page 20: ...Furthermore the warranty does not apply to products that have been contaminated or when the product or part is damaged during the warranty period due to causes other than ordinary wear and tear to th...

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