General Information
13
iina
74
e 0
1
.f
m
te
chn
ica
l ha
nd
boo
k
(1
40
8)
1.3.2
Technical Data
1.3.2.1
Physical Data
Max. inlet pressure
15 mbar
Minimum detectable Helium leak rates
•
in vacuum mode (ULTRA)
5×10
-12
mbar l/s (see
following CAUTION)
•
in sniffer mode
< 5×10
-8
mbar l/s
Maximum Helium leak rate which can be displayed
0.1 mbar l/s
Measurement range
12 decades
Time constant of the leak rate signal (blanked off,
63% of the final value)
<1 s
Roughing capability
25 m
3
/h, 17.6 cfm
(50 Hz)
Pumping speed (Helium) at the inlet (EN 1518)
30m³/h, 21.1 cfm
60 Hz
•
in vacuum mode
–
GROSS mode
8 l/s
–
FINE mode
20 l/s
–
ULTRA mode
>20 l/s
Detectable masses
2, 3 and 4
Mass spectrometer
180°
magnetic sector field
Ion source
2 filaments;
Iridium/Yttriumoxide
Inlet port
DN 40 KF
Run-up time (after starting)
4 min
Caution
To get down to the minimum detected leak rate range some conditions must be
fulfilled:
•
UL5000 has fully warmed up
•
Ambient conditions must be stable (temperature, no vibration/
accelerations.)
•
The part under test has been evacuated long enough (background
is no longer decreasing)
•
ZERO must be active
